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公开(公告)号：US20250052612A1
公开(公告)日：2025-02-13
申请号：US18931815
申请日：2024-10-30
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi Kasahara , Katsumi Shibayama , Kei Tabata , Masaki Hirose , Hiroki Oyama , Yumi Kuramoto
Abstract: A light detection device of the present invention includes: a wiring board; a first support part disposed on a mounting surface of the wiring board; a Fabry-Perot interference filter having a first mirror part and a second mirror part between which a distance is variable and having an outer edge portion disposed in a first support region of the first support part; a light detector disposed on the mounting surface to face the first mirror part and the second mirror part on one side of the first support part; and a temperature detector disposed on the mounting surface, wherein the temperature detector is disposed on the mounting surface such that at least a part of the temperature detector overlaps a part of the Fabry-Perot interference filter when seen in a first direction perpendicular to the mounting surface and such that at least a part of the temperature detector overlaps a part of the first support part when seen in a second direction in which the first support part and the light detector are aligned with each other, and wherein a first distance between the temperature detector and the first support part in the second direction is smaller than a first width of the first support region in the second direction.
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公开(公告)号：US12187607B2
公开(公告)日：2025-01-07
申请号：US17288642
申请日：2019-10-30
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Nao Inoue , Jo Ito , Go Tanaka , Atsuya Iima , Daiki Suzuki , Katsumi Shibayama
Abstract: A method of manufacturing a semiconductor substrate according to an embodiment includes a first step of forming a groove having a bottom surface and a side surface on which scallops are formed by performing a process including isotropic etching on a main surface of a substrate, a second step of performing at least one of a hydrophilic treatment on the side surface of the groove and a degassing treatment on the groove, and a third step of removing the scallops formed on the side surface of the groove and planarizing the side surface by performing anisotropic wet etching in a state where the bottom surface of the recess is present.
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公开(公告)号：US12169143B2
公开(公告)日：2024-12-17
申请号：US18223209
申请日：2023-07-18
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi Kasahara , Katsumi Shibayama , Kei Tabata , Masaki Hirose , Hiroki Oyama , Yumi Kuramoto
Abstract: A light detection device of the present invention includes: a wiring board; a first support part disposed on a mounting surface of the wiring board; a Fabry-Perot interference filter having a first mirror part and a second mirror part between which a distance is variable and having an outer edge portion disposed in a first support region of the first support part; a light detector disposed on the mounting surface to face the first mirror part and the second mirror part on one side of the first support part; and a temperature detector disposed on the mounting surface, wherein the temperature detector is disposed on the mounting surface such that at least a part of the temperature detector overlaps a part of the Fabry-Perot interference filter when seen in a first direction perpendicular to the mounting surface and such that at least a part of the temperature detector overlaps a part of the first support part when seen in a second direction in which the first support part and the light detector are aligned with each other, and wherein a first distance between the temperature detector and the first support part in the second direction is smaller than a first width of the first support region in the second direction.
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公开(公告)号：US12152878B2
公开(公告)日：2024-11-26
申请号：US18535364
申请日：2023-12-11
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomofumi Suzuki , Kyosuke Kotani , Tatsuya Sugimoto , Yutaka Kuramoto , Katsumi Shibayama , Noburo Hosokawa , Hirokazu Yamamoto , Takuo Koyama
IPC: G01B9/02 , B81B3/00 , G01J3/02 , G01J3/10 , G01J3/14 , G01J3/45 , G02B7/182 , G02B26/08 , G02B27/14 , G01J3/453
Abstract: A mirror unit 2 includes a mirror device 20 including a base 21 and a movable mirror 22, an optical function member 13, and a fixed mirror 16 that is disposed on a side opposite to the mirror device 20 with respect to the optical function member 13. The mirror device 20 is provided with a light passage portion 24 that constitutes a first portion of an optical path between the beam splitter unit 3 and the fixed mirror 16. The optical function member 13 is provided with a light transmitting portion 14 that constitutes a second portion of the optical path between the beam splitter unit 3 and the fixed mirror 16. A second surface 21b of the base 21 and a third surface 13a of the optical function member 13 are joined to each other.
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公开(公告)号：US20240304650A1
公开(公告)日：2024-09-12
申请号：US18667061
申请日：2024-05-17
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomoya TAGUCHI , Yuki Yoshida , Katsumi Shibayama
IPC: H01L27/146
CPC classification number: H01L27/1464 , H01L27/14649
Abstract: A semiconductor substrate includes a first main surface and a second main surface opposing each other. The semiconductor substrate includes a first semiconductor region of a first conductivity type, and a plurality of second semiconductor regions constituting pn junctions with the first semiconductor region. The semiconductor substrate includes the plurality of second semiconductor in a side of the second main surface. Each of the plurality of second semiconductor regions includes a first region including a textured surface, and a second region including no textured surface. A thickness of the first region at a deepest position of recesses of the textured surface is smaller than a distance between a surface of the second region and the deepest position in a thickness direction of the semiconductor substrate. The first main surface is a light incident surface of the semiconductor substrate.
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Patent Agency Ranking
6.发明授权公开(公告)号：US11764236B2
公开(公告)日：2023-09-19
申请号：US17877214
申请日：2022-07-29
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomoya Taguchi , Yuki Yoshida , Katsumi Shibayama
IPC: H01L27/146 , H01L27/144
CPC classification number: H01L27/1446 , H01L27/1443
Abstract: A semiconductor substrate including a first main surface and a second main surface opposing each other is provided. The semiconductor substrate includes a first semiconductor region of a first conductivity type. The semiconductor substrate includes a plurality of planned regions where a plurality of second semiconductor regions of a second conductivity type forming pn junctions with the first semiconductor region are going to be formed, in a side of the second main surface. A textured region is formed on surfaces included in the plurality of planned regions, in the second main surface. The plurality of second semiconductor regions are formed in the plurality of planned regions after forming the textured region. The first main surface is a light incident surface of the semiconductor substrate.
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公开(公告)号：US11609420B2
公开(公告)日：2023-03-21
申请号：US17861721
申请日：2022-07-11
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Toshimitsu Kawai , Katsumi Shibayama , Takashi Kasahara , Masaki Hirose , Hiroki Oyama , Yumi Kuramoto
IPC: G02B26/00
Abstract: A wafer includes a substrate layer, a first mirror layer having a plurality of two-dimensionally arranged first mirror portions, and a second mirror layer having a plurality of two-dimensionally arranged second mirror portions. A plurality of Fabry-Perot interference filter portions are formed in an effective area, in each of the plurality of Fabry-Perot interference filter portions a gap is formed between the first mirror portion and the second mirror portion. A plurality of dummy filter portions are formed in a dummy area disposed along an outer edge of the substrate layer and surrounding the effective area, in each of the plurality of dummy filter portions an intermediate layer is provided between the first mirror portion and the second mirror portion. At least the second mirror portion is surrounded by the first groove in each of the plurality of Fabry-Perot interference filter portions and the plurality of dummy filter portions.
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公开(公告)号：US20230003504A1
公开(公告)日：2023-01-05
申请号：US17943474
申请日：2022-09-13
Applicant: Hamamatsu Photonics K.K.
Inventor： Tomofumi Suzuki , Kyosuke Kotani , Tatsuya Sugimoto , Yutaka Kuramoto , Katsumi Shibayama , Noburo Hosokawa , Hirokazu Yamamoto , Takuo Koyama
IPC: G01B9/02 , G02B26/08 , G02B7/182 , G01J3/02 , B81B3/00 , G01J3/10 , G01J3/14 , G02B27/14 , G01J3/45 , G01J3/453
Abstract: A mirror unit 2 includes a mirror device 20 including a base 21 and a movable mirror 22, an optical function member 13, and a fixed mirror 16 that is disposed on a side opposite to the mirror device 20 with respect to the optical function member 13. The mirror device 20 is provided with a light passage portion 24 that constitutes a first portion of an optical path between the beam splitter unit 3 and the fixed mirror 16. The optical function member 13 is provided with a light transmitting portion 14 that constitutes a second portion of the optical path between the beam splitter unit 3 and the fixed mirror 16. A second surface 21b of the base 21 and a third surface 13a of the optical function member 13 are joined to each other.
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公开(公告)号：US11448869B2
公开(公告)日：2022-09-20
申请号：US16765547
申请日：2018-11-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Toshimitsu Kawai , Katsumi Shibayama , Takashi Kasahara , Masaki Hirose , Hiroki Oyama , Yumi Kuramoto
IPC: G02B26/00
Abstract: A wafer includes a substrate layer, a first mirror layer having a plurality of two-dimensionally arranged first mirror portions, and a second mirror layer having a plurality of two-dimensionally arranged second mirror portions. A plurality of Fabry-Perot interference filter portions are formed in an effective area, in each of the plurality of Fabry-Perot interference filter portions a gap is formed between the first mirror portion and the second mirror portion. A plurality of dummy filter portions are formed in a dummy area disposed along an outer edge of the substrate layer and surrounding the effective area, in each of the plurality of dummy filter portions an intermediate layer is provided between the first mirror portion and the second mirror portion. At least the second mirror portion is surrounded by the first groove in each of the plurality of Fabry-Perot interference filter portions and the plurality of dummy filter portions.
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公开(公告)号：US11262240B2
公开(公告)日：2022-03-01
申请号：US17036329
申请日：2020-09-29
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takafumi Yokino , Katsumi Shibayama , Katsuhiko Kato
Abstract: A spectrometer 1A includes a package 2 having a stem 4 and a cap 5, an optical unit 10A disposed on the stem 4, and a lead pin 3 for securing the optical unit 10A to the stem 4. The optical unit 10A includes a dispersive part 21 for dispersing and reflecting light entering from a light entrance part 6 of the cap 5, a light detection element 30 having a light detection part 31 for detecting the light dispersed and reflected by the dispersive part 21, a support 40 for supporting the light detection element 30 such that a space is formed between the dispersive part 21 and the light detection element 30, and a projection 11 protruding from the support 40, the lead pin 3 being secured to the projection 11. The optical unit 10A is movable with respect to the stem 4 in a contact part of the optical unit 10A and the stem 4.
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