公开(公告)号：US08476807B2

公开(公告)日：2013-07-02

申请号：US13054683

申请日：2009-04-17

申请人： Eun Goo Kang ,  Young Jae Choi ,  Seok Woo Lee ,  Sang Moo Lee ,  Kyung Tae Nam ,  Sang Hoon Ji

发明人： Eun Goo Kang ,  Young Jae Choi ,  Seok Woo Lee ,  Sang Moo Lee ,  Kyung Tae Nam ,  Sang Hoon Ji

IPC分类号： H01L41/083

CPC分类号： B28D5/0082 ,  H02N2/02 ,  H02N2/04

摘要： The present invention relates to a stage, particularly to, a stage which is able to move minutely, having a rigidity-improved transfer part. A stage includes a work table on which a working object is placed, a motor configured to provide a rotational force, a shaft rotated by the motor to transfer the work table, a linear moving part configured to be expandable to linearly move the shaft in an axial direction, the linear moving part having a hollow to insert an end of the shaft therein, and an expanding part configured to be expandable as far as the shaft is moved by the linear moving part.

摘要翻译： 本发明涉及一种台阶，特别涉及能够精细移动的具有刚性改善的转印部分的台阶。 舞台包括放置工作对象的工作台，构造成提供旋转力的电动机，由电动机旋转以转移工作台的轴;线性移动部件，被构造成可扩展以使轴在线性移动 所述直线移动部件具有用于将所述轴的端部插入其中的中空部分，以及扩张部分，其构造成可扩张的，直到所述轴线被所述线性移动部件移动。

公开(公告)号：US20110181151A1

公开(公告)日：2011-07-28

申请号：US13054683

申请日：2009-04-17

申请人： Eun Goo Kang ,  Young Jae Choi ,  Seok Woo Lee ,  Sang Moo Lee ,  Kyung Tae Nam ,  Sang Hoon Ji

发明人： Eun Goo Kang ,  Young Jae Choi ,  Seok Woo Lee ,  Sang Moo Lee ,  Kyung Tae Nam ,  Sang Hoon Ji

IPC分类号： H02N2/04 ,  H02K41/02

CPC分类号： B28D5/0082 ,  H02N2/02 ,  H02N2/04

摘要： The present invention relates to a stage, particularly to, a stage which is able to move minutely, having a rigidity-improved transfer part. A stage includes a work table on which a working object is placed, a motor configured to provide a rotational force, a shaft rotated by the motor to transfer the work table, a linear moving part configured to be expandable to linearly move the shaft in an axial direction, the linear moving part having a hollow to insert an end of the shaft therein, and an expanding part configured to be expandable as far as the shaft is moved by the linear moving part.

摘要翻译： 本发明涉及一种台阶，特别涉及能够精细移动的具有刚性改善的转印部分的台阶。 舞台包括放置工作对象的工作台，构造成提供旋转力的电动机，由电动机旋转以转移工作台的轴;线性移动部件，被构造成可扩展以使轴在线性移动 所述直线移动部件具有用于将所述轴的端部插入其中的中空部分，以及扩张部分，其构造成可扩张的，直到所述轴线被所述线性移动部件移动。