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公开(公告)号：US11257651B2
公开(公告)日：2022-02-22
申请号：US16973497
申请日：2019-06-24
申请人： Excillum AB
发明人： Per Takman , Ulf Lundström , Björn Hansson
摘要： A method in an X-ray source configured to emit, from an interaction region, X-ray radiation generated by an interaction between an electron beam and a target, the method including the steps of: providing the target; providing the electron beam; deflecting the electron beam along a first direction relative the target; detecting electrons indicative of the interaction between the electron beam and the target; determining a first extension of the electron beam on the target, along the first direction, based on the detected electrons and the deflection of the electron beam; detecting X-ray radiation generated by the interaction between the electron beam and the target; and determining a second extension of the electron beam on the target, along a second direction, based on the detected X-ray radiation.
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公开(公告)号：US11350512B2
公开(公告)日：2022-05-31
申请号：US17057192
申请日：2019-06-07
申请人： Excillum AB
发明人： Per Takman , Ulf Lundström
摘要： A method for controlling an X-ray source configured to emit, from an X-ray spot on a target, X-ray radiation generated by an interaction between an electron beam and the target, wherein the X-ray spot is determined by the field of view of an X-ray optical system of the X-ray source. The method includes providing the target, providing the electron beam forming an electron spot on the target and interacting with the target to generate X-ray radiation, and adjusting a width and total power of the electron beam such that a maximum of the power density profile in the electron spot is below a predetermined limit, and such that a total power delivered to the target in the X-ray spot is increased.
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公开(公告)号：US10930464B2
公开(公告)日：2021-02-23
申请号：US16499582
申请日：2018-03-27
申请人： Excillum AB
发明人： Per Takman , Tomi Tuohimaa
摘要： A method for generating X-ray radiation, the method including providing a liquid target in a chamber, directing an electron beam towards the liquid target such that the electron beam interacts with the liquid target to generated X-ray radiation, estimating a number of particles produced from the interaction between the electron beam and the liquid target by measuring a number of positively charged particles in the chamber and eliminating a contribution from scattered electrons to the estimated number of particles, and controlling the electron beam, and/or a temperature in a region of the liquid target in which the electron beam interacts with the target, such that the estimated number of particles is below a predetermined limit. Also, a corresponding X-ray source.
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公开(公告)号：US11579318B2
公开(公告)日：2023-02-14
申请号：US17777747
申请日：2020-11-12
申请人： Excillum AB
发明人： Per Takman , Tomi Tuohimaa , Ulf Lundström
IPC分类号： G01T1/34
摘要： A method for characterizing an electron beam in a liquid metal jet X-ray source. The method includes providing the electron beam and directing the electron beam to an interaction region; providing an electron beam dump connected to ground potential for receiving the electron beam after it has traversed the interaction region; scanning the electron beam over at least part of the interaction region; measuring X-ray radiation generated by interaction between the electron beam and the electron beam dump during the scanning to obtain an X-ray profile; and calculating an electron beam characteristic based on the X-ray profile. Also a corresponding liquid metal jet X-ray source.
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公开(公告)号：US11438996B2
公开(公告)日：2022-09-06
申请号：US16967151
申请日：2019-02-08
申请人： Excillum AB
发明人： Tomi Tuohimaa , Per Takman , Daniel Larsson
摘要： A method for protecting an X-ray source including: a liquid jet generator configured to form a liquid jet moving along a flow axis; an electron source configured to provide an electron beam interacting with the liquid jet to generate X-ray radiation; the method including: generating the liquid jet: monitoring a quality measure indicating a performance of the liquid jet; identifying, based on the quality measure, a malperformance of the liquid jet; and if said malperformance is identified, causing the X-ray source to enter a safe mode for protecting the X ray source. Further, to corresponding devices.
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公开(公告)号：US11342154B2
公开(公告)日：2022-05-24
申请号：US16766935
申请日：2018-11-30
申请人： Excillum AB
发明人： Björn Hansson , Per Takman , Yuli Wang , Shiho Tanaka
摘要： The present inventive concept relates to an X-ray source comprising: a liquid target source configured to provide a liquid target moving along a flow axis; an electron source configured to provide an electron beam; and a liquid target shaper configured to shape the liquid target to comprise a non-circular cross section with respect to the flow axis, wherein the non-circular cross section has a first width along a first axis and a second width along a second axis, wherein the first width is shorter than the second width, and wherein the liquid target comprises an impact portion being intersected by the first axis; wherein the x-ray source is configured to direct the electron beam towards the impact portion such that the electron beam interacts with the liquid target within the impact portion to generate X-ray radiation.
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公开(公告)号：US10784069B2
公开(公告)日：2020-09-22
申请号：US16340449
申请日：2017-10-19
申请人： Excillum AB
发明人： Tomi Tuohimaa , Per Takman , Andrii Sofiienko
摘要： A system and method for generating X-ray radiation. The system includes an electron source operable to generate an electron beam and an X-ray target for generating X-ray radiation upon interaction with the electron beam. The method includes moving the electron beam over an edge separating a first region and a second region of the X-ray target, wherein the first region and the second region have different capability to generate X-ray radiation upon interaction with the electron beam. The system allows for a lateral extension of the electron beam to be determined based on a change in a quantity indicative of the interaction between the electron beam and the first region and between the electron beam and the second region, and the movement of the electron beam.
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