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    Piezoelectric resonator, and piezoelectric filter, duplexer, and communication apparatus, all including same
    4.
    发明授权
    Piezoelectric resonator, and piezoelectric filter, duplexer, and communication apparatus, all including same 有权
    压电谐振器和压电滤波器，双工器和通信设备，都包括相同的

    公开(公告)号：US06914368B2

    公开(公告)日：2005-07-05

    申请号：US10317145

    申请日：2002-12-12

    申请人： Daisuke Nakamura ,  Yukio Yoshino ,  Masaki Takeuchi ,  Yoshihiko Gotoh ,  Tadashi Nomura ,  Ken-ichi Uesaka

    发明人： Daisuke Nakamura ,  Yukio Yoshino ,  Masaki Takeuchi ,  Yoshihiko Gotoh ,  Tadashi Nomura ,  Ken-ichi Uesaka

    IPC分类号： H03H9/02 ,  H03H9/17 ,  H03H9/56 ,  H03H9/58 ,  H01L41/08

    CPC分类号： H03H9/564 ,  H03H9/02015 ,  H03H9/02133 ,  H03H9/02157 ,  H03H9/173 ,  H03H9/174 ,  H03H9/568

    摘要： A piezoelectric resonator includes a substrate and a vibrator. The vibrator includes a thin-film portion having at least one piezoelectric thin-film layer disposed on the substrate and at least one pair of upper and lower electrodes disposed on the substrate. The vibrator has a structure in which the thin-film portion is sandwiched from the upper and lower surfaces thereof by the upper and lower electrodes, which oppose each other in the depth direction, and the overlapping portion of the vibrator defined by the opposing upper and lower electrodes has a tetragonal shape, when viewed in the depth direction, other than a rectangle and a square, the tetragonal shape having substantially parallel sides having a longitudinal length equal to or smaller than about 10 times the oscillatory wavelength and also having at least one portion in which the distance between opposing electrode edges varies.

    摘要翻译： 压电谐振器包括基板和振动器。 振动器包括具有设置在基板上的至少一个压电薄膜层和设置在基板上的至少一对上下电极的薄膜部分。 振动器具有这样的结构，其中薄膜部分被其上表面和下表面夹在上下电极之间，它们在深度方向上彼此相对，并且振动器的重叠部分由相对的上部和 下部电极在深度方向上看不到矩形和正方形，四边形形状具有基本上平行的边，纵向长度等于或小于振荡波长的约10倍，并且还具有至少一个 相对电极边缘之间的距离变化的部分。

    Piezoelectric resonator, filter, and electronic communication device
    8.
    发明授权
    Piezoelectric resonator, filter, and electronic communication device 失效
    压电谐振器，滤波器和电子通信装置

    公开(公告)号：US06888424B2

    公开(公告)日：2005-05-03

    申请号：US10785284

    申请日：2004-02-24

    申请人： Masaki Takeuchi ,  Hajime Yamada ,  Yoshihiko Goto ,  Tadashi Nomura ,  Yukio Yoshino

    发明人： Masaki Takeuchi ,  Hajime Yamada ,  Yoshihiko Goto ,  Tadashi Nomura ,  Yukio Yoshino

    IPC分类号： H01L41/08 ,  H01L41/09 ,  H01L41/18 ,  H03H3/02 ,  H03H3/04 ,  H03H9/02 ,  H03H9/17 ,  H03H9/00

    CPC分类号： H03H9/174 ,  H03H3/04 ,  H03H9/0207 ,  H03H9/173 ,  H03H2003/0407

    摘要： A piezoelectric resonator includes a substrate, a vibration unit disposed on the substrate and having a structure in which at least one pair of an upper electrode and a lower electrode opposed to each other, the upper and lower electrodes sandwiching the upper and lower surfaces of an internal thin-film portion including at least one layer of a piezoelectric thin-film, and an external thin-film portion provided under the lower electrode and including at least one layer of a piezoelectric thin-film or a dielectric thin-film, the vibration unit being vibrated in an n-th harmonic (n is an integer of 2 or more), the upper electrode and the lower electrode being provided substantially in the positions of the loops of the n-th harmonic.

    摘要翻译： 压电谐振器包括基板，设置在基板上的振动单元，具有这样的结构，其中至少一对上电极和下电极彼此相对，上电极和下电极夹着上表面和下表面 包括至少一层压电薄膜的内部薄膜部分和设置在所述下部电极下方并且包括至少一层压电薄膜或电介质薄膜的外部薄膜部分，所述振动 单元以n次谐波（n为2以上的整数）振动，上部电极和下部电极基本上设置在n次谐波的环路的位置。

    Method of manufacturing an electronic component
    9.
    发明授权
    Method of manufacturing an electronic component 有权
    电子部件的制造方法

    公开(公告)号：US07320164B2

    公开(公告)日：2008-01-22

    申请号：US11097888

    申请日：2005-03-31

    申请人： Hajime Yamada ,  Masaki Takeuchi ,  Hideki Kawamura ,  Yukio Yoshino

    发明人： Hajime Yamada ,  Masaki Takeuchi ,  Hideki Kawamura ,  Yukio Yoshino

    IPC分类号： H01L41/047

    CPC分类号： H01L41/316 ,  H03H3/04 ,  H03H9/132 ,  H03H9/173 ,  H03H9/174 ,  Y10T29/42 ,  Y10T29/49156

    摘要： A manufacturing method for an electronic component includes a process of forming a lower electrode and a dummy electrode, which are electrically connected to each other, on a substrate, and a process of forming a piezoelectric thin film on the dummy electrode and the lower electrode while a predetermined bias potential is applied to the lower electrode via the dummy electrode. In this method, the piezoelectric thin film is formed on the lower electrode by stabilizing the potential of the lower electrode, thereby decreasing the surface roughness of the piezoelectric thin film. It is thus possible to manufacture an electronic component that exhibits excellent piezoelectric characteristics, in which the electromechanical coupling coefficient and the quality factor of a resonator are increased.

    摘要翻译： 电子部件的制造方法包括在基板上形成彼此电连接的下电极和虚拟电极的处理以及在虚拟电极和下电极上形成压电薄膜的工艺，同时 经由虚拟电极向下部电极施加规定的偏置电位。 在该方法中，通过稳定下部电极的电位，在下部电极上形成压电薄膜，从而降低压电薄膜的表面粗糙度。 因此，可以制造显示优异的压电特性的电子部件，其中机电耦合系数和谐振器的品质因数增加。