Method and apparatus for disposing of fluorine-containing compound by decomposition
    10.
    发明授权
    Method and apparatus for disposing of fluorine-containing compound by decomposition 失效
    通过分解处理含氟化合物的方法和装置

    公开(公告)号:US07294315B1

    公开(公告)日:2007-11-13

    申请号:US09936426

    申请日:1999-06-09

    IPC分类号: B01D53/34

    摘要: Fluorine compounds such as C2F6, CF4, CHF3, SF6 and NF3, are made in contact with a fluorine compound decomposition catalyst and a catalyst the decomposition oft least one of CO, SO2F2 and N2O in the presence of water or in the presence of water and oxygen. The catalyst the decomposition oft least one of CO, SO2F2 and N2O preferably contains at least one selected from Pd, Pt, Cu, Mn, Fe, Co, Rh, Ir and Au in the form of a metal or an oxide. According to the invention, the fluorine compound can be converted to HF, which is liable to be absorbed by water or an alkaline aqueous solution, and a substance, such as CO, SO2F2 and N2O, formed by decomposition of the fluorine compound can also be decomposed.

    摘要翻译: 氟化合物如C 2 F 6,CF 4,CH 3,SF 6, SUB>和NF 3 3与氟化合物分解催化剂和催化剂接触,分解为CO,SO 2/2 / 在水的存在下或在水和氧的存在下,将其与N 2 O 2 O反应。 CO,SO 2 H 2 N 2和N 2 O 2中的至少一种的分解催化剂优选含有选自Pd,Pt, Cu,Mn,Fe,Co,Rh,Ir和Au。 根据本发明,氟化合物可以转化成易于被水或碱性水溶液吸收的HF,以及CO,SO 2 F 2等物质 由氟化合物分解形成的N和N 2 O也可以分解。