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    Method of manufacturing near-field light generator including waveguide and plasmon generator
    2.
    发明授权
    Method of manufacturing near-field light generator including waveguide and plasmon generator 有权
    制造包括波导和等离子体发生器的近场光发生器的方法

    公开(公告)号：US08349198B2

    公开(公告)日：2013-01-08

    申请号：US12814669

    申请日：2010-06-14

    申请人： Hironori Araki ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

    发明人： Hironori Araki ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

    IPC分类号： B29D11/00

    CPC分类号： G02B6/1226 ,  B82Y20/00

    摘要： A near-field light generator includes: a waveguide; a clad layer having a penetrating opening and disposed on the waveguide; a plasmon generator accommodated in the opening; and a dielectric film interposed between the plasmon generator and each of the waveguide and the clad layer. In a method of manufacturing the near-field light generator, an initial clad layer is initially formed on the waveguide, and then the initial clad layer is taper-etched by RIE to form a recess that does not reach the top surface of the waveguide. Subsequently, the recess is etched by wet etching until the top surface of the waveguide is exposed in part. Next, the dielectric film is formed in the opening, and the plasmon generator is formed on the dielectric film.

    摘要翻译： 近场光发生器包括：波导; 具有穿透开口并布置在波导上的覆层; 容纳在开口中的等离子体发生器; 以及介于所述等离子体发生器与所述波导管和所述包覆层中的每一个之间的电介质膜。 在制造近场光发生器的方法中，最初在波导上形成初始包层，然后通过RIE对初始包层进行锥蚀刻以形成不到达波导顶表面的凹部。 随后，通过湿蚀刻蚀刻凹部，直到波导的顶表面部分露出。 接着，在开口部形成电介质膜，在电介质膜上形成等离子体发生器。

    Magnetic head for perpendicular magnetic recording having side shield layer and method of manufacturing same
    4.
    发明申请
    Magnetic head for perpendicular magnetic recording having side shield layer and method of manufacturing same 有权
    具有侧屏蔽层的垂直磁记录用磁头及其制造方法

    公开(公告)号：US20100165517A1

    公开(公告)日：2010-07-01

    申请号：US12318412

    申请日：2008-12-29

    申请人： Hironori Araki ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

    发明人： Hironori Araki ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

    IPC分类号： G11B5/33 ,  B44C1/22

    CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/315 ,  Y10T29/49048

    摘要： A magnetic head includes a side shield layer and an encasing layer. The side shield layer has a first end face located in the medium facing surface, a second end face opposite to the first end face, and a first groove accommodating a portion of a pole layer. The first end face includes two portions located on both sides of an end face of the pole layer that are opposite to each other in a track width direction. The encasing layer is formed of a nonmagnetic material and disposed on a side of the side shield layer opposite to a medium facing surface. The encasing layer has a front end face touching the second end face of the side shield layer, and a second groove accommodating another portion of the pole layer. The distance from the medium facing surface to an arbitrary point on the second end face of the side shield layer decreases with decreasing distance from the arbitrary point to the top surface of a substrate.

    摘要翻译： 磁头包括侧屏蔽层和封装层。 侧面屏蔽层具有位于介质相对表面中的第一端面，与第一端面相对的第二端面和容纳极层的一部分的第一凹槽。 第一端面包括在磁极层的端面的沿着磁道宽度方向彼此相对的两侧的两个部分。 封装层由非磁性材料形成，并且设置在侧面屏蔽层的与介质相对表面相对的一侧上。 封装层具有接触侧屏蔽层的第二端面的前端面和容纳极层的另一部分的第二槽。 从侧面屏蔽层的第二端面到中间面向任意点的距离随着从任意点到基板顶面的距离的减小而减小。

    Method of manufacturing heat-assisted magnetic recording head with internal mirror
    5.
    发明授权
    Method of manufacturing heat-assisted magnetic recording head with internal mirror 有权
    制造带内镜的热辅助磁记录头的方法

    公开(公告)号：US08391109B2

    公开(公告)日：2013-03-05

    申请号：US13538996

    申请日：2012-06-29

    申请人： Hironori Araki ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

    发明人： Hironori Araki ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

    IPC分类号： G11B11/00

    CPC分类号： G11B5/314 ,  G11B5/6088 ,  G11B2005/001 ,  G11B2005/0021 ,  Y10T29/49032

    摘要： A manufacturing method for a heat-assisted magnetic recording head includes the step of forming an internal mirror that includes a reflecting film support body and a reflecting film. The reflecting film support body includes first and second inclined surfaces. The reflecting film includes first and second portions that are located on the first and second inclined surfaces, respectively. The step of forming the internal mirror includes the step of forming the reflecting film support body and the step of forming the reflecting film. The step of forming the reflecting film support body forms an initial support body, and performs two taper-etching processes on the initial support body so that the initial support body is provided with the first and second inclined surfaces.

    摘要翻译： 一种热辅助磁记录头的制造方法，包括形成包括反射膜支撑体和反射膜的内反射镜的步骤。 反射膜支撑体包括第一和第二倾斜表面。 反射膜包括分别位于第一和第二倾斜表面上的第一和第二部分。 形成内反射镜的步骤包括形成反射膜支撑体的步骤和形成反射膜的步骤。 形成反射膜支撑体的步骤形成初始支撑体，并且在初始支撑体上执行两个锥形蚀刻处理，使得初始支撑体设置有第一和第二倾斜表面。

    Magnetic head for perpendicular magnetic recording having side shield layer and method of manufacturing same
    6.
    发明授权
    Magnetic head for perpendicular magnetic recording having side shield layer and method of manufacturing same 有权
    具有侧屏蔽层的垂直磁记录用磁头及其制造方法

    公开(公告)号：US08270110B2

    公开(公告)日：2012-09-18

    申请号：US12318412

    申请日：2008-12-29

    申请人： Hironori Araki ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

    发明人： Hironori Araki ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

    IPC分类号： G11B5/127

    CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/315 ,  Y10T29/49048

    摘要： A magnetic head includes a side shield layer and an encasing layer. The side shield layer has a first end face located in the medium facing surface, a second end face opposite to the first end face, and a first groove accommodating a portion of a pole layer. The first end face includes two portions located on both sides of an end face of the pole layer that are opposite to each other in a track width direction. The encasing layer is formed of a nonmagnetic material and disposed on a side of the side shield layer opposite to a medium facing surface. The encasing layer has a front end face touching the second end face of the side shield layer, and a second groove accommodating another portion of the pole layer. The distance from the medium facing surface to an arbitrary point on the second end face of the side shield layer decreases with decreasing distance from the arbitrary point to the top surface of a substrate.

    摘要翻译： 磁头包括侧屏蔽层和封装层。 侧面屏蔽层具有位于介质面对表面中的第一端面，与第一端面相对的第二端面和容纳极层的一部分的第一凹槽。 第一端面包括在磁极层的端面的沿着磁道宽度方向彼此相对的两侧的两个部分。 封装层由非磁性材料形成，并且设置在侧面屏蔽层的与介质相对表面相对的一侧上。 封装层具有接触侧屏蔽层的第二端面的前端面和容纳极层的另一部分的第二槽。 从侧面屏蔽层的第二端面到中间面向任意点的距离随着从任意点到基板顶面的距离的减小而减小。

    Method of manufacturing magnetic head for perpendicular magnetic recording
    9.
    发明授权
    Method of manufacturing magnetic head for perpendicular magnetic recording 有权
    用于垂直磁记录的磁头制造方法

    公开(公告)号：US08221636B2

    公开(公告)日：2012-07-17

    申请号：US12149987

    申请日：2008-05-12

    申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

    发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

    IPC分类号： B44C1/22

    CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116

    摘要： A magnetic head includes a pole layer, and an encasing layer having a groove that accommodates the pole layer. A manufacturing method for the magnetic head includes the steps of forming a nonmagnetic layer that will later undergo formation of the groove therein and will thereby become the encasing layer; forming the groove in the nonmagnetic layer so that the nonmagnetic layer becomes the encasing layer; and forming the pole layer such that the pole layer is accommodated in the groove of the encasing layer. The nonmagnetic layer is formed of Al2O3. The step of forming the groove in the nonmagnetic layer includes the step of taper-etching the nonmagnetic layer by reactive ion etching with an etching gas containing at least BCl3 and N2 among BCl3, Cl2 and N2.

    摘要翻译： 磁头包括极层和具有容纳极层的凹槽的封装层。 磁头的制造方法包括以下步骤：形成将在其中形成凹槽的非磁性层，从而成为包层; 在非磁性层中形成凹槽，使得非磁性层成为包层; 以及形成所述极层，使得所述极层容纳在所述封装层的槽中。 非磁性层由Al2O3形成。 在非磁性层中形成槽的步骤包括通过在BCl 3，Cl 2和N 2中至少含有BCl 3和N 2的蚀刻气体的反应离子蚀刻来对非磁性层进行锥蚀刻的步骤。