GRID STRUCTURE FOR HOLDING SPECIMEN OF ELECTRON MICROSCOPY
    2.
    发明申请
    GRID STRUCTURE FOR HOLDING SPECIMEN OF ELECTRON MICROSCOPY 审中-公开
    用于保存电子显微镜样本的网格结构

    公开(公告)号:US20070029503A1

    公开(公告)日:2007-02-08

    申请号:US11461716

    申请日:2006-08-01

    申请人: Jae-Ryong JUNG

    发明人: Jae-Ryong JUNG

    IPC分类号: H01J37/20

    CPC分类号: H01J37/20 G01N1/32

    摘要: In an embodiment, a grid structure for holding a specimen of an electron microscopy is made up of materials which have etch resistance in ion etch processes such as FIB ion etch process or ion beam milling process. In the embodiment, the grid structure includes a first specimen holder for holding the specimen, a second specimen holder for holding the first specimen holder, and an adhesive for fixing the first holder and the second holder together. The first holder, here, is made up of at least one type of materials which are selected from silicon, titanium, carbon, vanadium, yttrium, or molybdenum.

    摘要翻译: 在一个实施例中,用于保持电子显微镜样本的栅格结构由在离子蚀刻工艺(例如FIB离子蚀刻工艺或离子束研磨工艺)中具有耐蚀刻性的材料构成。 在本实施例中,格栅结构包括用于保持样本的第一样本保持器,用于保持第一样本保持器的第二样本保持器和用于将第一保持器和第二保持器固定在一起的粘合剂。 这里的第一支架由至少一种选自硅,钛,碳,钒,钇或钼的材料组成。