公开(公告)号：US06764945B2

公开(公告)日：2004-07-20

申请号：US09822318

申请日：2001-04-02

申请人： Hiroshi Ashihara ,  Tatsuyuki Saito ,  Uitsu Tanaka ,  Hidenori Suzuki ,  Hideaki Tsugane ,  Yasuko Yoshida ,  Ken Okutani

发明人： Hiroshi Ashihara ,  Tatsuyuki Saito ,  Uitsu Tanaka ,  Hidenori Suzuki ,  Hideaki Tsugane ,  Yasuko Yoshida ,  Ken Okutani

IPC分类号： H01L214763

CPC分类号： H01L21/2855 ,  H01L21/28556 ,  H01L21/32051 ,  H01L21/76801 ,  H01L21/76804 ,  H01L21/76805 ,  H01L21/76814 ,  H01L21/76834 ,  H01L21/76837 ,  H01L21/76843 ,  H01L21/76846 ,  H01L21/7685 ,  H01L21/76855 ,  H01L21/76877 ,  H01L2221/1078 ,  H01L2924/0002 ,  H01L2924/00

摘要： In order to form a good contact between metallizations and improve the reliability and product yield of a semiconductor integrated circuit device, a plug is formed in a contact hole by depositing a first sputter film inside of the contact hole by traditional sputtering, depositing a second sputter film over the first sputter film by long throw sputtering, depositing a W film over the second sputtering film by CVD and removing the first and second sputter films and the W film from the outside of the contact hole. The barrier properties can be improved by constituting a barrier film from the first sputter film and second sputter film which are different in directivity.

摘要翻译： 为了在金属化之间形成良好的接触并提高半导体集成电路器件的可靠性和产品产量，通过传统溅射在接触孔内部沉积第一溅射膜，在接触孔中形成插塞，沉积第二溅射 通过长溅射溅射第一溅射膜上的膜，通过CVD在第二溅射膜上沉积W膜，并从接触孔的外部除去第一和第二溅射膜和W膜。 可以通过从方向性不同的第一溅射膜和第二溅射膜构成阻挡膜来改善阻挡性。

公开(公告)号：US07088001B2

公开(公告)日：2006-08-08

申请号：US10844479

申请日：2004-05-13

申请人： Hiroshi Ashihara ,  Tatsuyuki Saito ,  Uitsu Tanaka ,  Hidenori Suzuki ,  Hideaki Tsugane ,  Yasuko Yoshida ,  Ken Okutani

发明人： Hiroshi Ashihara ,  Tatsuyuki Saito ,  Uitsu Tanaka ,  Hidenori Suzuki ,  Hideaki Tsugane ,  Yasuko Yoshida ,  Ken Okutani

IPC分类号： H01L23/48

CPC分类号： H01L21/2855 ,  H01L21/28556 ,  H01L21/32051 ,  H01L21/76801 ,  H01L21/76804 ,  H01L21/76805 ,  H01L21/76814 ,  H01L21/76834 ,  H01L21/76837 ,  H01L21/76843 ,  H01L21/76846 ,  H01L21/7685 ,  H01L21/76855 ,  H01L21/76877 ,  H01L2221/1078 ,  H01L2924/0002 ,  H01L2924/00

摘要： In order to form a good contact between metallizations and improve the reliability and product yield of a semiconductor integrated circuit device, a plug is formed in a contact hole by depositing a first sputter film inside of the contact hole by traditional sputtering, depositing a second sputter film over the first sputter film by long throw sputtering, depositing a W film over the second sputtering film by CVD and removing the first and second sputter films and the W film from the outside of the contact hole. The barrier properties can be improved by constituting a barrier film from the first sputter film and second sputter film which are different in directivity.

摘要翻译： 为了在金属化之间形成良好的接触并提高半导体集成电路器件的可靠性和产品产量，通过传统溅射在接触孔内部沉积第一溅射膜，在接触孔中形成插塞，沉积第二溅射 通过长溅射溅射第一溅射膜上的膜，通过CVD在第二溅射膜上沉积W膜，并从接触孔的外部除去第一和第二溅射膜和W膜。 可以通过从方向性不同的第一溅射膜和第二溅射膜构成阻挡膜来改善阻挡性。

公开(公告)号：US07566662B2

公开(公告)日：2009-07-28

申请号：US11733316

申请日：2007-04-10

申请人： Takuya Futase ,  Hideaki Tsugane ,  Mitsuo Kimoto ,  Hidenori Suzuki

发明人： Takuya Futase ,  Hideaki Tsugane ,  Mitsuo Kimoto ,  Hidenori Suzuki

IPC分类号： H01L21/306

CPC分类号： H01L21/67184 ,  H01L21/02057 ,  H01L21/02068 ,  H01L21/67167 ,  H01L21/67207 ,  H01L21/823835 ,  H01L21/823842 ,  H01L29/665 ,  H01L29/6659 ,  H01L29/7833 ,  Y10S438/906

摘要： Provided is a method of manufacturing a semiconductor device. After a semiconductor wafer is placed over a wafer stage with which a dry cleaning chamber of a film forming apparatus is equipped, dry cleaning treatment is given over the surface of the semiconductor wafer with a reducing gas. Then, the semiconductor wafer is heat treated at a first temperature of from 100 to 150° C. by using a shower head kept at 180° C. The semiconductor wafer is then vacuum-transferred to a heat treatment chamber, wherein the semiconductor wafer is heat treated at a second temperature of from 150 to 400° C. A product remaining over the main surface of the semiconductor wafer is thus removed. The present invention makes it possible to manufacture a semiconductor device having improved reliability and production yield by reducing variations in the electrical properties of a nickel silicide layer.

摘要翻译： 提供一种制造半导体器件的方法。 在将半导体晶片放置在配备有成膜装置的干洗室的晶片台上之后，用还原气体在半导体晶片的表面上进行干洗处理。 然后，通过使用保持在180℃的喷淋头，在100〜150℃的第一温度下对半导体晶片进行热处理。然后将半导体晶片真空转移到热处理室，其中半导体晶片为 在150-400℃的第二温度下进行热处理。因此，去除了残留在半导体晶片的主表面上的产物。 本发明通过减少硅化镍层的电性能的变化，可以制造具有提高的可靠性和生产率的半导体器件。

公开(公告)号：US20070238321A1

公开(公告)日：2007-10-11

申请号：US11733316

申请日：2007-04-10

申请人： Takuya Futase ,  Hideaki Tsugane ,  Mitsuo Kimoto ,  Hidenori Suzuki

发明人： Takuya Futase ,  Hideaki Tsugane ,  Mitsuo Kimoto ,  Hidenori Suzuki

IPC分类号： B08B6/00

CPC分类号： H01L21/67184 ,  H01L21/02057 ,  H01L21/02068 ,  H01L21/67167 ,  H01L21/67207 ,  H01L21/823835 ,  H01L21/823842 ,  H01L29/665 ,  H01L29/6659 ,  H01L29/7833 ,  Y10S438/906

摘要： Provided is a method of manufacturing a semiconductor device. After a semiconductor wafer is placed over a wafer stage with which a dry cleaning chamber of a film forming apparatus is equipped, dry cleaning treatment is given over the surface of the semiconductor wafer with a reducing gas. Then, the semiconductor wafer is heat treated at a first temperature of from 100 to 150° C. by using a shower head kept at 180° C. The semiconductor wafer is then vacuum-transferred to a heat treatment chamber, wherein the semiconductor wafer is heat treated at a second temperature of from 150 to 400° C. A product remaining over the main surface of the semiconductor wafer is thus removed. The present invention makes it possible to manufacture a semiconductor device having improved reliability and production yield by reducing variations in the electrical properties of a nickel silicide layer.

摘要翻译： 提供一种制造半导体器件的方法。 在将半导体晶片放置在配备有成膜装置的干洗室的晶片台上之后，用还原气体在半导体晶片的表面上进行干洗处理。 然后，通过使用保持在180℃的喷淋头，在100〜150℃的第一温度下对半导体晶片进行热处理。然后将半导体晶片真空转移到热处理室，其中半导体晶片为 在150-400℃的第二温度下进行热处理。因此，去除了残留在半导体晶片的主表面上的产物。 本发明通过减少硅化镍层的电性能的变化，可以制造具有提高的可靠性和生产率的半导体器件。

公开(公告)号：US06583049B2

公开(公告)日：2003-06-24

申请号：US09998644

申请日：2001-12-03

申请人： Masayuki Suzuki ,  Shinji Nishihara ,  Masashi Sahara ,  Shinichi Ishida ,  Hiromi Abe ,  Sonoko Tohda ,  Hiroyuki Uchiyama ,  Hideaki Tsugane ,  Yoshiaki Yoshiura

发明人： Masayuki Suzuki ,  Shinji Nishihara ,  Masashi Sahara ,  Shinichi Ishida ,  Hiromi Abe ,  Sonoko Tohda ,  Hiroyuki Uchiyama ,  Hideaki Tsugane ,  Yoshiaki Yoshiura

IPC分类号： H01L214763

CPC分类号： H01L21/76862 ,  H01L21/32051 ,  H01L21/7684 ,  H01L21/76841 ,  H01L21/76843 ,  H01L21/76849 ,  H01L21/7685 ,  H01L23/53223 ,  H01L23/53266 ,  H01L24/03 ,  H01L24/05 ,  H01L24/11 ,  H01L24/45 ,  H01L24/48 ,  H01L2224/02166 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/05082 ,  H01L2224/05083 ,  H01L2224/05124 ,  H01L2224/05166 ,  H01L2224/05184 ,  H01L2224/05187 ,  H01L2224/05624 ,  H01L2224/13099 ,  H01L2224/45144 ,  H01L2224/48463 ,  H01L2224/48624 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01015 ,  H01L2924/01018 ,  H01L2924/01019 ,  H01L2924/01022 ,  H01L2924/01029 ,  H01L2924/0104 ,  H01L2924/0105 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01079 ,  H01L2924/04941 ,  H01L2924/05042 ,  H01L2924/14 ,  H01L2924/00014 ,  H01L2924/01007 ,  H01L2924/04953 ,  H01L2924/00

摘要： A method for making a semiconductor integrated circuit device comprises the steps of: (a) depositing a first underlying film made of titanium nitride, on an insulating film having a plurality of through-holes; (b) depositing a tungsten film on the first underlying film, and etching the tungsten film back by means of a fluorine-containing plasma thereby leaving the tungsten film only in the connection holes; (c) sputter etching the surface of the first underlying film to remove the fluorine from the surface of the first underlying film; and (d) forming an aluminum film on the first underlying film. The semiconductor integrated circuit device obtained by the method is also described.

公开(公告)号：US06372554B1

公开(公告)日：2002-04-16

申请号：US09390682

申请日：1999-09-07

申请人： Keizo Kawakita ,  Kazuhiko Kajigaya ,  Seiji Narui ,  Kiyoshi Nakai ,  Kazunari Suzuki ,  Hideaki Tsugane ,  Fumiyoshi Sato

发明人： Keizo Kawakita ,  Kazuhiko Kajigaya ,  Seiji Narui ,  Kiyoshi Nakai ,  Kazunari Suzuki ,  Hideaki Tsugane ,  Fumiyoshi Sato

IPC分类号： H01L2182

CPC分类号： H01L27/10894 ,  H01L23/5258 ,  H01L27/10814 ,  H01L28/84 ,  H01L28/90 ,  H01L2924/0002 ,  H01L2924/00

摘要： A pattern of more than one conductive layer overlying a fuse formed in a TEG region is subject to OR processing; further, a combined or “synthetic” pattern with an opening pattern of one or more testing pads connected to said fuse added thereto is copied by transfer printing techniques to a photosensitive resin layer that is coated on the surface of a semiconductor wafer, thereby forcing the resin layer to reside only in a selected area of a scribe region, to which area the synthetic pattern has been transferred.

摘要翻译： 覆盖在TEG区域中形成的熔丝的多于一个的导电层的图案经过OR处理; 此外，通过转印技术将连接到所述熔丝的一个或多个测试焊盘的开口图案的组合或“合成”图案复制到涂覆在半导体晶片的表面上的感光性树脂层，从而迫使 树脂层仅驻留在划线区域的选定区域中，合成图案已转移到该区域。

公开(公告)号：US06780757B2

公开(公告)日：2004-08-24

申请号：US10430402

申请日：2003-05-07

申请人： Masayuki Suzuki ,  Shinji Nishihara ,  Masashi Sahara ,  Shinichi Ishida ,  Hiromi Abe ,  Sonoko Tohda ,  Hiroyuki Uchiyama ,  Hideaki Tsugane ,  Yoshiaki Yoshiura

发明人： Masayuki Suzuki ,  Shinji Nishihara ,  Masashi Sahara ,  Shinichi Ishida ,  Hiromi Abe ,  Sonoko Tohda ,  Hiroyuki Uchiyama ,  Hideaki Tsugane ,  Yoshiaki Yoshiura

IPC分类号： H01L214763

CPC分类号： H01L21/76862 ,  H01L21/32051 ,  H01L21/7684 ,  H01L21/76841 ,  H01L21/76843 ,  H01L21/76849 ,  H01L21/7685 ,  H01L23/53223 ,  H01L23/53266 ,  H01L24/03 ,  H01L24/05 ,  H01L24/11 ,  H01L24/45 ,  H01L24/48 ,  H01L2224/02166 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/05082 ,  H01L2224/05083 ,  H01L2224/05124 ,  H01L2224/05166 ,  H01L2224/05184 ,  H01L2224/05187 ,  H01L2224/05624 ,  H01L2224/13099 ,  H01L2224/45144 ,  H01L2224/48463 ,  H01L2224/48624 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01015 ,  H01L2924/01018 ,  H01L2924/01019 ,  H01L2924/01022 ,  H01L2924/01029 ,  H01L2924/0104 ,  H01L2924/0105 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01079 ,  H01L2924/04941 ,  H01L2924/05042 ,  H01L2924/14 ,  H01L2924/00014 ,  H01L2924/01007 ,  H01L2924/04953 ,  H01L2924/00

摘要： A method for making a semiconductor integrated circuit device comprises the steps of: (a) depositing a first underlying film made of titanium nitride, on an insulating film having a plurality of through-holes; (b) depositing a tungsten film on the first underlying film, and etching the tungsten film back by means of a fluorine-containing plasma thereby leaving the tungsten film only in the connection holes; (c) sputter etching the surface of the first underlying film to remove the fluorine from the surface of the first underlying film; and (d) forming an aluminum film on the first underlying film. The semiconductor integrated circuit device obtained by the method is also described.

摘要翻译： 一种制造半导体集成电路器件的方法包括以下步骤：（a）在具有多个通孔的绝缘膜上沉积由氮化钛制成的第一底层膜; （b）在第一底层膜上沉积钨膜，并通过含氟等离子体将钨膜回蚀刻，从而将钨膜留在连接孔中; （c）溅射蚀刻第一底层膜的表面以从第一底层膜的表面除去氟; 和（d）在第一底层膜上形成铝膜。 还描述了通过该方法获得的半导体集成电路器件。

公开(公告)号：US06538329B2

公开(公告)日：2003-03-25

申请号：US09933163

申请日：2001-08-21

申请人： Masayuki Suzuki ,  Shinji Nishihara ,  Masashi Sahara ,  Shinichi Ishida ,  Hiromi Abe ,  Sonoko Tohda ,  Hiroyuki Uchiyama ,  Hideaki Tsugane ,  Yoshiaki Yoshiura

发明人： Masayuki Suzuki ,  Shinji Nishihara ,  Masashi Sahara ,  Shinichi Ishida ,  Hiromi Abe ,  Sonoko Tohda ,  Hiroyuki Uchiyama ,  Hideaki Tsugane ,  Yoshiaki Yoshiura

IPC分类号： H01L2348

CPC分类号： H01L21/76862 ,  H01L21/32051 ,  H01L21/7684 ,  H01L21/76841 ,  H01L21/76843 ,  H01L21/76849 ,  H01L21/7685 ,  H01L23/53223 ,  H01L23/53266 ,  H01L24/03 ,  H01L24/05 ,  H01L24/11 ,  H01L24/45 ,  H01L24/48 ,  H01L2224/02166 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/05082 ,  H01L2224/05083 ,  H01L2224/05124 ,  H01L2224/05166 ,  H01L2224/05184 ,  H01L2224/05187 ,  H01L2224/05624 ,  H01L2224/13099 ,  H01L2224/45144 ,  H01L2224/48463 ,  H01L2224/48624 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01015 ,  H01L2924/01018 ,  H01L2924/01019 ,  H01L2924/01022 ,  H01L2924/01029 ,  H01L2924/0104 ,  H01L2924/0105 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01079 ,  H01L2924/04941 ,  H01L2924/05042 ,  H01L2924/14 ,  H01L2924/00014 ,  H01L2924/01007 ,  H01L2924/04953 ,  H01L2924/00

摘要： A method for making a semiconductor integrated circuit device comprises the steps of: (a) depositing a first underlying film made of titanium nitride, on an insulating film having a plurality of through-holes; (b) depositing a tungsten film on the first underlying film, and etching the tungsten film back by means of a fluorine-containing plasma thereby leaving the tungsten film only in the connection holes; (c) sputter etching the surface of the first underlying film to remove the fluorine from the surface of the first underlying film; and (d) forming an aluminum film on the first underlying film. The semiconductor integrated circuit device obtained by the method is also described.

公开(公告)号：US06300237B1

公开(公告)日：2001-10-09

申请号：US09245743

申请日：1999-02-08

申请人： Masayuki Suzuki ,  Shinji Nishihara ,  Masashi Sahara ,  Shinichi Ishida ,  Hiromi Abe ,  Sonoko Tohda ,  Hiroyuki Uchiyama ,  Hideaki Tsugane ,  Yoshiaki Yoshiura

发明人： Masayuki Suzuki ,  Shinji Nishihara ,  Masashi Sahara ,  Shinichi Ishida ,  Hiromi Abe ,  Sonoko Tohda ,  Hiroyuki Uchiyama ,  Hideaki Tsugane ,  Yoshiaki Yoshiura

IPC分类号： H01L214763

CPC分类号： H01L21/76862 ,  H01L21/32051 ,  H01L21/7684 ,  H01L21/76841 ,  H01L21/76843 ,  H01L21/76849 ,  H01L21/7685 ,  H01L23/53223 ,  H01L23/53266 ,  H01L24/03 ,  H01L24/05 ,  H01L24/11 ,  H01L24/45 ,  H01L24/48 ,  H01L2224/02166 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/05082 ,  H01L2224/05083 ,  H01L2224/05124 ,  H01L2224/05166 ,  H01L2224/05184 ,  H01L2224/05187 ,  H01L2224/05624 ,  H01L2224/13099 ,  H01L2224/45144 ,  H01L2224/48463 ,  H01L2224/48624 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01015 ,  H01L2924/01018 ,  H01L2924/01019 ,  H01L2924/01022 ,  H01L2924/01029 ,  H01L2924/0104 ,  H01L2924/0105 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01079 ,  H01L2924/04941 ,  H01L2924/05042 ,  H01L2924/14 ,  H01L2924/00014 ,  H01L2924/01007 ,  H01L2924/04953 ,  H01L2924/00

摘要： A method for making a semiconductor integrated circuit device comprises the steps of: (a) depositing a first underlying film made of titanium nitride, on an insulating film having a plurality of through-holes; (b) depositing a tungsten film on the first underlying film, and etching the tungsten film back by means of a fluorine-containing plasma thereby leaving the tungsten film only in the connection holes; (c) sputter etching the surface of the first underlying film to remove the fluorine from the surface of the first underlying film; and (d) forming an aluminium film on the first underlying film. The semiconductor integrated circuit device obtained by the method is also described.

摘要翻译： 一种制造半导体集成电路器件的方法包括以下步骤：（a）在具有多个通孔的绝缘膜上沉积由氮化钛制成的第一底层膜; （b）在第一底层膜上沉积钨膜，并通过含氟等离子体将钨膜回蚀刻，从而将钨膜留在连接孔中; （c）溅射蚀刻第一底层膜的表面以从第一底层膜的表面除去氟; 和（d）在第一底层膜上形成铝膜。 还描述了通过该方法获得的半导体集成电路器件。

公开(公告)号：US5904556A

公开(公告)日：1999-05-18

申请号：US584065

申请日：1996-01-11

申请人： Masayuki Suzuki ,  Shinji Nishihara ,  Masashi Sahara ,  Shinichi Ishida ,  Hiromi Abe ,  Sonoko Tohda ,  Hiroyuki Uchiyama ,  Hideaki Tsugane ,  Yoshiaki Yoshiura

发明人： Masayuki Suzuki ,  Shinji Nishihara ,  Masashi Sahara ,  Shinichi Ishida ,  Hiromi Abe ,  Sonoko Tohda ,  Hiroyuki Uchiyama ,  Hideaki Tsugane ,  Yoshiaki Yoshiura

IPC分类号： H01L23/52 ,  H01L21/3205 ,  H01L21/60 ,  H01L21/768 ,  H01L23/522 ,  H01L21/4763 ,  H01L21/44

CPC分类号： H01L21/76862 ,  H01L21/32051 ,  H01L21/7684 ,  H01L21/76841 ,  H01L21/76843 ,  H01L21/76849 ,  H01L21/7685 ,  H01L23/53223 ,  H01L23/53266 ,  H01L24/03 ,  H01L24/05 ,  H01L24/11 ,  H01L24/48 ,  H01L2224/02166 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/05082 ,  H01L2224/05083 ,  H01L2224/05124 ,  H01L2224/05166 ,  H01L2224/05184 ,  H01L2224/05187 ,  H01L2224/05624 ,  H01L2224/13099 ,  H01L2224/45144 ,  H01L2224/48463 ,  H01L2224/48624 ,  H01L24/45 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01015 ,  H01L2924/01018 ,  H01L2924/01019 ,  H01L2924/01022 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/0104 ,  H01L2924/0105 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/04941 ,  H01L2924/05042 ,  H01L2924/14

摘要： A method for making a semiconductor integrated circuit device comprises the steps of: (a) depositing a first underlying film made of titanium nitride, on an insulating film having a plurality of through-holes; (b) depositing a tungsten film on the first underlying film, and etching the tungsten film back by means of a fluorine-containing plasma thereby leaving the tungsten film only in the connection holes; (c) sputter etching the surface of the first underlying film to remove the fluorine from the surface of the first underlying film; and (d) forming an aluminium film on the first underlying film. The semiconductor integrated circuit device obtained by the method is also described.

摘要翻译： 一种制造半导体集成电路器件的方法包括以下步骤：（a）在具有多个通孔的绝缘膜上沉积由氮化钛制成的第一底层膜; （b）在第一底层膜上沉积钨膜，并通过含氟等离子体将钨膜回蚀刻，从而将钨膜留在连接孔中; （c）溅射蚀刻第一底层膜的表面以从第一底层膜的表面除去氟; 和（d）在第一底层膜上形成铝膜。 还描述了通过该方法获得的半导体集成电路器件。