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公开(公告)号:US20120032329A1
公开(公告)日:2012-02-09
申请号:US13229887
申请日:2011-09-12
IPC分类号: H01L23/498
CPC分类号: H01L24/05 , H01L21/565 , H01L22/32 , H01L23/485 , H01L23/49816 , H01L24/06 , H01L24/12 , H01L24/16 , H01L24/45 , H01L24/46 , H01L24/48 , H01L24/49 , H01L24/73 , H01L24/78 , H01L24/81 , H01L24/85 , H01L25/0657 , H01L2224/02166 , H01L2224/02205 , H01L2224/0347 , H01L2224/0401 , H01L2224/04042 , H01L2224/05027 , H01L2224/05082 , H01L2224/05083 , H01L2224/05084 , H01L2224/05124 , H01L2224/05144 , H01L2224/05147 , H01L2224/05155 , H01L2224/05157 , H01L2224/05164 , H01L2224/05166 , H01L2224/05169 , H01L2224/05173 , H01L2224/05181 , H01L2224/05184 , H01L2224/05553 , H01L2224/05554 , H01L2224/05558 , H01L2224/05564 , H01L2224/05568 , H01L2224/05572 , H01L2224/05583 , H01L2224/05624 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/05664 , H01L2224/05666 , H01L2224/0568 , H01L2224/06183 , H01L2224/1134 , H01L2224/13099 , H01L2224/13144 , H01L2224/13147 , H01L2224/16225 , H01L2224/2919 , H01L2224/29198 , H01L2224/32145 , H01L2224/32225 , H01L2224/32245 , H01L2224/4502 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/45164 , H01L2224/46 , H01L2224/4807 , H01L2224/48095 , H01L2224/48145 , H01L2224/48158 , H01L2224/48247 , H01L2224/48453 , H01L2224/48465 , H01L2224/48471 , H01L2224/48507 , H01L2224/48624 , H01L2224/48639 , H01L2224/48644 , H01L2224/48647 , H01L2224/48655 , H01L2224/48664 , H01L2224/4868 , H01L2224/48724 , H01L2224/48739 , H01L2224/48744 , H01L2224/48747 , H01L2224/48755 , H01L2224/48764 , H01L2224/4878 , H01L2224/48824 , H01L2224/48839 , H01L2224/48844 , H01L2224/48847 , H01L2224/48855 , H01L2224/48864 , H01L2224/4888 , H01L2224/49171 , H01L2224/49175 , H01L2224/73204 , H01L2224/73265 , H01L2224/78301 , H01L2224/81193 , H01L2224/81801 , H01L2224/83101 , H01L2224/85181 , H01L2224/85186 , H01L2224/85205 , H01L2224/85207 , H01L2224/85439 , H01L2224/85444 , H01L2224/85464 , H01L2225/0651 , H01L2225/06517 , H01L2924/00011 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01011 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01018 , H01L2924/01019 , H01L2924/01022 , H01L2924/01024 , H01L2924/01025 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01042 , H01L2924/01045 , H01L2924/01046 , H01L2924/01047 , H01L2924/0105 , H01L2924/01061 , H01L2924/01065 , H01L2924/01073 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01327 , H01L2924/014 , H01L2924/04941 , H01L2924/04953 , H01L2924/05042 , H01L2924/078 , H01L2924/09701 , H01L2924/10253 , H01L2924/12042 , H01L2924/1306 , H01L2924/13091 , H01L2924/14 , H01L2924/15311 , H01L2924/15787 , H01L2924/15788 , H01L2924/181 , H01L2924/19041 , H01L2924/19043 , H01L2924/3511 , H01L2924/00014 , H01L2924/01039 , H01L2924/0665 , H01L2224/48227 , H01L2924/00 , H01L2924/00012 , H01L2924/0002 , H01L2924/00015
摘要: In semiconductor integrated circuit devices for vehicle use, an aluminum pad on a semiconductor chip and an external device are coupled to each other by wire bonding using a gold wire for the convenience of mounting. Such a semiconductor integrated circuit device, however, causes a connection failure due to the interaction between aluminum and gold in use for a long time at a relatively high temperature (about 150 degrees C.). A semiconductor integrated circuit device can include a semiconductor chip as a part of the device, an electrolytic gold plated surface film (gold-based metal plated film) provided over an aluminum-based bonding pad on a semiconductor chip via a barrier metal film, and a gold bonding wire (gold-based bonding wire) for interconnection between the plated surface film and an external lead provided over a wiring board (wiring substrate).
摘要翻译: 在用于车辆用途的半导体集成电路器件中,半导体芯片上的铝焊盘和外部器件通过使用金线的引线接合彼此耦合以便于安装。 然而,这样的半导体集成电路器件在相对较高的温度(约150℃)下长时间使用铝和金之间的相互作用导致连接故障。 半导体集成电路器件可以包括作为器件的一部分的半导体芯片,经由阻挡金属膜设置在半导体芯片上的铝基焊盘上的电解镀金表面膜(金基金属镀膜),以及 用于在电镀表面膜和设置在布线板(布线基板)上的外部引线之间互连的金接合线(金基接合线)。