公开(公告)号：US06957622B2

公开(公告)日：2005-10-25

申请号：US10773605

申请日：2004-02-05

申请人： Gregory S. Boettcher ,  Steven B. Gold ,  Robert P. Katz ,  Gabriel V. Moore

发明人： Gregory S. Boettcher ,  Steven B. Gold ,  Robert P. Katz ,  Gabriel V. Moore

IPC分类号： G01D11/00 ,  G01D21/00 ,  G01N3/56 ,  G01N33/00

CPC分类号： G01N3/56 ,  G01N2033/0095

摘要： An in-situ wear indicator for detecting wear to at least one selected part in a semiconductor manufacturing environment. The indicator is manufactured in a selected material with a selected thickness so that the indicator degrades upon exposure to the semiconductor manufacturing process at a fixed rate relative to the wear of the selected part. The indicator displays a visual indication of wear which is discernible by an automated detection device.

摘要翻译： 一种用于在半导体制造环境中检测对至少一个选定部件的磨损的原位磨损指示器。 该指示器以所选择的厚度制成所选择的材料，使得指示剂以暴露于半导体制造工艺的相对于所选择的部件的磨损的固定速率降低。 该指示器显示可由自动检测装置识别的磨损的视觉指示。