Liquid application device, liquid application method, and nanoimprint system
    1.
    发明授权
    Liquid application device, liquid application method, and nanoimprint system 有权
    液体应用装​​置,液体应用方法和纳米压印系统

    公开(公告)号:US08894187B2

    公开(公告)日:2014-11-25

    申请号:US13730578

    申请日:2012-12-28

    CPC classification number: B41J2/14209 B82Y10/00 B82Y40/00 G03F7/0002

    Abstract: A liquid application device includes: a liquid discharge head having a structure in which nozzles for performing droplet ejection of a functional liquid onto a substrate are aligned in a row in a predetermined direction, and including liquid chambers connected to the nozzles respectively and piezoelectric elements which are provided correspondingly to the liquid chambers and serve to pressurize the liquid in the liquid chambers; a relative movement unit for causing relative movement between the substrate and the liquid discharge head; and a droplet ejection control unit for operating the piezoelectric elements so as to cause the liquid to land discretely on the substrate, and controlling operation of the piezoelectric elements according to each of groups formed by grouping the nozzles correspondingly to the structure of the liquid discharge head.

    Abstract translation: 液体施加装置包括:液体排出头,其具有这样的结构,其中用于将功能液体的液滴喷射到基板上的喷嘴在预定方向上排成一行,并且包括分别连接到喷嘴的液体室和压电元件, 相应于液体室设置并用于对液体室中的液体加压; 相对移动单元,用于引起所述基板和所述液体排出头之间的相对移动; 以及液滴喷射控制单元,用于操作压电元件以使液体离散地落在基板上,并且根据与喷液头的结构对应地分组喷嘴形成的每个组,控制压电元件的操作 。

    Liquid ejection apparatus, nanoimprint system, and liquid ejection method
    3.
    发明授权
    Liquid ejection apparatus, nanoimprint system, and liquid ejection method 有权
    液体喷射装置,纳米压印系统和液体喷射方法

    公开(公告)号:US09028022B2

    公开(公告)日:2015-05-12

    申请号:US14471699

    申请日:2014-08-28

    CPC classification number: B41J2/04501 B41J3/407 B41J13/0009 B41J25/003

    Abstract: According an aspect of the present invention, when causing the liquid ejection head to perform a feeding operation along a first direction, the substrate is retracted outside the projected feeding region of the liquid ejection head and the supporting member thereof prior to starting the feeding operation of the liquid ejection head, preventing dusts and other foreign matters, generated as a result of the feeding operation of the liquid ejection head and the supporting member, from being deposited on a surface of the substrate onto which the liquid is to be deposited.

    Abstract translation: 根据本发明的一个方面,当使液体喷射头沿着第一方向进行进给操作时,在开始进给操作之前,将基板缩回到液体喷射头的突出进给区域和其支撑构件的外侧 液体喷射头,防止由于液体喷射头和支撑构件的进给操作而产生的灰尘等异物沉积在要沉积液体的基板的表面上。

    LIQUID APPLICATION DEVICE, LIQUID APPLICATION METHOD, AND NANOIMPRINT SYSTEM
    4.
    发明申请
    LIQUID APPLICATION DEVICE, LIQUID APPLICATION METHOD, AND NANOIMPRINT SYSTEM 审中-公开
    液体应用装​​置,液体应用方法和纳米印刷系统

    公开(公告)号:US20130120485A1

    公开(公告)日:2013-05-16

    申请号:US13730476

    申请日:2012-12-28

    Abstract: A liquid application device includes: a liquid ejection head including: nozzles configured to perform ejection of droplets of liquid toward a substrate; and liquid chambers connected respectively to the nozzles and defined by side walls, at least respective parts of the side walls being constituted of piezoelectric elements, the liquid ejection head being configured to cause shear deformation of the piezoelectric elements to eject the droplets of the liquid in the liquid chamber through the nozzles; and a droplet ejection control device configured to group the nozzles into groups of not less than three in such a manner that adjacent nozzles belong to different groups, and is configured to control operation of the piezoelectric elements in such a manner that the droplet ejection is performed at a same timing only through the nozzles belonging to a same group so as to deposit the liquid discretely onto the substrate.

    Abstract translation: 液体施加装置包括:液体喷射头,包括:喷嘴,被配置为执行朝向基板的液滴喷射; 以及分别连接到所述喷嘴并由侧壁限定的液体室,所述侧壁的至少相应部分由压电元件构成,所述液体喷射头构造成使得所述压电元件的剪切变形将所述液体的液滴喷出 液体腔通过喷嘴; 以及液滴喷射控制装置,其被配置为以相邻喷嘴属于不同组的方式将喷嘴分组成不小于3的组,并且被配置为以这样的方式控制压电元件的操作,使得执行液滴喷射 在相同的时刻,仅通过属于同一组的喷嘴,以便将液体离散地沉积在基板上。

    Printing apparatus and printing method
    6.
    发明授权
    Printing apparatus and printing method 有权
    印刷装置和印刷方法

    公开(公告)号:US09481185B2

    公开(公告)日:2016-11-01

    申请号:US14853209

    申请日:2015-09-14

    Inventor: Kenichi Kodama

    Abstract: A printing apparatus includes: a printing plate having a recessed portion formed therein shaped corresponding to a pattern to be formed on a substrate; an inking unit including an inkjet head that performs an inking process of ejecting a liquid into the recessed portion, the liquid having particles as a material of the pattern dispersed therein; a laminating unit that performs a laminating process of laminating the substrate on a surface having the recessed portion formed therein after the inking process; a post-drying unit that performs a drying process on the liquid inside the recessed portion in a state in which the substrate is laminated on the surface having the recessed portion formed therein, thereby to reduce the fluidity of the liquid; and a peeling unit that peels off the substrate from the printing plate after the drying process by the post-drying unit.

    Abstract translation: 印刷装置包括:印刷版,其具有形成在其上的凹部,其形状对应于要形成在基板上的图案; 一个墨水单元,包括一个喷墨头,该喷墨头执行将液体喷射到该凹部中的上墨过程,该液体具有分散在其中的图案的材料的颗粒; 层压单元,其在着墨处理之后执行层压将基板层叠在其上形成有凹部的表面上; 后干燥单元,其在基板层叠在其上形成有凹部的表面的状态下对凹部内的液体进行干燥处理,从而降低液体的流动性; 以及剥离单元,其通过后干燥单元进行干燥处理后从基板剥离基板。

    Inkjet discharge method, pattern formation method, and pattern
    7.
    发明申请
    Inkjet discharge method, pattern formation method, and pattern 有权
    喷墨放电法,图案形成方法和图案

    公开(公告)号:US20160122563A1

    公开(公告)日:2016-05-05

    申请号:US14757424

    申请日:2015-12-23

    Abstract: The present invention provides a discharge method which makes it possible to appropriately perform discharge even when a head for discharging microdroplets having a size of equal to or less than 6 pL that is necessary for controlling a residual film (forming a thin film and achieving uniformity) is used, and makes it possible to obtain an excellent pattern having excellent release properties. The discharge method is an inkjet discharge method including discharging a photocurable composition in the form of liquid droplets having a size of equal to or less than 6 pL, in which the composition satisfies the following (a) to (c), (a) containing a fluorine-containing material in a proportion of equal to or less than 4% by mass of the composition; (b) having a surface tension of 25 mN/m to 35 mN/m; and (c) containing a solvent having a boiling point of equal to or less than 200° C. in an amount of 5% by mass of the composition.

    Abstract translation: 本发明提供了一种排出方法,即使用于排出具有等于或小于6pL的尺寸的微滴的头部(即形成薄膜并实现均匀性)所需的位置也可适当地进行放电, ,并且可以获得具有优异的剥离性能的优异图案。 放电方法是喷墨放电方法,包括以等于或小于6pL的液滴的形式排出光固化组合物,其中组合物满足以下(a)至(c),(a) 比例为组合物质量的4质量%以下的含氟材料; (b)表面张力为25mN / m至35mN / m; 和(c)以组合物的5质量%的量含有沸点等于或小于200℃的溶剂。

    Liquid application device, liquid application method, and nanoimprint system

    公开(公告)号:US08851636B2

    公开(公告)日:2014-10-07

    申请号:US13730578

    申请日:2012-12-28

    Abstract: A liquid application device includes: a liquid discharge head having a structure in which nozzles for performing droplet ejection of a functional liquid onto a substrate are aligned in a row in a predetermined direction, and including liquid chambers connected to the nozzles respectively and piezoelectric elements which are provided correspondingly to the liquid chambers and serve to pressurize the liquid in the liquid chambers; a relative movement unit for causing relative movement between the substrate and the liquid discharge head; and a droplet ejection control unit for operating the piezoelectric elements so as to cause the liquid to land discretely on the substrate, and controlling operation of the piezoelectric elements according to each of groups formed by grouping the nozzles correspondingly to the structure of the liquid discharge head.

    Ejection volume correction method for inkjet head, ejection volume correction apparatus

    公开(公告)号:US09724916B2

    公开(公告)日:2017-08-08

    申请号:US14213939

    申请日:2014-03-14

    CPC classification number: B41J2/12 B82Y10/00 B82Y40/00 G01B15/02 G03F7/0002

    Abstract: An aspect of the present invention provides an ejection volume correction method for an inkjet head, including: an arranging step of ejecting functional ink as ink droplets from nozzles of an inkjet head so as to discretely arrange the ink droplets on a front surface of a substrate; a contacting step of filling the functional ink in between a mold and the substrate by causing the mold to contact the ink droplets arranged on the front surface of the substrate; a curing step of curing the filled functional ink so as to generate a functional film; a separating step of separating the mold from the functional film; a measuring step of measuring a thickness of the functional film; and a correcting step of correcting an ejection volume from the nozzles based on the measured thickness.

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