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公开(公告)号：US20150014529A1
公开(公告)日：2015-01-15
申请号：US14382165
申请日：2013-02-20
Applicant: HITACHI HIGH - TECHNOLOGIES CORPORATION
Inventor： Terutaka Nanri , Satoshi Tomimatsu , Isamu Sekihara
IPC: H01J37/244
CPC classification number: H01J37/244 , H01J37/28 , H01J37/3056 , H01J37/3178 , H01J2237/244 , H01J2237/24495 , H01J2237/24571
Abstract: Provided is a charged particle beam device with high sensitivity, capable of detecting charged particles emitted from a sample at high resolution. An absorption current detector arranged to contact with the sample makes an absorption current generated in the sample by an irradiated charged particle beam flow through the detector, thereby to detect the current. The charged particle beam scans the sample and the charged particle beam device acquires an absorption current image. In case the absorption current detector is arranged separated from the sample, the absorption current detector detects the incident charged particle beam as a signal current dependent on an angle θ formed in a direction from the irradiation position on the sample toward the absorption current detector relative to at least one of the normal line direction of the front surface of the sample and the incident direction of the charged particle beam.
Abstract translation: 提供了一种具有高灵敏度的带电粒子束装置，能够以高分辨率检测从样品发射的带电粒子。 布置成与样品接触的吸收电流检测器使得通过照射的带电粒子束流过样品中产生的吸收电流流过检测器，从而检测电流。 带电粒子束扫描样品，带电粒子束装置获取吸收电流图像。 在吸收电流检测器与样品分离的情况下，吸收电流检测器检测入射的带电粒子束作为取决于角度的信号电流; 形成在从样品的照射位置朝向吸收电流检测器的方向上，相对于样品前表面的法线方向和带电粒子束的入射方向中的至少一个。
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公开(公告)号：US09330883B2
公开(公告)日：2016-05-03
申请号：US14382165
申请日：2013-02-20
Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
Inventor： Terutaka Nanri , Satoshi Tomimatsu , Isamu Sekihara
IPC: H01J37/00 , H01J37/244 , H01J37/28 , H01J37/317 , H01J37/305
CPC classification number: H01J37/244 , H01J37/28 , H01J37/3056 , H01J37/3178 , H01J2237/244 , H01J2237/24495 , H01J2237/24571
Abstract: Provided is a charged particle beam device with high sensitivity, capable of detecting charged particles emitted from a sample at high resolution. An absorption current detector arranged to contact with the sample makes an absorption current generated in the sample by an irradiated charged particle beam flow through the detector, thereby to detect the current. The charged particle beam scans the sample and the charged particle beam device acquires an absorption current image. In case the absorption current detector is arranged separated from the sample, the absorption current detector detects the incident charged particle beam as a signal current dependent on an angle θ formed in a direction from the irradiation position on the sample toward the absorption current detector relative to at least one of the normal line direction of the front surface of the sample and the incident direction of the charged particle beam.
Abstract translation: 提供了一种具有高灵敏度的带电粒子束装置，能够以高分辨率检测从样品发射的带电粒子。 布置成与样品接触的吸收电流检测器使得通过照射的带电粒子束流过样品中产生的吸收电流流过检测器，从而检测电流。 带电粒子束扫描样品，带电粒子束装置获取吸收电流图像。 在吸收电流检测器与样品分离的情况下，吸收电流检测器检测入射的带电粒子束作为取决于角度的信号电流; 形成在从样品的照射位置朝向吸收电流检测器的方向上，相对于样品前表面的法线方向和带电粒子束的入射方向中的至少一个。
