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    Projection exposure system for microlithography with a measurement device
    3.
    发明授权
    Projection exposure system for microlithography with a measurement device 有权
    具有测量装置的微光刻投影曝光系统

    公开(公告)号：US09001304B2

    公开(公告)日：2015-04-07

    申请号：US12838393

    申请日：2010-07-16

    申请人： Ulrich Mueller ,  Joachim Stuehler ,  Oswald Gromer ,  Rolf Freimann ,  Paul Kaufmann ,  Bernhard Geuppert

    发明人： Ulrich Mueller ,  Joachim Stuehler ,  Oswald Gromer ,  Rolf Freimann ,  Paul Kaufmann ,  Bernhard Geuppert

    IPC分类号： G03B27/42 ,  G03F7/20

    CPC分类号： G03F7/70775 ,  G03F7/70258 ,  G03F7/706 ,  G03F7/70633 ,  G03F7/70725 ,  G03F7/7085 ,  G03F7/70891

    摘要： A projection exposure system (10) for microlithography which includes: a mask holding device (14) holding a mask (18) with mask structures (20) disposed on the mask, a substrate holding device (36) holding a substrate (30), projection optics (26) imaging the mask structures (20) onto the substrate (30) during an exposure process, and a measurement structure (48) disposed in a defined position with respect to a reference element (16) of the projection exposure system (10), which defined position is mechanically uncoupled from the position of the mask holding device (14). The projection exposure system (10) also includes a detector (52) arranged to record an image of the measurement structure (48) imaged by the projection optics (26). The projection exposure system (10) is configured such that during operation of the projection exposure system (10) the imaging of the mask structures (20) and the imaging of the measurement structure (48) take place at the same time by the projection optics (26. An evaluation device (54) is configured to establish a lateral position of the image of the measurement structure (48) in the area of the detector (52) during the exposure process.

    摘要翻译： 一种用于微光刻的投影曝光系统（10），包括：保持掩模（18）的掩模保持装置（14），掩模结构（20）设置在掩模上;保持基板（30）的基板保持装置（36） 投影光学器件（26）在曝光过程期间将掩模结构（20）成像到衬底（30）上;以及测量结构（48），其相对于投影曝光系统的参考元件（16）设置在限定位置 10），所述限定位置与所述掩模保持装置（14）的位置机械地脱离。 投影曝光系统（10）还包括检测器（52），其被布置成记录由投影光学器件（26）成像的测量结构（48）的图像。 投影曝光系统（10）被配置为使得在投影曝光系统（10）的操作期间，掩模结构（20）的成像和测量结构（48）的成像同时由投影光学器件 （26）评估装置（54）被配置为在曝光处理期间在检测器（52）的区域中建立测量结构（48）的图像的横向位置。

    Lithium-based metal organic frameworks
    5.
    发明授权
    Lithium-based metal organic frameworks 有权
    锂基金属有机骨架

    公开(公告)号：US08829239B2

    公开(公告)日：2014-09-09

    申请号：US13002612

    申请日：2009-07-28

    申请人： Emi Leung ,  Ulrich Mueller ,  Gerhard Cox

    发明人： Emi Leung ,  Ulrich Mueller ,  Gerhard Cox

    IPC分类号： C07C53/08 ,  C07C53/10 ,  C07F1/00 ,  C07C53/06

    CPC分类号： C07F1/005 ,  C07C53/06 ,  C07C53/10 ,  Y02E60/324 ,  Y02E60/327 ,  Y02E60/328 ,  C07C51/418

    摘要： An object of the present invention relates to a porous metal organic framework comprising at least one first organic compound and ions of at least one metal, with the skeleton of the framework being formed at least partly by the at least one first organic compound coordinating at least partly in a bidentate fashion to at least two ions of the at least one metal, where the at least one metal is lithium and the at least one first compound is derived from formic acid or acetic acid. Also provided a process for preparing the porous metal organic framework and its use for gas storage or separation.

    摘要翻译： 本发明的目的涉及一种多孔金属有机骨架，其包含至少一种第一有机化合物和至少一种金属的离子，骨架的骨架至少部分由至少一种至少配位的第一有机化合物形成 部分地以至少一种金属的至少两种离子的二齿形式，其中所述至少一种金属是锂，并且所述至少一种第一化合物衍生自甲酸或乙酸。 还提供了一种制备多孔金属有机骨架及其用于储气或分离的方法。

    Process for the separation of unbranched hydrocarbons from their branched isomers
    6.
    发明授权
    Process for the separation of unbranched hydrocarbons from their branched isomers 失效
    从支链异构体中分离未分支烃的方法

    公开(公告)号：US08658849B2

    公开(公告)日：2014-02-25

    申请号：US12668436

    申请日：2008-06-30

    申请人： Markus Schubert ,  Ulrich Mueller ,  Christoph Kiener ,  Ingo Richter ,  William Dolan ,  Frank Poplow

    发明人： Markus Schubert ,  Ulrich Mueller ,  Christoph Kiener ,  Ingo Richter ,  William Dolan ,  Frank Poplow

    IPC分类号： C07C7/13

    CPC分类号： C07C7/12 ,  B01J20/22 ,  B01J20/226 ,  B01J2220/56 ,  C07C7/135 ,  C10G25/003 ,  C07C9/00

    摘要： The present invention relates to a process for the separation of at least one unbranched C4-C2O hydrocarbon from a fluid mixture containing the unbranched hydrocarbon and at least one branched isomer of the unbranched hydrocarbon, which comprises the step of—contacting the fluid mixture with an adsorbent comprising a porous metal organic framework material, which material comprises at least one at least bidentate organic compound coordinately bound to at least one metal ion, to get the unbranched hydrocarbon adsorbed, wherein the at least one at least bidentate organic compound is a monocyclic, bicyclic or polycyclic ring system which is derived from at least one heterocycle selected from the group consisting of pyrrole, alpha-pyridone and gamma-pyridone and has at least two ring nitrogens and is unsubstituted or bears one or more substituents selected independently from the group consisting of halogen, Ci-6-alkyl, phenyl, NH2, NH(d-6-alkyl), N(C1-6-alkyl)2, OH, Ophenyl and OCi-6-alkyl, where the substituents Ci_6-alkyl and phenyl are unsubstituted or bear one or more substituents selected independently from the group consisting of halogen, NH2, NH(d-6-alkyl), N(C1-6-alkyl)2, OH, Ophenyl and OCi-6-alkyl. The present invention also relates to the use of said porous metal-organic framework material in a process for the separation of unbranched hydrocarbons from their branched isomers.

    摘要翻译： 本发明涉及从含有非支链烃和非支链烃的至少一种支链异构体的流体混合物中分离至少一种未分支的C 4 -C 20烃的方法，其包括使流体混合物与 吸附剂，其包含多孔金属有机骨架材料，该材料包含与至少一种金属离子配位结合的至少一种至少二齿有机化合物，以获得非支化烃被吸附，其中至少一种至少二齿有机化合物是单环， 衍生自选自吡咯，α-吡啶酮和γ-吡啶酮的至少一种杂环的双环或多环系统，并且具有至少两个环氮并且是未取代的或带有一个或多个独立地选自以下的取代基： 的卤素，C 1-6 - 烷基，苯基，NH 2，NH（C 1-6 - 烷基），N（C 1-6 - 烷基）2，OH，苯基和OC 1-6 - 烷基 ，其中取代基C 1-6 - 烷基和苯基是未取代的或具有一个或多个独立地选自卤素，NH 2，NH（C 1-6 - 烷基），N（C 1-6 - 烷基）2，OH， 和OC 1-6烷基。 本发明还涉及所述多孔金属 - 有机骨架材料在从其支化异构体中分离未分支烃的方法中的用途。

    VACUUM INSULATION UNITS COMPRISING GETTER MATERIALS
    10.
    发明申请
    VACUUM INSULATION UNITS COMPRISING GETTER MATERIALS 失效
    真空绝缘单元包含材料

    公开(公告)号：US20110265654A1

    公开(公告)日：2011-11-03

    申请号：US13144234

    申请日：2010-01-12

    申请人： Andrea Eisenhardt ,  Joerg Krogmann ,  Emi Leung ,  Ulrich Mueller ,  Christoph Kiener

    发明人： Andrea Eisenhardt ,  Joerg Krogmann ,  Emi Leung ,  Ulrich Mueller ,  Christoph Kiener

    IPC分类号： B01D53/02 ,  B01J20/00

    CPC分类号： B01J20/22 ,  B01J20/226 ,  F16L59/065 ,  F25D2201/14

    摘要： The present invention relates to vacuum insulation units comprising at least one thermally insulating, evacuatable porous core material which is sealed in an airtight manner and a sorption medium, wherein the sorption medium comprises at least one porous metal-organic framework comprising at least one at least bidentate organic compound coordinated to at least one metal ion, and also shaped bodies comprising such a vacuum insulation unit.Furthermore, the present invention relates to the use of a porous metal-organic framework as getter material in a vacuum insulation unit.

    摘要翻译： 本发明涉及真空绝热单元，其包括至少一种以气密方式密封的绝热可抽空的多孔芯材料和吸附介质，其中所述吸附介质包括至少一个多孔金属 - 有机骨架，其至少包括至少一个 与至少一种金属离子配位的双齿有机化合物，以及包括这种真空绝热单元的成型体。 此外，本发明涉及多孔金属 - 有机骨架在真空绝热单元中作为吸气材料的用途。