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公开(公告)号：US20210191106A1
公开(公告)日：2021-06-24
申请号：US16761294
申请日：2018-08-02
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tatsuya SUGIMOTO , Tomofumi SUZUKI , Kyosuke KOTANI , Yutaka KURAMOTO , Daiki SUZUKI
Abstract: A method for manufacturing an optical device includes: preparing a semiconductor substrate that includes a portion corresponding to a base, a movable unit, and an elastic support portion; forming a first resist layer in a region corresponding to the base on a surface of a first semiconductor layer which is opposite to an insulating layer; forming a depression in the first semiconductor layer by etching the first semiconductor layer using the first resist layer as a mask; forming a second resist layer in a region corresponding to a rib portion on a bottom surface of the depression, a side surface of the depression, and the surface of the first semiconductor layer which is opposite to the insulating layer; and forming the rib portion by etching the first semiconductor layer until reaching the insulating layer using the second resist layer as a mask.
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公开(公告)号：US20200049974A1
公开(公告)日：2020-02-13
申请号：US16492672
申请日：2018-03-14
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tatsuya SUGIMOTO , Kyosuke KOTANI , Tomofumi SUZUKI , Katsumi SHIBAYAMA , Noburo HOSOKAWA , Nao INOUE , Masashi ITO , Yutaka KURAMOTO
Abstract: A light module includes an optical element and a base on which the optical element is mounted. The optical element has an optical portion which has an optical surface; an elastic portion which is provided around the optical portion such that an annular region is formed; and a pair of support portions which is provided such that the optical portion is sandwiched in a first direction along the optical surface and in which an elastic force is applied and a distance therebetween is able to be changed in accordance with elastic deformation of the elastic portion. The base has a main surface, and a mounting region in which an opening communicating with the main surface is provided. The support portions are inserted into the opening in a state where an elastic force of the elastic portion is applied.
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公开(公告)号：US20240192483A1
公开(公告)日：2024-06-13
申请号：US18584740
申请日：2024-02-22
Applicant: Hamamatsu Photonics K.K.
Inventor： Tatsuya SUGIMOTO , Tomofumi SUZUKI , Kyosuke KOTANI , Yutaka KURAMOTO , Daiki SUZUKI
CPC classification number: G02B26/0841 , B81B3/0045 , B81C1/00555 , G02B7/1821 , G02B26/105 , H02N1/008 , B81B2201/042 , B81C2201/013 , B81C2201/0174 , B81C2201/0198
Abstract: An optical device includes a support portion, a movable portion; and a pair of torsion bars. An optical function portion is provided on one surface of the movable portion and a rib portion is provided on the other surface of the movable portion. The rib portion includes eight extending portions of first to eighth extending portions. When setting directions in which the first to eighth extending portions extend as first to eighth extending directions respectively, and setting an angle between the first and second extending directions as a first angle, an angle between the third and fourth extending directions as a second angle, an angle between the fifth and sixth extending directions as a third angle, and an angle between the seventh and eighth extending directions as a fourth angle, each of the first and second angle is larger than each of the third and fourth angle.
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公开(公告)号：US20210132364A1
公开(公告)日：2021-05-06
申请号：US16625684
申请日：2018-07-06
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomofumi SUZUKI , Kyosuke KOTANI , Tatsuya SUGIMOTO , Yutaka KURAMOTO , Katsumi SHIBAYAMA , Noburo HOSOKAWA , Hirokazu YAMAMOTO , Takuo KOYAMA
Abstract: A mirror unit 2 includes a mirror device 20 including a base 21 and a movable mirror 22, an optical function member 13, and a fixed mirror 16 that is disposed on a side opposite to the mirror device 20 with respect to the optical function member 13. The mirror device 20 is provided with a light passage portion 24 that constitutes a first portion of an optical path between the beam splitter unit 3 and the fixed mirror 16. The optical function member 13 is provided with a light transmitting portion 14 that constitutes a second portion of the optical path between the beam splitter unit 3 and the fixed mirror 16. A second surface 21b of the base 21 and a third surface 13a of the optical function member 13 are joined to each other.
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公开(公告)号：US20250044074A1
公开(公告)日：2025-02-06
申请号：US18919844
申请日：2024-10-18
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomofumi SUZUKI , Kyosuke KOTANI , Tatsuya SUGIMOTO , Yutaka KURAMOTO , Katsumi SHIBAYAMA , Noburo HOSOKAWA , Hirokazu YAMAMOTO , Takuo KOYAMA
IPC: G01B9/02 , B81B3/00 , G01J3/02 , G01J3/10 , G01J3/14 , G01J3/45 , G01J3/453 , G02B7/182 , G02B26/08 , G02B27/14
Abstract: A mirror unit 2 includes a mirror device 20 including a base 21 and a movable mirror 22, an optical function member 13, and a fixed mirror 16 that is disposed on a side opposite to the mirror device 20 with respect to the optical function member 13. The mirror device 20 is provided with a light passage portion 24 that constitutes a first portion of an optical path between the beam splitter unit 3 and the fixed mirror 16. The optical function member 13 is provided with a light transmitting portion 14 that constitutes a second portion of the optical path between the beam splitter unit 3 and the fixed mirror 16. A second surface 21b of the base 21 and a third surface 13a of the optical function member 13 are joined to each other.
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公开(公告)号：US20240110779A1
公开(公告)日：2024-04-04
申请号：US18535364
申请日：2023-12-11
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomofumi SUZUKI , Kyosuke KOTANI , Tatsuya SUGIMOTO , Yutaka KURAMOTO , Katsumi SHIBAYAMA , Noburo HOSOKAWA , Hirokazu YAMAMOTO , Takuo KOYAMA
IPC: G01B9/02 , B81B3/00 , G01J3/02 , G01J3/10 , G01J3/14 , G01J3/45 , G02B7/182 , G02B26/08 , G02B27/14
CPC classification number: G01B9/02051 , B81B3/00 , B81B3/0021 , B81B3/007 , G01B9/02049 , G01J3/0202 , G01J3/021 , G01J3/0237 , G01J3/108 , G01J3/14 , G01J3/45 , G02B7/182 , G02B26/0816 , G02B26/0833 , G02B26/0841 , G02B27/144 , B81B2201/042 , B81B2203/0154 , G01J2003/104 , G01J3/4532
Abstract: A mirror unit 2 includes a mirror device 20 including a base 21 and a movable mirror 22, an optical function member 13, and a fixed mirror 16 that is disposed on a side opposite to the mirror device 20 with respect to the optical function member 13. The mirror device 20 is provided with a light passage portion 24 that constitutes a first portion of an optical path between the beam splitter unit 3 and the fixed mirror 16. The optical function member 13 is provided with a light transmitting portion 14 that constitutes a second portion of the optical path between the beam splitter unit 3 and the fixed mirror 16. A second surface 21b of the base 21 and a third surface 13a of the optical function member 13 are joined to each other.
