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    Aqueous insulating varnishes
    1.
    发明授权
    Aqueous insulating varnishes 失效
    水分绝缘变质

    公开(公告)号：US4011185A

    公开(公告)日：1977-03-08

    申请号：US650599

    申请日：1976-01-20

    申请人： Etsuo Hosokawa ,  Misao Waki ,  Katsumi Asada

    发明人： Etsuo Hosokawa ,  Misao Waki ,  Katsumi Asada

    IPC分类号： C08G63/20 ,  C08G63/685 ,  H01B3/42 ,  C08G63/76 ,  C08G63/68 ,  C08J3/06

    CPC分类号： H01B3/421 ,  C08G63/20 ,  C08G63/6854 ,  Y10T428/31681

    摘要： Insulating varnishes capable of forming a film possessing excellent electrical and mechanical properties can be obtained by reacting a reaction product of (1) a reactant of a dicarboxylic acid or a tricarboxylic acid or a derivative thereof comprising an aromatic dicarboxylic acid or a derivative thereof in an amount of at least 95 equivalent % [the term "equivalent" as used herein means (number of moles) x (number of reactive functional groups in one molecule)] of the total of the (1), (2) a primary diol and (3) an aliphatic polyhydric alcohol having at least 3 hydroxyl groups with (4) an aromatic teracarboxylic acid or derivative thereof, and subsequently dispersing the reaction product into an aqueous solution containing ammonia or an organic amine.

    Precision positioning apparatus
    4.
    发明授权
    Precision positioning apparatus 失效
    精密定位装置

    公开(公告)号：US5511930A

    公开(公告)日：1996-04-30

    申请号：US24473

    申请日：1993-03-01

    申请人： Mikio Sato ,  Katsumi Asada ,  Shinji Wakui

    发明人： Mikio Sato ,  Katsumi Asada ,  Shinji Wakui

    IPC分类号： G03F9/00 ,  G03F7/20 ,  G05B5/01 ,  G05B19/19 ,  G05D3/12 ,  H01L21/027 ,  H01L21/30 ,  G01M7/00

    CPC分类号： G03F7/709 ,  G05B19/19 ,  G05B5/01 ,  G05B2219/37275 ,  G05B2219/37313 ,  G05B2219/41117 ,  G05B2219/41179 ,  G05B2219/41181 ,  G05B2219/41195 ,  G05B2219/41346 ,  G05B2219/41367 ,  G05B2219/41457 ,  G05B2219/42104 ,  G05B2219/45026 ,  G05B2219/49258 ,  G05B2219/49271 ,  G05B2219/50046

    摘要： A precision positioning apparatus suitable for the positioning control system of a semiconductor exposing apparatus such as a stepper has, as its object, the provision of a non-contact type precision positioning apparatus capable of properly correcting the disturbance of posture or vibration based on low rigidityy which is a feature of a non-contact guide mechanism and accomplishing stable, highly accurate positioning at a high speed. The precision positioning apparatus is provided with a base plate, a movable member positioned on the base plate, a driving device for driving the movable member, a detecting device for detecting movement of the movable member, and a device for supplying the driving device with a signal regarding the movement of the movable member on the basis of a reference value and the output value from the detecting device. The supplying device includes a device for forming a correction signal for substantially negating a disturbance force to the movable member, by the use of the signal supplied to the driving device and the output from the detecting device. The signal supplied to the driving device can be corrected by the correction signal.

    摘要翻译： 作为适用于步进机等半导体曝光装置的定位控制系统的精密定位装置，目的在于提供一种能够根据低刚性正确地矫正姿势或振动的不接触型的精确定位装置 这是非接触引导机构的特征，并且以高速实现稳定，高精度的定位。 该精密定位装置设置有基板，位于基板上的可动构件，用于驱动可动构件的驱动装置，检测可动构件的移动的检测装置，以及用于向驱动装置供给 基于参考值和来自检测装置的输出值的可移动部件的移动的信号。 供给装置包括用于通过使用提供给驱动装置的信号和来自检测装置的输出来形成用于基本上消除对可动构件的干扰力的校正信号的装置。 可以通过校正信号校正提供给驱动装置的信号。

    Vibration control apparatus, lithography apparatus, and method of manufacturing article
    6.
    发明授权
    Vibration control apparatus, lithography apparatus, and method of manufacturing article 有权
    振动控制装置，光刻装置及其制造方法

    公开(公告)号：US09052614B2

    公开(公告)日：2015-06-09

    申请号：US13280243

    申请日：2011-10-24

    申请人： Ryo Nawata ,  Katsumi Asada

    发明人： Ryo Nawata ,  Katsumi Asada

    IPC分类号： G03F7/20

    CPC分类号： G03F7/709 ,  F16F15/002 ,  F16F15/022 ,  F16F2230/08 ,  H01J2237/0216

    摘要： A vibration control apparatus includes a first spring mechanism to support a first object as part of a first system. To control vibration of the first object, a first actuator applies a force to the first object via a command value generated by a first computing based on an output of a detection system. The detection system includes a second spring mechanism to support a second object as part of a second system. A third spring mechanism supports a third object as part of a third system. The first displacement detector detects displacement of the third object relative to the second object. The third object is prevented from being displaced relative to the second object. A second natural frequency of the second system is higher than a first natural frequency of the first system, and a third natural frequency of a third system is higher than the first natural frequency.

    摘要翻译： 振动控制装置包括第一弹簧机构，用于支撑第一物体作为第一系统的一部分。 为了控制第一物体的振动，第一致动器通过基于检测系统的输出的第一计算产生的命令值向第一物体施加力。 检测系统包括第二弹簧机构，用于支撑第二物体作为第二系统的一部分。 第三弹簧机构支撑第三物体作为第三系统的一部分。 第一位移检测器检测第三物体相对于第二物体的位移。 防止第三物体相对于第二物体移位。 第二系统的第二固有频率高于第一系统的第一固有频率，并且第三系统的第三固有频率高于第一固有频率。