Semiconductor laser device
    1.
    发明授权
    Semiconductor laser device 失效
    半导体激光器件

    公开(公告)号:US5588016A

    公开(公告)日:1996-12-24

    申请号:US523389

    申请日:1995-09-05

    摘要: A semiconductor laser device in which semiconductor layers of an n-type cladding layer, a quantum well active layer 106, a p-type cladding layer, and an intermediate layer are formed on an n-type GaAs substrate in successive order, and a mixed-crystal is formed in a region except the semiconductor layers of the contact layer and the lower part of the contact layer by diffusing Si into the structure from above the intermediate layer, characterized in that the contact layer and the intermediate layer are made of n-type or nonconductive semiconductor material, and a p-type low-resistance region, formed by diffusing Zn into the structure from above the contact layer, is profiled so as not to overlap with the mixed-crystal region formed by Si diffusion.

    摘要翻译: 在n型GaAs衬底上依次形成有n型包覆层,量子阱有源层106,p型覆层,中间层的半导体层的半导体激光器件,混合 通过从中间层的上方将Si扩散到结构体中,在接触层的半导体层和接触层的下部之间的区域中形成晶体,其特征在于,接触层和中间层由n- 型或非导电半导体材料,以及通过从接触层上方将Zn扩散到结构中形成的p型低电阻区域,以与Si扩散形成的混合晶体区域不重叠。

    Semiconductor laser device and driving method for the same as well as
tracking servo system employing the same
    2.
    发明授权
    Semiconductor laser device and driving method for the same as well as tracking servo system employing the same 失效
    半导体激光器件及其驱动方法以及使用其的跟踪伺服系统

    公开(公告)号:US5533042A

    公开(公告)日:1996-07-02

    申请号:US317594

    申请日:1994-10-03

    摘要: A semiconductor laser device which allows high speed correction of the position of a laser spot on an optical disk is disclosed. The semiconductor laser device comprises an active layer which oscillates a laser beam when electric current is supplied thereto, and a plurality of independent electrodes for varying the current density distribution in the active layer to vary the intensity distribution of the laser beam to be emitted from an emergent face of the semiconductor laser device. With the semiconductor laser device, by supplying electric currents individually from the plurality of independent electrodes to vary the current density distribution in the active layer, the beam spot position can be corrected within the frequency bandwidth of several tens MHz by direct modulation of the semiconductor laser device. Also a driving method for the semiconductor laser device and a tracking servo system in which the semiconductor laser device is incorporated are disclosed.

    摘要翻译: 公开了一种允许高速校正光盘上的激光点位置的半导体激光器件。 半导体激光器件包括在向其提供电流时使激光束振荡的有源层,以及用于改变有源层中的电流密度分布的多个独立电极,以改变激光束的发射强度分布 半导体激光装置的紧急面。 利用半导体激光装置,通过从多个独立电极分别供给电流来改变有源层中的电流密度分布,可以通过半导体激光器的直接调制在数十MHz的频带内修正光束位置 设备。 还公开了半导体激光器件的驱动方法和其中结合半导体激光器件的跟踪伺服系统。

    Semiconductor laser device
    3.
    发明授权
    Semiconductor laser device 失效
    半导体激光器件

    公开(公告)号:US5491709A

    公开(公告)日:1996-02-13

    申请号:US106700

    申请日:1993-08-16

    摘要: In a semiconductor laser device according to the invention, a clad layer includes first clad layers, each of which has a greater band gap than an active layer and has a thickness of 0.003 to 0.3 .mu.m, and second clad layers each of which has a lower refractive index than the active layer, and the first clad layers are disposed nearer to the active layer than the second clad layers, respectively. In this structure, the first clad layers confine carriers in the active layer while the second clad layers confine the light in the active layer. Since each of the first clad layers is formed of a thin film, the carriers are hard to move outwardly from the active layer due to the tunnel phenomenon thereof and, even if the lattice constant thereof is slightly different, the first clad layer can be lattice matched to a substrate. For this reason, the materials of the second clad layers can be selected without taking into consideration the size of the band gap thereof. This makes it possible to reduce the oscillation threshold value current density of the laser as well as to improve the temperature characteristic of the laser.

    摘要翻译: 在根据本发明的半导体激光器件中,包覆层包括第一覆盖层,其每一个具有比有源层更大的带隙,并且具有0.003至0.3μm的厚度,以及第二覆盖层具有 比有源层​​低的折射率,并且第一包层分别设置成比第二包层更靠近有源层。 在该结构中,第一覆盖层将载流子限制在有源层中,而第二覆盖层将光限制在有源层中。 由于每个第一包层由薄膜形成,所以载流子由于其隧道现象而难以从有源层向外移动,并且即使其晶格常数稍微不同,第一覆层可以是晶格 与底物匹配。 为此,可以选择第二包层的材料而不考虑其带隙的尺寸。 这使得可以减小激光器的振荡阈值电流密度以及提高激光器的温度特性。

    Method of manufacturing a semiconductor laser device
    5.
    发明授权
    Method of manufacturing a semiconductor laser device 失效
    制造半导体激光器件的方法

    公开(公告)号:US5394425A

    公开(公告)日:1995-02-28

    申请号:US201342

    申请日:1994-02-24

    摘要: The method applies to manufacture of a semiconductor laser device which comprises a semiconductor substrate and a plurality of semiconductor layers piled sequentially one on top of another on the semiconductor substrate, the semiconductor layers including at least a first clad layer; an active layer interposed between a pair of optical waveguide layers, and a second clad layer. In the present manufacturing method, a first impurity diffusion source film is applied on top of the semiconductor layers, an insulation film is applied on top of the first impurity diffusion source film, two layers consisting of the first impurity diffusion source film and insulation film are removed respectively into a stripe shape except for the areas of the semiconductor layers in which impurities are to be diffused, a diffusion protect film to be etched selectively with respect to the insulation film is formed on the surfaces of the semiconductor layers and two layers, an impurity is thermally diffused from the first impurity diffusion source film, a diffusion protect film is etched selectively with respect to the insulation film, and a second impurity is diffused with the insulation film as a mask.

    摘要翻译: 该方法适用于半导体激光器件的制造,该半导体激光器件包括半导体衬底和在半导体衬底上依次堆叠在一起的多个半导体层,半导体层至少包括第一覆盖层; 介于一对光波导层之间的有源层和第二覆层。 在本制造方法中,将第一杂质扩散源膜施加在半导体层的顶部,在第一杂质扩散源膜的顶部施加绝缘膜,由第一杂质扩散源膜和绝缘膜构成的两层 除去杂质要扩散的半导体层的区域以外的条纹状,在半导体层和两层的表面上形成相对于绝缘膜选择性地蚀刻的扩散保护膜, 杂质从第一杂质扩散源膜热扩散,相对于绝缘膜选择性地蚀刻扩散保护膜,第二杂质以绝缘膜作为掩模扩散。

    Semiconductor laser array
    6.
    发明授权
    Semiconductor laser array 失效
    半导体激光阵列

    公开(公告)号:US5563901A

    公开(公告)日:1996-10-08

    申请号:US420822

    申请日:1995-04-12

    CPC分类号: H01S5/42 H01S5/18

    摘要: In a semiconductor laser array in which a semiconductor laser element having a horizontal-direction cavity, and plural outer inclined reflecting mirrors capable of reflecting laser light projected from the semiconductor laser element along a specific direction are integrated on a semiconductor substrate in a monolithic form, these outer inclined reflecting mirrors are positioned adjacent to each other, and also are arranged in such a manner that a distance between the adjoining horizontal-direction cavities becomes longer while being located apart from said outer inclined reflecting mirrors.

    摘要翻译: 在半导体激光器阵列中,具有水平方向腔的半导体激光器元件和能够反射沿着特定方向从半导体激光元件投影的激光的多个外倾斜反射镜以整体形式集成在半导体衬底上, 这些外倾斜反射镜彼此相邻地定位,并且还布置成使得相邻的水平方向空腔之间的距离变得更长,同时与所述外倾斜反射镜分开。

    Semiconductor laser array driving method, semiconductor laser array
driving device and image forming apparatus
    7.
    发明授权
    Semiconductor laser array driving method, semiconductor laser array driving device and image forming apparatus 失效
    半导体激光阵列驱动方法,半导体激光阵列驱动装置和图像形成装置

    公开(公告)号:US5809052A

    公开(公告)日:1998-09-15

    申请号:US731750

    申请日:1996-10-18

    IPC分类号: H01S5/062 H01S5/40 H01S3/08

    摘要: A semiconductor laser array driving method for driving a semiconductor laser array having a plurality of light-emitting points arranged on a base member. The semiconductor laser array driving method has a step of driving the plurality of light-emitting points by a driving pulse current of a pulse width and a duty factor meeting an inequality: .DELTA.T.sub.1 /.DELTA.T.sub.0

    摘要翻译: 一种用于驱动具有布置在基底构件上的多个发光点的半导体激光器阵列的半导体激光阵列驱动方法。 半导体激光阵列驱动方法具有通过满足不等式的脉冲宽度和占空比的驱动脉冲电流来驱动多个发光点的步骤:DELTA T1 / DELTA T0 <+ E,fra 1/2 + EE 其中,当使用连续电流以连续驱动模式驱动半导体激光器阵列时,DELTA T0是发光点的有源层中的温度升高,并且DELTA T1是发光的有源层中的温度升高 当使用脉冲电流以脉冲驱动模式驱动半导体激光器阵列时的点。 在半导体激光器阵列驱动方法中,多个发光点由占空比为0.4以下的驱动脉冲电流驱动,满足不等式:y <3.1exp(-8.9x),其中x是占空系数 y是脉冲宽度(mu s)。

    Method of making a semiconductor laser device
    8.
    发明授权
    Method of making a semiconductor laser device 失效
    制造半导体激光器件的方法

    公开(公告)号:US5648295A

    公开(公告)日:1997-07-15

    申请号:US687938

    申请日:1996-07-29

    摘要: A semiconductor laser device in which semiconductor layers of an n-type cladding layer, a quantum well active layer 106, a p-type cladding layer, and an intermediate layer are formed on an n-type GaAs substrate in successive order, and a mixed-crystal is formed in a region except the semiconductor layers of the contact layer and the lower part of the contact layer by diffusing Si into the structure from above the intermediate layer, characterized in that the contact layer and the intermediate layer are made of n-type or nonconductive semiconductor material, and a p-type low-resistance region, formed by diffusing Zn into the structure from above the contact layer, is profiled so as not to overlap with the mixed-crystal region formed by Si diffusion.

    摘要翻译: 在n型GaAs衬底上依次形成有n型包覆层,量子阱有源层106,p型覆层,中间层的半导体层的半导体激光器件,混合 通过从中间层的上方将Si扩散到结构体中,在接触层的半导体层和接触层的下部之间的区域中形成晶体,其特征在于,接触层和中间层由n- 型或非导电半导体材料,以及通过从接触层上方将Zn扩散到结构中形成的p型低电阻区域,以与Si扩散形成的混合晶体区域不重叠。

    Surface emitting semiconductor laser
    9.
    发明授权
    Surface emitting semiconductor laser 有权
    表面发射半导体激光器

    公开(公告)号:US06650683B2

    公开(公告)日:2003-11-18

    申请号:US10228217

    申请日:2002-08-27

    IPC分类号: H01S5183

    摘要: The present invention provides a surface emitting semiconductor laser, comprising: a semiconductor substrate having sequentially layered thereon a lower multi-layer mirror, an active layer region, and an upper multi-layer mirror that, together with the lower multi-layer mirror, contributes to the formation of a cavity; an upper electrode disposed on an upper layer of the upper multi-layer mirror and provided with an aperture that forms an emission region of a laser beam generated at the active layer region; and a current confinement portion disposed between the upper electrode and the lower multi-layer mirror and provided with an aperture that forms a current path; wherein an aperture diameter of the upper electrode and an aperture diameter of the current confinement portion are determined such that a difference between an optical loss of the cavity in a higher-order lateral mode of the laser beam and an optical loss of the cavity in a fundamental lateral mode of the laser beam becomes a value in the vicinity of a maximum value, and the higher-order lateral mode is suppressed, and at least one of the aperture formed in the upper electrode and the aperture of the current confinement portion is formed into a two-fold symmetrical configuration having long and short axes with respect to arbitrary two axial directions orthogonal to each other in a plane.

    摘要翻译: 本发明提供一种表面发射半导体激光器,包括:半导体衬底,其上依次层叠有下层多层反射镜,有源层区域和上层多层反射镜,其与下层多层反射镜一起贡献 形成一个空腔; 上电极,其设置在所述上​​多层反射镜的上层上,并且设置有形成在所述有源层区域处产生的激光束的发射区域的孔; 以及电流限制部分,其设置在所述上​​电极和所述下多层反射镜之间,并且设置有形成电流路径的孔; 其中确定上限电极的孔径和电流限制部分的孔径直径,使得激光束的高阶横向模式中的空腔的光学损耗与腔室的光损耗之差 激光束的基本横向模式变为最大值附近的值,并且抑制高阶横向模式,并且形成在上电极中形成的孔和电流限制部的孔中的至少一个 成为具有相对于平面中彼此正交的任意两个轴向方向的长轴和短轴的双重对称构型。

    Surface emitting semiconductor laser
    10.
    发明授权
    Surface emitting semiconductor laser 有权
    表面发射半导体激光器

    公开(公告)号:US06529541B1

    公开(公告)日:2003-03-04

    申请号:US09714980

    申请日:2000-11-20

    IPC分类号: H01S5183

    摘要: A surface emitting semiconductor laser that is easy to manufacture and has a high-intensity fundamental lateral mode optical output power. The surface emitting semiconductor laser has a semiconductor substrate on which are sequentially laminated a lower n-type DBR layer, an active layer region, an upper p-type DBR layer, a p-side electrode that is an upper layer of the upper n-type DBR layer and functions as an upper electrode provided with an aperture that forms an emission region for a laser beam, and a current confinement portion formed by oxidization. On the basis of the reflectance of a cavity in a region corresponding to the p-side electrode, a metal aperture diameter (Wmetal) of the aperture and a diameter (Woxide) of the current confinement portion are determined such that the difference between an optical loss of a cavity in a higher-order lateral mode of a laser beam and an optical loss of a cavity in a fundamental lateral mode of a laser beam becomes larger.

    摘要翻译: 一种易于制造且具有高强度基本横向模式光输出功率的表面发射半导体激光器。 表面发射半导体激光器具有半导体衬底,其上依次层叠下n型DBR层,有源层区域,上p型DBR层,作为上层n型DBR层的上层的p侧电极, 型的DBR层,并且作为设置有形成激光束的发射区域的孔的上电极和通过氧化形成的电流限制部分起作用。 基于对应于p侧电极的区域中的空腔的反射率,确定孔的金属孔直径(Wmetal)和电流限制部分的直径(Woxide),使得光学 在激光束的高阶横向模式中的腔的损失和激光束的基本横向模式中的空腔的光学损耗变大。