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    Chemical mechanical planarization of low dielectric constant materials
    1.
    发明授权
    Chemical mechanical planarization of low dielectric constant materials 失效
    低介电常数材料的化学机械平面化

    公开(公告)号：US06736992B2

    公开(公告)日：2004-05-18

    申请号：US10145649

    申请日：2002-05-14

    申请人： Fan Zhang ,  Feng Liu ,  Dan Towery

    发明人： Fan Zhang ,  Feng Liu ,  Dan Towery

    IPC分类号： C09K1300

    CPC分类号： C09K3/1472 ,  C09G1/02 ,  C09K3/1436 ,  C09K3/1463 ,  H01L21/31053 ,  H01L21/31058

    摘要： The present invention relates to apparatus, procedures and compositions for avoiding and reducing damage to low dielectric constant materials and other soft materials, such as Cu and Al, used in fabricating semiconductor devices. Damage reduction can be achieved by decreasing the role of mechanical abrasion in the CMP of these materials and increasing the role of chemical polishing, which can also improve material removal rates. Increasing the role of chemical polishing can be accomplished by creating a polishing slurry, which contains components that interact chemically with the surface to be polished. This slurry may or may not also contain soft abrasive particles, which replace the hard abrasive particles of conventional slurries. Use of soft abrasive particles can reduce the role of mechanical abrasion in the CMP process. Use of this slurry in CMP can reduce surface scratches and device damage.

    摘要翻译： 本发明涉及用于避免和减少用于制造半导体器件的低介电常数材料和其它软材料（例如Cu和Al）的损伤的装置，程序和组合物。 通过减少这些材料的CMP中的机械磨损的作用并增加化学抛光的作用可以减少损伤，这也可以提高材料去除率。 增加化学抛光的作用可以通过产生抛光浆料来实现，抛光浆料含有与待抛光表面化学反应的组分。 该浆料可以含有也可以不含有软磨粒，其代替常规浆料的硬磨粒。 使用软磨粒可以减少CMP工艺中机械磨损的作用。 在CMP中使用这种浆料可以减少表面划痕和器件损坏。

    Chemical mechanical planarization of low dielectric constant materials
    2.
    发明授权
    Chemical mechanical planarization of low dielectric constant materials 失效
    低介电常数材料的化学机械平面化

    公开(公告)号：US06416685B1

    公开(公告)日：2002-07-09

    申请号：US09547187

    申请日：2000-04-11

    申请人： Fan Zhang ,  Feng Liu ,  Dan Towery

    发明人： Fan Zhang ,  Feng Liu ,  Dan Towery

    IPC分类号： C09K1300

    CPC分类号： C09K3/1472 ,  C09G1/02 ,  C09K3/1436 ,  C09K3/1463 ,  H01L21/31053

    摘要： The present invention relates to apparatus, procedures and compositions for avoiding and reducing damage to low dielectric constant materials and other soft materials, such as Cu and Al, used in fabricating semiconductor devices. Damage reduction can be achieved by decreasing the role of mechanical abrasion in the CMP of these materials and increasing the role of chemical polishing, which can also improve material removal rates. Increasing the role of chemical polishing can be accomplished by creating a polishing slurry, which contains components that interact chemically with the surface to be polished. This slurry may or may not also contain soft abrasive particles, which replace the hard abrasive particles of conventional slurries. Use of soft abrasive particles can reduce the role of mechanical abrasion in the CMP process. Use of this slurry in CMP can reduce surface scratches and device damage.

    摘要翻译： 本发明涉及用于避免和减少用于制造半导体器件的低介电常数材料和其它软材料（例如Cu和Al）的损伤的装置，程序和组合物。 通过减少这些材料的CMP中的机械磨损的作用并增加化学抛光的作用可以减少损伤，这也可以提高材料去除率。 增加化学抛光的作用可以通过产生抛光浆料来实现，抛光浆料含有与待抛光表面化学反应的组分。 该浆料可以含有也可以不含有软磨粒，其代替常规浆料的硬磨粒。 使用软磨粒可以减少CMP工艺中机械磨损的作用。 在CMP中使用这种浆料可以减少表面划痕和器件损坏。

    Method for Ensuring Service Class of Packet Service and Method of Rate Limitation
    3.
    发明申请
    Method for Ensuring Service Class of Packet Service and Method of Rate Limitation 有权
    确保分组业务的业务类别和速率限制方法的方法

    公开(公告)号：US20090010161A1

    公开(公告)日：2009-01-08

    申请号：US11568311

    申请日：2006-05-17

    申请人： Fan Zhang ,  Feng Liu

    发明人： Fan Zhang ,  Feng Liu

    IPC分类号： H04L12/43

    CPC分类号： H04L47/25 ,  H04L12/437 ,  H04L47/11 ,  H04L47/215 ,  H04L47/2408 ,  Y10S370/909

    摘要： The present invention discloses a method for ensuring service classes of packet services, which includes limiting the rate of services with different service classes uploaded to a ringlet from an RPR station in accordance with the RPR physical packet lengths; monitoring, in real time, the rate of non-class A0 services uploaded to the ringlet from the RPR station and forwarded by the RPR station in accordance with the RPR physical packet lengths, and when the rate of the non-class A0 services exceeds the un-reserved rate of the RPR network, reporting a congestion message and adjusting the rate of the non-class A0 services uploaded to the ringlet from the RPR stations in the congestion domain. A method of rate limitation is also disclosed, by which rate limitation is conducted based on a Token Bucket according to the total length of the sent packet after encapsulation. The methods, by means of rate limitation and rate monitoring of the services uploaded to the ringlet from each RPR station according to the RPR physical packet length, can effectively overcome the shortcoming that the reserved bandwidth in the RPR can not be ensured because forwarded services unexpected occupy the bandwidth of the services uploaded to the ringlet at a downstream RPR station due to the physical layer encapsulation overhead.

    摘要翻译： 本发明公开了一种确保分组业务等级的方法，其中包括根据RPR物理分组长度，限制从RPR站上传到小环的不同业务类别的业务速率; 实时监控从RPR站上传到小环的非A0类业务的速率，并根据RPR物理分组长度由RPR站转发，当非A0业务的速率超过 RPR网络的未保留速率，报告拥塞消息，并调整从拥塞域中的RPR站上传到小环的非A0级业务的速率。 还公开了速率限制的方法，通过该方法，根据封装后发送的分组的总长度，基于令牌桶进行速率限制。 根据RPR物理分组长度，通过对每个RPR站上传到小环的业务的速率限制和速率监控方法，可以有效地克服RPR中保留带宽无法保证的缺点，因为转发业务意外 占用由于物理层封装开销而在下游RPR站上载到小环的业务的带宽。

    Method for ensuring service class of packet service and method of rate limitation
    4.
    发明授权
    Method for ensuring service class of packet service and method of rate limitation 有权
    确保分组业务等级的速率限制方法

    公开(公告)号：US07684348B2

    公开(公告)日：2010-03-23

    申请号：US11568311

    申请日：2006-05-17

    申请人： Fan Zhang ,  Feng Liu

    发明人： Fan Zhang ,  Feng Liu

    IPC分类号： G01R31/08 ,  H04L12/28

    CPC分类号： H04L47/25 ,  H04L12/437 ,  H04L47/11 ,  H04L47/215 ,  H04L47/2408 ,  Y10S370/909

    摘要： The present invention discloses a method for ensuring service classes of packet services, which includes limiting the rate of services with different service classes uploaded to a ringlet from an RPR station in accordance with the RPR physical packet lengths; monitoring, in real time, the rate of non-class A0 services uploaded to the ringlet from the RPR station and forwarded by the RPR station in accordance with the RPR physical packet lengths, and when the rate of the non-class A0 services exceeds the un-reserved rate of the RPR network, reporting a congestion message and adjusting the rate of the non-class A0 services uploaded to the ringlet from the RPR stations in the congestion domain. A method of rate limitation is also disclosed, by which rate limitation is conducted based on a Token Bucket according to the total length of the sent packet after encapsulation. The methods, by means of rate limitation and rate monitoring of the services uploaded to the ringlet from each RPR station according to the RPR physical packet length, can effectively overcome the shortcoming that the reserved bandwidth in the RPR can not be ensured because forwarded services unexpected occupy the bandwidth of the services uploaded to the ringlet at a downstream RPR station due to the physical layer encapsulation overhead.

    摘要翻译： 本发明公开了一种确保分组业务等级的方法，其中包括根据RPR物理分组长度，限制从RPR站上传到小环的不同业务类别的业务速率; 实时监控从RPR站上传到小环的非A0类业务的速率，并根据RPR物理分组长度由RPR站转发，当非A0业务的速率超过 RPR网络的未保留速率，报告拥塞消息，并调整从拥塞域中的RPR站上传到小环的非A0级业务的速率。 还公开了速率限制的方法，通过该方法，根据封装后发送的分组的总长度，基于令牌桶进行速率限制。 根据RPR物理分组长度，通过对每个RPR站上传到小环的业务的速率限制和速率监控方法，可以有效地克服RPR中保留带宽无法保证的缺点，因为转发业务意外 占用由于物理层封装开销而在下游RPR站上载到小环的业务的带宽。

    Vibration system
    6.
    发明授权
    Vibration system 有权

    公开(公告)号：US09967674B2

    公开(公告)日：2018-05-08

    申请号：US15383013

    申请日：2016-12-19

    申请人： Shuai Li ,  Fan Zhang

    发明人： Shuai Li ,  Fan Zhang

    IPC分类号： H04R1/00 ,  H04R9/02 ,  H04R9/06

    CPC分类号： H04R9/022 ,  H04R7/16 ,  H04R9/04 ,  H04R9/06

    摘要： A vibration system is disclosed. The vibration system includes a vibrating diaphragm including a dome part and a suspension part encircling the dome part; a voice coil for driving the vibration diaphragm; and a heat conduction plate located between and connected with the dome part and the suspension part. The heat conduction plate includes a lower surface connecting with the voice coil and an upper surface opposite to the lower surface. The suspension part includes an internal peripheral part connected with the heat conduction plate, the dome part comprises a joint part connected with the heat conduction plate, and the upper surface of the heat conduction plate is at least partially exposed outside.

    Miniature Sounding Device
    7.
    发明申请
    Miniature Sounding Device 审中-公开

    公开(公告)号：US20180027336A1

    公开(公告)日：2018-01-25

    申请号：US15416845

    申请日：2017-01-26

    申请人： Shuai Li ,  Fan Zhang ,  Zhijun Yan

    发明人： Shuai Li ,  Fan Zhang ,  Zhijun Yan

    IPC分类号： H04R9/06 ,  H04R9/02 ,  H04R7/12 ,  H04R1/06 ,  H04R7/18

    CPC分类号： H04R9/06 ,  H04R1/06 ,  H04R7/04 ,  H04R7/127 ,  H04R7/18 ,  H04R9/025 ,  H04R9/045 ,  H04R2499/11

    摘要： The present disclosure provides a miniature sounding device, including a fixing system; and a vibrating system including a diaphragm, a voice coil underneath the diaphragm and configured to drive the diaphragm to vibrate and sound and a flexible circuit board outside the voice coil, the voice coil includes a first end surface which is connected with the diaphragm and a second end surface opposite to the first end surface, the flexible circuit board is level with the first end surface and includes a first surface adjacent to the diaphragm and a second surface opposite to the first surface, the voice coil includes a voice coil lead wire which extends out from the first end surface and is fixedly connected with the second surface, a gap configured to provide space for the voice coil is provided at a side of the flexible circuit board adjacent to the voice coil.

    Seal assembly for controlling fluid flow
    9.
    发明授权
    Seal assembly for controlling fluid flow 有权
    用于控制流体流动的密封组件

    公开(公告)号：US09234431B2

    公开(公告)日：2016-01-12

    申请号：US13178784

    申请日：2011-07-08

    申请人： Christian Kowalski ,  Fan Zhang ,  Uwe Lohse ,  Robert W. Sunshine ,  Burkhard Voss

    发明人： Christian Kowalski ,  Fan Zhang ,  Uwe Lohse ,  Robert W. Sunshine ,  Burkhard Voss

    IPC分类号： F02C7/12 ,  F02K3/02 ,  F02C7/20 ,  F02C6/08 ,  F01D9/02 ,  F01D11/00 ,  F01D11/02 ,  F01D11/18

    CPC分类号： F01D9/023 ,  F01D11/006 ,  F01D11/025 ,  F01D11/18 ,  F05D2240/56 ,  F05D2300/502

    摘要： A seal assembly (50, 60) for a gas turbine engine for controlling air flow between a diffuser (48) and rotor disks comprising first and second annular flange ends (52, 54) and an annular seal mid-section (56) between and operatively connected to the flange ends (52, 54). The first and second annular flange ends (52, 54) abut respective outer frame members (46) of the diffuser, whereby a fluid flow path is formed between the seal assembly (50, 60) and the rotor disks (42). The first and second end flanges (52, 54) are composed of a material having a coefficient of thermal expansion that is substantially the same as a coefficient of thermal expansion of the material of the outer frame members (46). In addition, the material of the seal mid-section (56) has a coefficient of thermal expansion that is different than that of the materials of the annular flange ends (52, 54) and outer frame members (46).

    摘要翻译： 一种用于燃气涡轮发动机的密封组件（50,60），用于控制扩散器（48）和转子盘之间的空气流，所述转子盘包括第一和第二环形凸缘端部（52,54）和环形密封中间部分（56） 可操作地连接到凸缘端部（52,54）。 第一和第二环形凸缘端部（52,54）邻接扩散器的相应的外部框架构件（46），由此在密封组件（50,60）和转子盘（42）之间形成流体流动路径。 第一和第二端部凸缘（52,54）由具有与外框架构件（46）的材料的热膨胀系数基本相同的热膨胀系数的材料构成。 此外，密封中段（56）的材料具有与环形凸缘端部（52,54）和外框架构件（46）的材料不同的热膨胀系数。