公开(公告)号：US06337484B1

公开(公告)日：2002-01-08

申请号：US09353664

申请日：1999-07-15

申请人： Erik Roelof Loopstra ,  Adrianus Gerardus Bouwer ,  Henricus W. A. Janssen ,  Harmen Klaas Van Der Schoot

发明人： Erik Roelof Loopstra ,  Adrianus Gerardus Bouwer ,  Henricus W. A. Janssen ,  Harmen Klaas Van Der Schoot

IPC分类号： G03B2758

CPC分类号： G03F7/70716

摘要： A positioning device comprising a first part and a second part which is displaceable relative to the first part by means of a system of Lorentz-force motors, whereby, relative to the first part, the second part is supported in a Z-direction by means of at least one gas cylinder, said gas cylinder comprising a housing having a pressure chamber, which housing is coupled to the first part; and a piston which is coupled to the second part and which can be displaced in the pressure chamber in the Z-direction, said piston being journaled relative to said housing substantially at right angles to the Z-direction.

摘要翻译： 一种定位装置，包括第一部分和第二部分，所述第一部分和第二部分可通过洛伦兹力马达系统相对于所述第一部分移动，由此相对于所述第一部分，所述第二部分通过装置以Z方向被支撑 至少一个气瓶，所述气瓶包括具有压力室的壳体，该壳体联接到第一部分; 以及联接到所述第二部分并且可以在所述压力室中沿Z方向移位的活塞，所述活塞相对于所述壳体基本上与Z方向成直角地轴颈。