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    Method and system for providing an improved hard bias structure
    1.
    发明授权
    Method and system for providing an improved hard bias structure 有权
    提供改进的硬偏置结构的方法和系统

    公开(公告)号：US08343319B1

    公开(公告)日：2013-01-01

    申请号：US12238156

    申请日：2008-09-25

    申请人： Guanxiong Li ,  Xiaohai Xiang ,  Ming Mao ,  Mahendra Pakala

    发明人： Guanxiong Li ,  Xiaohai Xiang ,  Ming Mao ,  Mahendra Pakala

    IPC分类号： C23C14/34

    CPC分类号： G11B5/3932 ,  G11B5/3163

    摘要： A method and system for providing a magnetic transducer is described. The method and system define a magnetoresistive sensor in a track width direction, provide hard bias material(s) adjacent to the sensor in the track width direction, and provide sacrificial capping layer(s) on a portion of the hard bias material(s). The sacrificial capping layer(s) have a first height in a stripe height direction. The method and system also provide a mask for defining a stripe height of the sensor. The mask covers at least part of the sensor and has a second height in the stripe height direction. The second height is less than the first height. The method and system define the stripe height of the sensor while the mask covers the sensor. The sacrificial capping layer(s) are configured to prevent removal of the portion of the hard bias material(s) while the stripe height is defined.

    摘要翻译： 描述了一种用于提供磁换能器的方法和系统。 该方法和系统在磁道宽度方向上限定磁阻传感器，在磁道宽度方向上提供与传感器相邻的硬偏置材料，并在硬偏置材料的一部分上提供牺牲性覆盖层， 。 牺牲覆盖层具有条纹高度方向上的第一高度。 该方法和系统还提供用于定义传感器的条纹高度的掩模。 掩模覆盖传感器的至少一部分，并且在条纹高度方向上具有第二高度。 第二个高度小于第一个高度。 该方法和系统定义传感器的条纹高度，同时掩模覆盖传感器。 牺牲覆盖层被构造成在限定条纹高度的同时防止去除硬偏移材料的一部分。

    Method and system for providing a hard bias structure in a magnetic recording transducer
    2.
    发明授权
    Method and system for providing a hard bias structure in a magnetic recording transducer 有权
    在磁记录传感器中提供硬偏置结构的方法和系统

    公开(公告)号：US08547667B1

    公开(公告)日：2013-10-01

    申请号：US12324735

    申请日：2008-11-26

    申请人： Anup Ghosh Roy ,  Ming Mao ,  Mahendra Pakala

    发明人： Anup Ghosh Roy ,  Ming Mao ,  Mahendra Pakala

    IPC分类号： G11B5/127

    CPC分类号： G11B5/3932

    摘要： A method and system for providing a magnetic transducer is described. The method and system include providing a seed layer and providing at least one adjustment layer on the seed layer. The method and system also include providing a hard bias structure on the at least one adjustment layer. The seed layer has a first template including a first template dimension and a first texture. The at least one adjustment layer has a second template including a second template dimension and a second texture. The hard bias structure has a third template including a third template dimension and a third texture. The second template is between the first template and the third template.

    摘要翻译： 描述了一种用于提供磁换能器的方法和系统。 该方法和系统包括提供种子层并在种子层上提供至少一个调节层。 该方法和系统还包括在至少一个调节层上提供硬偏压结构。 种子层具有包括第一模板尺寸和第一纹理的第一模板。 所述至少一个调整层具有包括第二模板尺寸和第二纹理的第二模板。 硬偏置结构具有包括第三模板尺寸和第三纹理的第三模板。 第二个模板位于第一个模板和第三个模板之间。

    Method for fabricating a read sensor for a read transducer
    4.
    发明授权
    Method for fabricating a read sensor for a read transducer 失效
    读取传感器的读取传感器的制造方法

    公开(公告)号：US08607438B1

    公开(公告)日：2013-12-17

    申请号：US13309357

    申请日：2011-12-01

    申请人： Wei Gao ,  Guanxiong Li ,  Ming Mao ,  Chih-Ching Hu ,  Guanghong Luo ,  Miao Wang ,  Zhihong Zhang ,  Anup G. Roy

    发明人： Wei Gao ,  Guanxiong Li ,  Ming Mao ,  Chih-Ching Hu ,  Guanghong Luo ,  Miao Wang ,  Zhihong Zhang ,  Anup G. Roy

    IPC分类号： G11B5/127 ,  H04R31/00

    CPC分类号： G11B5/3903 ,  G01R33/093 ,  G11B5/3163

    摘要： A read sensor for a transducer is fabricated. The transducer has a field region and a sensor region corresponding to the sensor. A sensor stack is deposited. A hybrid mask including hard and field masks is provided. The hard mask includes a sensor portion covering the sensor region and a field portion covering the field region. The field mask covers the field portion of the hard mask. The field mask exposes the sensor portion of the hard mask and part of the sensor stack between the sensor and field regions. The sensor is defined from the sensor stack in a track width direction. Hard bias layer(s) are deposited. Part of the hard bias layer(s) resides on the field mask. Part of the hard bias layer(s) adjoining the sensor region is sealed. The field mask is lifted off. The transducer is planarized.

    摘要翻译： 制造用于换能器的读取传感器。 传感器具有对应于传感器的场区域和传感器区域。 传感器堆叠被沉积。 提供了包括硬掩模和磁场掩模的混合掩模。 硬掩模包括覆盖传感器区域的传感器部分和覆盖场区域的场部分。 场掩模覆盖硬掩模的场部分。 场掩模将传感器和场区域之间的硬掩模的传感器部分和传感器堆叠的一部分暴露。 传感器从传感器堆叠在轨道宽度方向上定义。 硬偏置层被沉积。 硬偏置层的一部分位于场掩模上。 邻近传感器区域的一部分硬偏压层被密封。 场地面罩被提起。 传感器平坦化。

    Magnetic recording transducer
    6.
    发明授权
    Magnetic recording transducer 有权
    磁记录传感器

    公开(公告)号：US09431040B1

    公开(公告)日：2016-08-30

    申请号：US13535828

    申请日：2012-06-28

    申请人： Guanxiong Li ,  Wei Zhang ,  Ming Mao

    发明人： Guanxiong Li ,  Wei Zhang ,  Ming Mao

    IPC分类号： G11B5/39

    CPC分类号： G11B5/398 ,  G01R33/098 ,  G11B5/3163 ,  G11B5/3932 ,  H01L43/12 ,  Y10T29/49041 ,  Y10T29/49046 ,  Y10T29/49052

    摘要： A magnetic recording transducer comprises a magnetoresistive sensor having a left side, a right side opposite to the left side, a left junction angle at the left side, a right junction angle at the right side, and a track width. The right junction angle and the left junction angle are characterized by a junction angle difference of not more than six degrees. The track width is less than one hundred nanometers. The magnetic recording transducer further comprises a left hard bias structure residing adjacent to the left side of the magnetoresistive sensor, and a right hard bias structure residing adjacent to the right side of the magnetoresistive sensor.

    摘要翻译： 磁记录传感器包括磁阻传感器，其具有左侧，与左侧相对的右侧，左侧的左结合角，右侧的右结合角和轨道宽度。 右结合角和左结合角的特征在于不超过六度的结合角差。 轨道宽度小于一百纳米。 磁记录传感器还包括邻近磁阻传感器左侧的左硬偏置结构和与磁阻传感器的右侧相邻的右硬偏置结构。

    Method and system for providing a magnetic recording transducer using a line hard mask
    7.
    发明授权
    Method and system for providing a magnetic recording transducer using a line hard mask 有权
    使用线硬掩模提供磁记录传感器的方法和系统

    公开(公告)号：US08233248B1

    公开(公告)日：2012-07-31

    申请号：US12560669

    申请日：2009-09-16

    申请人： Guanxiong Li ,  Wei Zhang ,  Ming Mao

    发明人： Guanxiong Li ,  Wei Zhang ,  Ming Mao

    IPC分类号： G11B5/39 ,  B44C1/22

    CPC分类号： G11B5/398 ,  G01R33/098 ,  G11B5/3163 ,  G11B5/3932 ,  H01L43/12 ,  Y10T29/49041 ,  Y10T29/49046 ,  Y10T29/49052

    摘要： A method and system for fabricating a magnetic transducer is described. The transducer has a device region, a field region, and a magnetoresistive stack. The method and system include providing a hard mask on the magnetoresistive stack. The hard mask is inorganic and includes a sensor portion and a line frame. The sensor portion covers a first portion of the magnetoresistive stack corresponding to a magnetoresistive structure. The line frame covers a second portion of the magnetoresistive stack in the device region. The method and system include defining the magnetoresistive structure in a track width direction using the hard mask and providing at least one hard bias material after the magnetoresistive structure is defined. A first portion of the hard bias material(s) is substantially adjacent to the magnetoresistive structure in the track width direction. The method and system also include removing a second portion of the hard bias material(s).

    摘要翻译： 描述了用于制造磁换能器的方法和系统。 换能器具有器件区域，场区域和磁阻堆叠。 该方法和系统包括在磁阻堆叠上提供硬掩模。 硬掩模是无机的，并且包括传感器部分和线框架。 传感器部分覆盖对应于磁阻结构的磁阻堆叠的第一部分。 线框架覆盖器件区域中的磁阻堆叠的第二部分。 该方法和系统包括使用硬掩模限定磁道宽度方向上的磁阻结构，并且在限定了磁阻结构之后提供至少一种硬偏置材料。 硬偏压材料的第一部分在磁道宽度方向上基本上与磁阻结构相邻。 该方法和系统还包括去除硬偏压材料的第二部分。

    Sputter deposition system and methods of use
    9.
    发明申请
    Sputter deposition system and methods of use 审中-公开
    溅射沉积系统及其使用方法

    公开(公告)号：US20070209932A1

    公开(公告)日：2007-09-13

    申请号：US11372517

    申请日：2006-03-10

    申请人： Piero Sferlazzo ,  Ming Mao ,  Jinliang Chen ,  David Felsenthal ,  Robert Hieronymi ,  Miroslav Eror

    发明人： Piero Sferlazzo ,  Ming Mao ,  Jinliang Chen ,  David Felsenthal ,  Robert Hieronymi ,  Miroslav Eror

    IPC分类号： C23C14/00

    CPC分类号： C23C14/352 ,  C23C14/505 ,  C23C14/568 ,  C23C14/5833

    摘要： The present invention relates to a sputter deposition system and to methods of use thereof for processing substrates using planetary sputter deposition methods. The sputter deposition system includes a deposition chamber having an azimuthal axis. A rotatable member is situated in the chamber and includes a plurality of magnetrons provided thereon. Each magnetron includes a corresponding one of a plurality of sputtering targets. The rotatable member is configured to position each of the magnetrons to direct sputtered material from the corresponding one of the sputtering targets to a deposition zone defined in the deposition chamber. A transport mechanism is situated in the deposition chamber and includes an arm rotatable about the azimuthal axis. A substrate holder is attached to the arm of the transport mechanism and supports the substrate as the arm rotates the substrate holder to intersect the deposition zone for depositing sputtered material on the substrate.

    摘要翻译： 溅射沉积系统技术领域本发明涉及一种溅射沉积系统及其使用方法，用于使用行星式溅射沉积方法来处理衬底 溅射沉积系统包括具有方位角轴的沉积室。 可旋转构件位于腔室中并且包括设置在其上的多个磁控管。 每个磁控管包括多个溅射靶中相应的一个。 可旋转构件被构造成定位每个磁控管以将溅射的材料从相应的一个溅射靶引导到在沉积室中限定的沉积区。 输送机构位于沉积室中并且包括可围绕方位轴线旋转的臂。 衬底保持器附接到输送机构的臂上并且当臂旋转衬底保持器以与沉积区相交以在基底上沉积溅射材料时支撑衬底。