Method and apparatus of fabricating a semiconductor device by back grinding and dicing

    公开(公告)号:US20080086858A1

    公开(公告)日:2008-04-17

    申请号:US11987844

    申请日:2007-12-05

    IPC分类号: H01L21/67

    摘要: A method and apparatus of fabricating a semiconductor device by back grinding and dicing is disclosed. The method may include at least adhering a protection tape for back grinding on a front surface of a semiconductor wafer, back grinding a rear surface of the semiconductor wafer while the protection tape faces downward, loading the semiconductor wafer to dicing equipment when the front surface having the protection tape faces downward, detecting a dicing position formed on the front surface of the semiconductor wafer, and dicing the semiconductor wafer with the protection tape adhering thereon into individual semiconductor chips in accordance with the detected dicing position. The dicing equipment may have a transparent aligning part for aligning the semiconductor wafer and a chuck part for supporting the semiconductor wafer.

    Method and apparatus of fabricating a semiconductor device by back grinding and dicing
    9.
    发明申请
    Method and apparatus of fabricating a semiconductor device by back grinding and dicing 失效
    通过背面研磨和切割制造半导体器件的方法和装置

    公开(公告)号:US20050196939A1

    公开(公告)日:2005-09-08

    申请号:US10984843

    申请日:2004-11-10

    摘要: A method and apparatus of fabricating a semiconductor device by back grinding and dicing is disclosed. The method may include at least adhering a protection tape for back grinding on a front surface of a semiconductor wafer, back grinding a rear surface of the semiconductor wafer while the protection tape faces downward, loading the semiconductor wafer to dicing equipment when the front surface having the protection tape faces downward, detecting a dicing position formed on the front surface of the semiconductor wafer, and dicing the semiconductor wafer with the protection tape adhering thereon into individual semiconductor chips in accordance with the detected dicing position. The dicing equipment may have a transparent aligning part for aligning the semiconductor wafer and a chuck part for supporting the semiconductor wafer.

    摘要翻译: 公开了一种通过背面研磨和切割制造半导体器件的方法和装置。 该方法可以包括至少在半导体晶片的前表面上粘贴用于背面研磨的保护带,当保护带朝下时,背面研磨半导体晶片的后表面,当前表面具有 保护带面向下,检测形成在半导体晶片的前表面上的切割位置,并根据检测到的切割位置将其上粘附有保护带的半导体晶片切割成单独的半导体芯片。 切割设备可以具有用于对准半导体晶片的透明对准部分和用于支撑半导体晶片的卡盘部分。

    Semiconductor package and package stacking structure and method using the same
    10.
    发明申请
    Semiconductor package and package stacking structure and method using the same 审中-公开
    半导体封装和封装堆叠结构及使用方法

    公开(公告)号:US20070029650A1

    公开(公告)日:2007-02-08

    申请号:US11361729

    申请日:2006-02-23

    IPC分类号: H01L23/495

    摘要: A semiconductor package presents Z-shaped outer leads. The outer leads have a first portion located near an upper surface of a package body, a second portion, and a third portion located near a lower surface of a package body. A second similar semiconductor package may be stacked on the first semiconductor package with the third portion of the second semiconductor package located on and electrically connected to the first portion of the first semiconductor package. In each of the first and second semiconductor packages, a distance between the bottom surface of the third portion of the outer lead and the lower surface of a package body may be greater than a distance between the top surface of the first portion of the outer lead and the upper surface of the package body.

    摘要翻译: 半导体封装呈现Z形外引线。 外引线具有位于封装主体的上表面附近的第一部分,第二部分和位于封装主体的下表面附近的第三部分。 第二类似的半导体封装可以堆叠在第一半导体封装上,其中第二半导体封装的第三部分位于第一半导体封装的第一部分上,并且与第一半导体封装的第一部分电连接。 在第一和第二半导体封装的每一个中,外部引线的第三部分的底表面和封装主体的下表面之间的距离可以大于外引线的第一部分的顶表面之间的距离 和包装体的上表面。