Methods and apparatus for polishing a semiconductor wafer
    1.
    发明授权
    Methods and apparatus for polishing a semiconductor wafer 失效
    抛光半导体晶片的方法和装置

    公开(公告)号:US07824244B2

    公开(公告)日:2010-11-02

    申请号:US11807783

    申请日:2007-05-30

    IPC分类号: B24B49/12

    CPC分类号: B24B37/005 B24B21/06

    摘要: Methods and apparatus provide for: a base on which a substrate may be releasably coupled; a moving belt located with respect to the base such that a contact surface thereof is operable to remove material from a top surface of the substrate; and a plurality of actuators, at least two of which are independently controllable, located with respect to the base and the moving belt such that a corresponding plurality of pressure zones are defined to provide pressure between the moving belt and the top surface of the substrate.

    摘要翻译: 方法和装置提供:基底可以可释放地联接的基底; 相对于基座定位的移动带,使得其接触表面可操作以从基底的顶表面去除材料; 以及多个致动器,其至少两个独立地可控制地相对于基座和移动带定位,使得相应的多个压力区被限定以在移动带与基板的顶表面之间提供压力。

    Methods and apparatus for polishing a semiconductor wafer
    2.
    发明申请
    Methods and apparatus for polishing a semiconductor wafer 失效
    抛光半导体晶片的方法和装置

    公开(公告)号:US20080299871A1

    公开(公告)日:2008-12-04

    申请号:US11807783

    申请日:2007-05-30

    IPC分类号: B24B49/00

    CPC分类号: B24B37/005 B24B21/06

    摘要: Methods and apparatus provide for: a base on which a substrate may be releasably coupled; a moving belt located with respect to the base such that a contact surface thereof is operable to remove material from a top surface of the substrate; and a plurality of actuators, at least two of which are independently controllable, located with respect to the base and the moving belt such that a corresponding plurality of pressure zones are defined to provide pressure between the moving belt and the top surface of the substrate.

    摘要翻译: 方法和装置提供:基底可以可释放地联接的基底; 相对于基座定位的移动带,使得其接触表面可操作以从基底的顶表面去除材料; 以及多个致动器,其至少两个独立地可控制地相对于基座和移动带定位,使得相应的多个压力区被限定以在移动带与基板的顶表面之间提供压力。

    METHODS AND APPARATUSES FOR COOLING OPTICAL FIBERS
    4.
    发明申请
    METHODS AND APPARATUSES FOR COOLING OPTICAL FIBERS 有权
    冷却光纤的方法和装置

    公开(公告)号:US20140096565A1

    公开(公告)日:2014-04-10

    申请号:US13644578

    申请日:2012-10-04

    IPC分类号: C03B37/10

    CPC分类号: C03B37/02718 Y02P40/57

    摘要: Methods and apparatuses for cooling optical fibers are disclosed. In one embodiment, In some embodiments, a cooling apparatus for cooling an optical fiber in a production process includes a channel defined by at least one sidewall assembly and a plurality of interior cavities positioned along the interior of the sidewall assembly. The interior cavities include at least one plenum, a first plurality of fluid supply cavities in fluid communication with the at least one plenum, and a second plurality of fluid supply cavities in fluid communication with the at least one plenum. Cooling fluid is supplied from the at least one plenum to the first plurality of fluid supply cavities in a first direction and the second plurality of fluid supply cavities in a second direction opposite the first direction.

    摘要翻译: 公开了用于冷却光纤的方法和装置。 在一个实施例中,在一些实施例中,用于在生产过程中冷却光纤的冷却装置包括由至少一个侧壁组件和沿着侧壁组件的内部定位的多个内部空腔限定的通道。 内部空腔包括至少一个气室,与至少一个气室流体连通的第一多个流体供应空腔,以及与至少一个气室流体连通的第二多个流体供应空腔。 冷却流体从第一方向从至少一个通气室供应到第一多个流体供应腔,并且第二多个流体供应腔沿与第一方向相反的第二方向供应。

    Methods and apparatuses for cooling optical fibers
    9.
    发明授权
    Methods and apparatuses for cooling optical fibers 有权
    用于冷却光纤的方法和装置

    公开(公告)号:US08973409B2

    公开(公告)日:2015-03-10

    申请号:US13644578

    申请日:2012-10-04

    IPC分类号: C03B37/10

    CPC分类号: C03B37/02718 Y02P40/57

    摘要: Methods and apparatuses for cooling optical fibers are disclosed. In one embodiment, In some embodiments, a cooling apparatus for cooling an optical fiber in a production process includes a channel defined by at least one sidewall assembly and a plurality of interior cavities positioned along the interior of the sidewall assembly. The interior cavities include at least one plenum, a first plurality of fluid supply cavities in fluid communication with the at least one plenum, and a second plurality of fluid supply cavities in fluid communication with the at least one plenum. Cooling fluid is supplied from the at least one plenum to the first plurality of fluid supply cavities in a first direction and the second plurality of fluid supply cavities in a second direction opposite the first direction.

    摘要翻译: 公开了用于冷却光纤的方法和装置。 在一个实施例中,在一些实施例中,用于在生产过程中冷却光纤的冷却装置包括由至少一个侧壁组件和沿着侧壁组件的内部定位的多个内部空腔限定的通道。 内部空腔包括至少一个气室,与至少一个气室流体连通的第一多个流体供应空腔,以及与至少一个气室流体连通的第二多个流体供应空腔。 冷却流体从第一方向从至少一个通气室供应到第一多个流体供应腔,并且第二多个流体供应腔沿与第一方向相反的第二方向供应。