公开(公告)号：US11774357B2

公开(公告)日：2023-10-03

申请号：US17474338

申请日：2021-09-14

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Kazuhiro Takahashi ,  Kouichiro Akiyama ,  Hiroshi Satozono

IPC: G01N21/35 ,  G01N21/3563 ,  G01N21/552

CPC classification number: G01N21/3563 ,  G01N21/552

Abstract: A terahertz wave attenuated total reflection spectroscopic method, includes: a first step of disposing a measurement target of which a volume is changed during a measurement period on a reflection surface; and a second step of acquiring data including a plurality of detection results respectively corresponding to a plurality of times separated from each other during the measurement period by allowing a terahertz wave to be incident on the reflection surface from a side opposite to the measurement target and by detecting the terahertz wave reflected on the reflection surface, during the measurement period. In the second step, a state in which a substantially constant pressure is applied to the measurement target disposed on the reflection surface is maintained during the measurement period.