公开(公告)号：US20050079043A1

公开(公告)日：2005-04-14

申请号：US10888677

申请日：2004-07-09

申请人： Hironori Ogawa ,  Sakiko Uno

发明人： Hironori Ogawa ,  Sakiko Uno

IPC分类号： B25J9/06 ,  B25J9/10 ,  B25J18/04 ,  B65G49/07 ,  H01L21/677 ,  H01L21/687 ,  B65G1/00

CPC分类号： B25J9/1065 ,  B25J18/04 ,  H01L21/68707 ,  Y10S414/13 ,  Y10T74/20329

摘要： A two-arm transfer robot includes a swivel base arranged to swivel about a vertical swivel axis, and a pair of link arm mechanisms attached to the swivel base. These two link arm mechanisms are symmetrical in structure and function with respect to the swivel axis. A first hand member is supported by one of the link arm mechanisms for carrying a work, while a second hand member is supported by the other link arm mechanism for carrying a work. The first hand member and the second hand member are horizontally movable at the same height without interfering with each other.

摘要翻译： 双臂传送机器人包括设置成围绕垂直旋转轴线旋转的旋转基座和连接到旋转底座的一对连杆臂机构。 这两个连杆臂机构的结构和功能相对于旋转轴线是对称的。 第一手构件由用于承载工件的连杆臂机构中的一个支撑，而第二手构件由另一个连杆臂机构支撑以承载工件。 第一手构件和第二手构件可在相同的高度水平移动，而不会彼此干涉。

公开(公告)号：US07306423B2

公开(公告)日：2007-12-11

申请号：US10825267

申请日：2004-04-14

申请人： Hironori Ogawa ,  Takafumi Uratani ,  Masayuki Sugane ,  Yoshiyuki Matsuzaki ,  Naoya Murata ,  Sakiko Uno

发明人： Hironori Ogawa ,  Takafumi Uratani ,  Masayuki Sugane ,  Yoshiyuki Matsuzaki ,  Naoya Murata ,  Sakiko Uno

IPC分类号： B25J18/02

CPC分类号： H01L21/67766 ,  B25J9/042 ,  B25J9/1065 ,  H01L21/67742 ,  Y10S414/13 ,  Y10T74/20305

摘要： A linear moving mechanism includes a guide member providing a horizontal straight transport path, a moving member movable along the transport path and a drive mechanism which drives the moving member. The drive mechanism includes a first link arm pivotable around a first vertical shaft, and a second link arm having a first end and a second end. The first vertical shaft is on the transport path or on a line parallel to the transport path. The first end is connected to the first link arm for pivotal movement of the second link arm in a horizontal plane, whereas the second end is connected to the moving member for pivotal movement of the second link arm in a horizontal plane.

摘要翻译： 线性移动机构包括提供水平直线传送路径的引导构件，可沿传送路径移动的移动构件和驱动移动构件的驱动机构。 驱动机构包括可绕第一垂直轴可枢转的第一连杆臂和具有第一端和第二端的第二连杆臂。 第一垂直轴位于输送路径上或平行于输送路径的线上。 第一端连接到第一连杆臂，以使第二连杆臂在水平面中枢转运动，而第二端连接到移动部件上，以使第二连杆臂在水平面上枢转运动。

公开(公告)号：US07114907B2

公开(公告)日：2006-10-03

申请号：US10999307

申请日：2004-11-29

申请人： Hironori Ogawa ,  Sakiko Uno

发明人： Hironori Ogawa ,  Sakiko Uno

IPC分类号： B25J18/02

CPC分类号： H01L21/67742 ,  B25J9/009 ,  H01L21/68707 ,  Y10T74/20305

摘要： A transfer robot includes a swivel base pivotable about a vertical axis, a hand for holding a plate-like work placed thereon, and a linear transfer mechanism supporting the hand and provided on the swivel base. The transfer mechanism is designed to move the hand forward and backward along a horizontal linear path. The hand is provided with a front stopper for checking a front edge of the work. The swivel base is provided with a work holder contacting a rear edge of the work when the hand is moved to a retracted position on the linear path.

摘要翻译： 传送机器人包括可围绕垂直轴线枢转的旋转基座，用于保持放置在其上的板状工件的手以及支撑手并设置在旋转底座上的线性传送机构。 传送机构被设计成沿水平线性路径向前和向后移动手。 手上设置有用于检查工件的前边缘的前止动件。 旋转底座设置有当手移动到线性路径上的缩回位置时接触工件的后边缘的工件保持架。

公开(公告)号：US07056080B2

公开(公告)日：2006-06-06

申请号：US10888677

申请日：2004-07-09

申请人： Hironori Ogawa ,  Sakiko Uno

发明人： Hironori Ogawa ,  Sakiko Uno

IPC分类号： B25J18/02

CPC分类号： B25J9/1065 ,  B25J18/04 ,  H01L21/68707 ,  Y10S414/13 ,  Y10T74/20329

摘要： A two-arm transfer robot includes a swivel base arranged to swivel about a vertical swivel axis, and a pair of link arm mechanisms attached to the swivel base. These two link arm mechanisms are symmetrical in structure and function with respect to the swivel axis. A first hand member is supported by one of the link arm mechanisms for carrying a work, while a second hand member is supported by the other link arm mechanism for carrying a work. The first hand member and the second hand member are horizontally movable at the same height without interfering with each other.

摘要翻译： 双臂传送机器人包括设置成围绕垂直旋转轴线旋转的旋转基座和连接到旋转底座的一对连杆臂机构。 这两个连杆臂机构的结构和功能相对于旋转轴线是对称的。 第一手构件由用于承载工件的连杆臂机构中的一个支撑，而第二手构件由另一个连杆臂机构支撑以承载工件。 第一手构件和第二手构件可在相同的高度水平移动，而不会彼此干涉。

公开(公告)号：US20050118010A1

公开(公告)日：2005-06-02

申请号：US10999307

申请日：2004-11-29

申请人： Hironori Ogawa ,  Sakiko Uno

发明人： Hironori Ogawa ,  Sakiko Uno

IPC分类号： B25J9/06 ,  B25J15/08 ,  B65G49/07 ,  B66C23/00 ,  H01L21/677 ,  H01L21/68 ,  H01L21/687

CPC分类号： H01L21/67742 ,  B25J9/009 ,  H01L21/68707 ,  Y10T74/20305

摘要： A transfer robot includes a swivel base pivotable about a vertical axis, a hand for holding a plate-like work placed thereon, and a linear transfer mechanism supporting the hand and provided on the swivel base. The transfer mechanism is designed to move the hand forward and backward along a horizontal linear path. The hand is provided with a front stopper for checking a front edge of the work. The swivel base is provided with a work holder contacting a rear edge of the work when the hand is moved to a retracted position on the linear path.

摘要翻译： 传送机器人包括可围绕垂直轴线枢转的旋转基座，用于保持放置在其上的板状工件的手以及支撑手并设置在旋转底座上的线性传送机构。 传送机构被设计成沿水平线性路径向前和向后移动手。 手上设置有用于检查工件的前边缘的前止动件。 旋转底座设置有当手移动到线性路径上的缩回位置时接触工件的后边缘的工件保持架。

公开(公告)号：US20050036877A1

公开(公告)日：2005-02-17

申请号：US10825267

申请日：2004-04-14

申请人： Hironori Ogawa ,  Takafumi Uratani ,  Masayuki Sugane ,  Yoshiyuki Matsuzaki ,  Naoya Murata ,  Sakiko Uno

发明人： Hironori Ogawa ,  Takafumi Uratani ,  Masayuki Sugane ,  Yoshiyuki Matsuzaki ,  Naoya Murata ,  Sakiko Uno

IPC分类号： B25J9/06 ,  B25J9/04 ,  B25J9/10 ,  B65G49/07 ,  F16H21/02 ,  F16H21/04 ,  F16H21/10 ,  H01L21/677 ,  B66C23/00

CPC分类号： H01L21/67766 ,  B25J9/042 ,  B25J9/1065 ,  H01L21/67742 ,  Y10S414/13 ,  Y10T74/20305

摘要： A linear moving mechanism includes a guide member providing a horizontal straight transport path, a moving member movable along the transport path and a drive mechanism which drives the moving member. The drive mechanism includes a first link arm pivotable around a first vertical shaft, and a second link arm having a first end and a second end. The first vertical shaft is on the transport path or on a line parallel to the transport path. The first end is connected to the first link arm for pivotal movement of the second link arm in a horizontal plane, whereas the second end is connected to the moving member for pivotal movement of the second link arm in a horizontal plane.

摘要翻译： 线性移动机构包括提供水平直线传送路径的引导构件，可沿传送路径移动的移动构件和驱动移动构件的驱动机构。 驱动机构包括可绕第一垂直轴可枢转的第一连杆臂和具有第一端和第二端的第二连杆臂。 第一垂直轴位于输送路径上或平行于输送路径的线上。 第一端连接到第一连杆臂，以使第二连杆臂在水平面上枢转运动，而第二端连接到移动部件，用于第二连杆臂在水平面中枢转运动。

公开(公告)号：US08823309B2

公开(公告)日：2014-09-02

申请号：US13391962

申请日：2010-09-17

申请人： Hironori Ogawa ,  Masahiro Koyama ,  Nobuo Shibata ,  Masaru Matsushima ,  Shuichi Nakagawa ,  Katsunori Onuki ,  Yoshimasa Fukushima

发明人： Hironori Ogawa ,  Masahiro Koyama ,  Nobuo Shibata ,  Masaru Matsushima ,  Shuichi Nakagawa ,  Katsunori Onuki ,  Yoshimasa Fukushima

IPC分类号： G03B27/42 ,  H01L21/027

CPC分类号： H01J37/20 ,  H01J2237/20228 ,  H01J2237/20278

摘要： Disclosed is a smaller and lighter stage device which can be applied to a device such as a length measurement SEM for inspecting and/or evaluating a semiconductor, and in which the effect of a magnetic field on an electron beam can be reduced. Linear motors 110, 111, 112, 113 are disposed on four sides of a base 104 to be distanced from an electron beam projection position (the center of the stage device), respectively. The base 104 has dimensions substantially equivalent to minimum dimensions determined by the size of a top table 101 and a movable stroke. Linear motor stators 110, 112 are configured to have a “C-shaped” structure whose opening faces outside of the stage device, respectively. Further, a movable table is coupled to the top table via linear guides 107, 109 composed of a nonmagnetic material or roller mechanisms composed of a nonmagnetic material.

摘要翻译： 公开了一种可以应用于诸如用于检查和/或评估半导体的长度测量SEM的装置的较小和较轻的平台装置，其中可以减小磁场对电子束的影响。 直线电动机110,111,112,113分别设置在基座104的四侧，与电子束突出位置（台装置的中心）分开。 基座104的尺寸基本上等于由顶台101和可移动冲程的尺寸确定的最小尺寸。 线性电动机定子110,112被构造为具有开口面分别位于舞台装置外侧的“C”形结构。 此外，可移动工作台通过由非磁性材料构成的线性引导件107,109或由非磁性材料构成的滚子机构联接到顶台。

公开(公告)号：US6102649A

公开(公告)日：2000-08-15

申请号：US211075

申请日：1998-12-14

申请人： Hironori Ogawa ,  Ryusuke Tsubota

发明人： Hironori Ogawa ,  Ryusuke Tsubota

IPC分类号： B25J9/06 ,  B25J9/10 ,  B25J19/00 ,  H01L21/677 ,  B25J18/00

CPC分类号： B25J9/1065 ,  H01L21/67742 ,  Y10S414/13 ,  Y10T74/20207

摘要： A two-armed transfer robot is provided which includes a first double-pantograph mechanism and a second double-pantograph mechanism which is substantially similar in arrangement to the first double-pantograph mechanism. Each double-pantograph mechanism includes a first pantograph assembly and a second pantograph assembly. The first pantograph assembly is provided with an inner link, a pair of first intermediate links and an outer link. The second pantograph assembly is provided with the outer link in common with the first pantograph assembly, a pair of second intermediate links and a hand-supporting link. The transfer robot also includes a stationary base member, first to fourth shafts coaxially supported by the base member for rotational movement about a vertical axis, first to fourth driving devices for actuating the first to the fourth shafts, respectively. The driving devices are fixed to the base member. The transfer robot further includes first and second handling members supported by the hand-supporting links of the first and the second double-pantograph mechanisms, respectively. The first and the second intermediate links of each double-pantograph mechanism is inclined beyond the vertical axis in a direction opposite to the handling member when the handling member is retreated closer to the shafts.

摘要翻译： 提供一种双臂传送机器人，其包括第一双缩放机构和第二双缩放机构，其与第一双缩放机构的布置基本相似。 每个双缩放机构包括第一受电弓组件和第二受电弓组件。 第一受电弓组件设置有内连杆，一对第一中间连杆和外连杆。 第二受电弓组件设置有与第一缩放仪组件共同的外部连杆，一对第二中间连杆和手持支撑连杆。 传送机器人还包括固定基座构件，第一至第四轴同轴地由基座构件支撑，用于围绕垂直轴线旋转运动，第一至第四驱动装置分别用于致动第一至第四轴。 驱动装置固定在基座部件上。 传送机械手还包括分别由第一和第二双缩放机构的手持支撑件支撑的第一和第二处理部件。 当处理构件更靠近轴退避时，每个双缩放机构的第一和第二中间连杆在与处理构件相反的方向上倾斜超过垂直轴线。

公开(公告)号：US5975834A

公开(公告)日：1999-11-02

申请号：US31520

申请日：1998-02-27

申请人： Hironori Ogawa ,  Hirokazu Yoda

发明人： Hironori Ogawa ,  Hirokazu Yoda

IPC分类号： B25J9/06 ,  B25J9/10 ,  B25J17/00 ,  B25J18/02 ,  B25J18/04 ,  H01L21/677 ,  B25J18/00

CPC分类号： B25J18/04 ,  B25J9/009 ,  B25J9/107 ,  H01L21/67742 ,  Y10S414/141

摘要： A two-armed transfer robot includes first and second arm mechanisms each having a handling member for carrying a workpiece.First to third shafts associated with the arm mechanisms are coaxially supported by a stationary base frame for rotation about a first axis. The first arm mechanism has a pantograph assembly including a first arm, an outer link, a pair of intermediate links and an inner link. The first arm carries the outer link for rotation about a second axis. The outer link carries each intermediate link for rotation about a third axis. The third axes are spaced outward from the second axis. The second axis is located between the third axes as viewed circumferentially about the first axis. The first arm mechanism also has rotation-transmitting members and connecting members. The second arm mechanism is substantially identical to the first arm mechanism. The first and the second handling members are vertically spaced from each other to avoid interference with each other.

摘要翻译： 双臂传送机器人包括第一和第二臂机构，每个具有用于承载工件的处理构件。 与臂机构相关联的第一至第三轴由固定的基架同轴支撑，以围绕第一轴线旋转。 第一臂机构具有包括第一臂，外链节，一对中间连杆和内链节的受电弓组件。 第一臂承载外部连杆以围绕第二轴线旋转。 外部连杆承载每个中间连杆以围绕第三轴线旋转。 第三轴与第二轴向外隔开。 当围绕第一轴线周向地观察时，第二轴线位于第三轴线之间。 第一臂机构还具有旋转传递构件和连接构件。 第二臂机构与第一臂机构基本相同。 第一和第二处理构件彼此垂直间隔开以避免彼此干涉。

公开(公告)号：US6109860A

公开(公告)日：2000-08-29

申请号：US211591

申请日：1998-12-14

申请人： Hironori Ogawa ,  Ryusuke Tsubota

发明人： Hironori Ogawa ,  Ryusuke Tsubota

IPC分类号： B25J9/04 ,  B25J9/06 ,  B25J19/00 ,  H01L21/677 ,  B25J18/04

CPC分类号： B25J9/06 ,  B25J9/042 ,  H01L21/67742 ,  Y10S414/13 ,  Y10T74/20207

摘要： A two-armed transfer robot is provided which includes an upper arm mechanism and a lower arm mechanism which is substantially identical to the upper arm mechanism. Each arm mechanism is provided with a handling member for carrying a workpiece to be processed. Each arm mechanism is also provided with a pantograph assembly consisting of a base arm, an outer link, a pair of intermediate links and an inner link. The handling member of each arm mechanism is arranged to be spaced from a central driving shaft when the handling member is retreated closer to the shaft. The base arm of the pantograph assembly is inclined away from the handling member when the handling member is retreated closer to the shaft. At the same time, the intermediate links are also inclined away from the handling member.

摘要翻译： 提供了一种双臂传送机器人，其包括与上臂机构基本相同的上臂机构和下臂机构。 每个臂机构设置有用于承载要处理的工件的处理构件。 每个臂机构还设置有由基部臂，外部连杆，一对中间连杆和内部连杆构成的受电弓组件。 每个臂机构的处理构件布置成当处理构件更靠近轴后退时与中心驱动轴间隔开。 当处理构件更靠近轴时，缩放组件的基部臂远离处理构件倾斜。 同时，中间连杆也远离处理部件倾斜。