公开(公告)号：US20110183257A1

公开(公告)日：2011-07-28

申请号：US13083327

申请日：2011-04-08

申请人： Hans JANSEN ,  Sebastiaan Maria Johannes CORNELISSEN ,  Sjoerd Nicolaas Lambertus DONDERS ,  Roelof Frederik DE GRAAF ,  Christiaan Alexander HOOGENDAM ,  Hernes JACOBS ,  Martinus Hendrikus Antonius LEENDERS ,  Jeroen Johannes Sophia Maria MERTENS ,  Bob STREEFKERK ,  Jan-Gerard Cornelis VAN DER TOORN ,  Peter SMITS ,  Franciscus Johannes Joseph JANSSEN ,  Michel RIEPEN

发明人： Hans JANSEN ,  Sebastiaan Maria Johannes CORNELISSEN ,  Sjoerd Nicolaas Lambertus DONDERS ,  Roelof Frederik DE GRAAF ,  Christiaan Alexander HOOGENDAM ,  Hernes JACOBS ,  Martinus Hendrikus Antonius LEENDERS ,  Jeroen Johannes Sophia Maria MERTENS ,  Bob STREEFKERK ,  Jan-Gerard Cornelis VAN DER TOORN ,  Peter SMITS ,  Franciscus Johannes Joseph JANSSEN ,  Michel RIEPEN

IPC分类号： G03F7/20

CPC分类号： G03F7/70341 ,  G03F7/707

摘要： In an immersion lithographic apparatus, bubble formation in immersion liquid is reduced or prevented by reducing a gap size or area on a substrate table and/or covering the gap.

摘要翻译： 在浸没式光刻设备中，通过减小衬底台上的间隙尺寸或面积和/或覆盖间隙来降低或防止浸没液中的气泡形成。

公开(公告)号：US20100154564A1

公开(公告)日：2010-06-24

申请号：US12637134

申请日：2009-12-14

申请人： Jan Wouter van de GEEST ,  Marcel Ronald KATERBERG ,  Jan Marinus ZWIKKER ,  Hernes JACOBS

发明人： Jan Wouter van de GEEST ,  Marcel Ronald KATERBERG ,  Jan Marinus ZWIKKER ,  Hernes JACOBS

IPC分类号： G01F1/84

CPC分类号： G01F1/8418 ,  G01F1/8413 ,  G01F1/8486

摘要： A Coriolis flow sensor with a Coriolis tube that is fastened in a housing and that can be excited with a certain frequency, wherein a balancing mass (inertia) is arranged with rotational flexibility between the tube fastening and the housing. In particular, a spring steel plate is used for providing a connection rigidity between the balancing mass and the housing, which plate comprises a fixed portion and a movable portion cut out from the fixed portion, wherein the incisions are formed such that the fixed and movable portions are interconnected via resilient plate portions, which resilient plate portions are in particular elongate strips lying in one line and realizing a rotational flexibility (torsion), while abutments are provided which limit the amplitude of movements of the balancing mass.

摘要翻译： 科里奥利流量传感器，其具有紧固在壳体中并且可以以一定频率激发的科里奥利管，其中平衡质量（惯性）在管紧固件和壳体之间布置成具有旋转柔性。 特别地，弹簧钢板用于在平衡块和壳体之间提供连接刚性，该板包括固定部分和从固定部分切出的可移动部分，其中切口形成为使得固定和可移动的 部分通过弹性板部分相互连接，该弹性板部分特别是位于一条直线上的细长带并且实现旋转的柔性（扭转），同时提供限制平衡块的运动幅度的基台。