公开(公告)号：US06875984B2

公开(公告)日：2005-04-05

申请号：US10621444

申请日：2003-07-18

申请人： Hiroshi Kakibayashi ,  Shigeyuki Hosoki ,  Yuji Takagi ,  Ryo Miyake ,  Kuniyasu Nakamura ,  Mitsugu Sato ,  Hiroyuki Kobayashi

发明人： Hiroshi Kakibayashi ,  Shigeyuki Hosoki ,  Yuji Takagi ,  Ryo Miyake ,  Kuniyasu Nakamura ,  Mitsugu Sato ,  Hiroyuki Kobayashi

IPC分类号： G01N23/04 ,  G01N1/28 ,  G01N23/225 ,  G01N33/483 ,  G01N37/00 ,  H01J37/20 ,  H01J37/22 ,  H01J37/26 ,  H01J37/28 ,  H01J49/44

CPC分类号： H01J37/22 ,  H01J37/26 ,  H01J2237/05 ,  H01J2237/2809 ,  H01J2237/2813

摘要： A bio electron microscope and an observation method which can observe a bio specimen by low damage and high contrast to perform high-accuracy image analysis, and conduct high-throughput specimen preparation. 1) A specimen is observed at an accelerating voltage 1.2 to 4.2 times a critical electron accelerating voltage possible to transmit a specimen obtained under predetermined conditions. 2) An electron energy filter of small and simplified construction is provided between the specimen and an electron detector for imaging by the electron beam in a specified energy region of the electron beams transmitting the specimen. 3) Similarity between an observed image such as virus or protein in the specimen and a reference image such as known virus or protein is subjected to quantitative analysis by image processing. 4) A preparation protocol of the bio specimen is made into a chip using an MEMS technique, which is then mounted on a specimen stage part of an electron microscope to conduct specimen introduction, preparation and transfer onto a specimen holder.

摘要翻译： 一种生物电子显微镜和观察方法，可以通过低损伤和高对比度观察生物样品，进行高精度图像分析，并进行高通量样品制备。 1）在可能传输在预定条件下获得的样品的临界电子加速电压的1.2至4.2倍的加速电压下观察样品。 2）在样品和电子检测器之间提供小而简化结构的电子能过滤器，用于通过电子束在传输样品的电子束的规定能量区域内的电子束进行成像。 3）通过图像处理对样本中的观察图像（例如病毒或蛋白质）与已知病毒或蛋白质等参考图像之间的相似性进行定量分析。 4）使用MEMS技术将生物样品的制备方案制成芯片，然后将其安装在电子显微镜的样品台部分上，以将样品引入，准备和转移到样品架上。

公开(公告)号：US07034299B2

公开(公告)日：2006-04-25

申请号：US10918340

申请日：2004-08-16

申请人： Ryo Nakagaki ,  Yuji Takagi ,  Hirohito Okuda ,  Hiroshi Kakibayashi

发明人： Ryo Nakagaki ,  Yuji Takagi ,  Hirohito Okuda ,  Hiroshi Kakibayashi

IPC分类号： H01J37/26 ,  G01N23/04

CPC分类号： H01J37/222 ,  G01N23/04 ,  G06T7/0012 ,  H01J2237/26

摘要： It is possible to reliably and efficiently determine whether a specimen contains viruses, bacteria, etc. and, if it does, identify their types, regardless of the observer. Furthermore, even a newly-discovered bacterium can be quickly identified by utilizing a database at a remote location. A transmission microscope system has a microscope for observing a specimen and a database which stores, for each microscopic thing (such as a virus), a name, a specimen pretreatment method and an imaging condition used when the microscopic thing is observed, captured image data, etc. An image of the specimen is captured according to a specimen pretreatment method and an imaging condition retrieved from the database using the name of a target microscopic thing as a key, and the captured image is compared with images stored in the database to identify microscopic things present in the specimen.

摘要翻译： 无论观察者如何，都可以可靠而有效地确定样本是否含有病毒，细菌等，如果有，则可以识别其类型。 此外，甚至可以通过利用远程位置的数据库来快速识别新发现的细菌。 透射显微镜系统具有用于观察标本的显微镜和存储针对每个微观事物（例如病毒）的名称，样本预处理方法和观察微观事物时使用的成像条件的数据库，捕获的图像数据 等等。根据样本预处理方法和使用目标微观事物的名称作为关键从数据库检索的成像条件来捕获样本的图像，并将捕获的图像与存储在数据库中的图像进行比较以识别 样品中存在微观物质。

公开(公告)号：US20050051725A1

公开(公告)日：2005-03-10

申请号：US10918340

申请日：2004-08-16

申请人： Ryo Nakagaki ,  Yuji Takagi ,  Hirohito Okuda ,  Hiroshi Kakibayashi

发明人： Ryo Nakagaki ,  Yuji Takagi ,  Hirohito Okuda ,  Hiroshi Kakibayashi

IPC分类号： G01N23/04 ,  G01N33/48 ,  G01N23/00

CPC分类号： H01J37/222 ,  G01N23/04 ,  G06T7/0012 ,  H01J2237/26

摘要： It is possible to reliably and efficiently determine whether a specimen contains viruses, bacteria, etc. and, if it does, identify their types, regardless of the observer. Furthermore, even a newly-discovered bacterium can be quickly identified by utilizing a database at a remote location. A transmission microscope system has a microscope for observing a specimen and a database which stores, for each microscopic thing (such as a virus), a name, a specimen pretreatment method and an imaging condition used when the microscopic thing is observed, captured image data, etc. An image of the specimen is captured according to a specimen pretreatment method and an imaging condition retrieved from the database using the name of a target microscopic thing as a key, and the captured image is compared with images stored in the database to identify microscopic things present in the specimen.

摘要翻译： 无论观察者如何，都可以可靠而有效地确定样本是否含有病毒，细菌等，如果有，则可以识别其类型。 此外，甚至可以通过利用远程位置的数据库来快速识别新发现的细菌。 透射显微镜系统具有用于观察标本的显微镜和存储针对每个微观事物（例如病毒）的名称，样本预处理方法和观察微观事物时使用的成像条件的数据库，捕获的图像数据 等等。根据样本预处理方法和使用目标微观事物的名称作为关键从数据库检索的成像条件来捕获样本的图像，并将捕获的图像与存储在数据库中的图像进行比较以识别 样品中存在微观物质。

公开(公告)号：US09191628B2

公开(公告)日：2015-11-17

申请号：US13699167

申请日：2011-05-18

申请人： Shinya Yamada ,  Yuji Takagi

发明人： Shinya Yamada ,  Yuji Takagi

IPC分类号： G06K9/00 ,  H04N7/18 ,  H01J37/244 ,  H01J37/28 ,  G01N23/00

CPC分类号： H04N7/18 ,  G01B2210/56 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24578

摘要： A technique for calculating the angle from an auxiliary dot sequence indicating the track of a pattern and for performing pattern measurement is provided, thereby enabling achievement of high-accuracy pattern measurement with reduced influence of the roughness of pattern edges.

摘要翻译： 提供了用于从指示图案的轨迹的辅助点序列计算角度并执行图案测量的技术，从而能够以较少的图案边缘粗糙度的影响实现高精度图案测量。

公开(公告)号：US08556547B2

公开(公告)日：2013-10-15

申请号：US13138126

申请日：2010-01-13

申请人： Yuji Takagi ,  Seiichiro Kitaura

发明人： Yuji Takagi ,  Seiichiro Kitaura

IPC分类号： B23C5/10

CPC分类号： B23C5/10 ,  B23C2210/084

摘要： An end mill body wiih a corner cutting edge forming a convex arc shape of which the rotation locus becomes convex toward the tip outer peripheral side is formed at a side ridge portion of the corner cutting edge rake face, a gash is formed on the inner peripheral side of the corner cutting edge rake face, and an end cutting edge connected to the corner cutting edge and extending toward the inner peripheral side is formed at a tip-side side ridge portion of the end cutting edge rake face. An intersection line between the corner cutting edge rake face and the end cutting edge rake face is located closer to the radial inner peripheral side with respect to the axis than the center of the convex arc that the corner cutting edge forms in the rotation locus.

摘要翻译： 在角切削刃前刀面的侧脊部形成端铣刀体，形成在前刀面外周侧形成有凸起的凸弧形状的角刃，在内周面形成有间隙 并且在端部切削刃前刀面的前端侧的隆起部形成有与切削刃连接并向内周侧延伸的端部切削刃。 角切削刃前刀面和端切削刃前刀面之间的交线相对于轴线比径向内周侧更靠近转角轨迹中形成的凸弧的中心。

公开(公告)号：US20130120551A1

公开(公告)日：2013-05-16

申请号：US13699167

申请日：2011-05-18

申请人： Shinya Yamada ,  Yuji Takagi

发明人： Shinya Yamada ,  Yuji Takagi

IPC分类号： H04N7/18

CPC分类号： H04N7/18 ,  G01B2210/56 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24578

摘要： A technique for calculating the angle from an auxiliary dot sequence indicating the track of a pattern and for performing pattern measurement is provided, thereby enabling achievement of high-accuracy pattern measurement with reduced influence of the roughness of pattern edges.

摘要翻译： 提供了用于从指示图案的轨迹的辅助点序列计算角度并执行图案测量的技术，从而能够以较少的图案边缘粗糙度的影响实现高精度图案测量。

公开(公告)号：US08428336B2

公开(公告)日：2013-04-23

申请号：US11431709

申请日：2006-05-11

申请人： Yoko Ikeda ,  Junko Konishi ,  Hisafumi Iwata ,  Yuji Takagi ,  Kenji Obara ,  Ryo Nakagaki ,  Seiji Isogai ,  Yasuhiko Ozawa

发明人： Yoko Ikeda ,  Junko Konishi ,  Hisafumi Iwata ,  Yuji Takagi ,  Kenji Obara ,  Ryo Nakagaki ,  Seiji Isogai ,  Yasuhiko Ozawa

IPC分类号： G06K9/00

CPC分类号： G06F3/0486 ,  G06F2203/04803 ,  G06T7/0004 ,  G06T2200/24 ,  G06T2207/30148

摘要： A method for classifying defects, including: calculating feature quantifies of defect image which is obtained by imaging a defect on a sample; classifying the defect image into a classified category by using information on the calculated feature quantities; displaying the classified defect image in a region on a display screen which is defined to the classified category; adding information on the classified category to the displayed defect image; transferring the displayed defect image which is added the information on the classified category to one of the other categories and displaying the transferred defect image in a region on the display screen which is defined to the one of the other categories; and changing information on the category.

摘要翻译： 一种用于对缺陷进行分类的方法，包括：通过对样品上的缺陷进行成像而获得的缺陷图像的特征量化计算; 通过使用关于计算的特征量的信息将缺陷图像分类成分类的类别; 在分类的类别的显示屏幕上的区域中显示分类的缺陷图像; 将分类类别的信息添加到所显示的缺陷图像; 将所述分类类别中的信息添加到所述其他类别中的所显示的缺陷图像，并且将所传送的缺陷图像显示在所述显示屏幕上定义为所述其他类别之一的区域中; 并更改关于该类别的信息。

公开(公告)号：US20120128230A1

公开(公告)日：2012-05-24

申请号：US13362151

申请日：2012-01-31

申请人： Shunji Maeda ,  Kenji Oka ,  Yukihiro Shibata ,  Minoru Yoshida ,  Chie Shishido ,  Yuji Takagi ,  Atsushi Yoshida ,  Kazuo Yamaguchi

发明人： Shunji Maeda ,  Kenji Oka ,  Yukihiro Shibata ,  Minoru Yoshida ,  Chie Shishido ,  Yuji Takagi ,  Atsushi Yoshida ,  Kazuo Yamaguchi

IPC分类号： G06K9/00

CPC分类号： G06T7/001 ,  G01N21/9501 ,  G01N21/95607 ,  G06T7/0004 ,  G06T2207/30148

摘要： An inspection method, including: illuminating a light on a wafer on which plural chips having identical patterns are formed; imaging corresponding areas of two chips formed on the wafer to obtain inspection images and reference images with an image sensor; and processing the obtained inspection image and the reference image to produce a difference image which indicates a difference between the inspection image and the reference image and detect a defect by comparing the difference image with a threshold, wherein a threshold applied to a difference image which is produced by comparing the inspection image and the reference image obtained by imaging peripheral portion of the wafer is different from a threshold applied to a difference image which is produced by comparing the inspection image and the reference image obtained by imaging central portion of the wafer.

摘要翻译： 一种检查方法，包括：在其上形成有多个具有相同图案的芯片的晶片上照射光; 对形成在晶片上的两个芯片的对应区域进行成像，以获得具有图像传感器的检查图像和参考图像; 并且处理所获得的检查图像和参考图像以产生指示检查图像和参考图像之间的差异的差异图像，并且通过将差异图像与阈值进行比较来检测缺陷，其中应用于差分图像的阈值是 通过比较检查图像和通过对晶片的周边部分进行成像获得的参考图像而产生的参考图像与通过比较检查图像和通过对晶片的中心部分进行成像而获得的参考图像而产生的差分图像的阈值不同。

公开(公告)号：US08086422B2

公开(公告)日：2011-12-27

申请号：US12341657

申请日：2008-12-22

申请人： Hisae Shibuya ,  Yuji Takagi

发明人： Hisae Shibuya ,  Yuji Takagi

IPC分类号： G06F11/00

CPC分类号： G01N21/956 ,  G06T7/0006 ,  G06T7/001 ,  G06T2207/30148

摘要： The distribution states of defects are analyzed on the basis of the coordinates of defects detected by an inspection apparatus to classify them into a distribution feature category, or any one of repetitive defect, congestion defect, linear distribution defect, ring/lump distribution defect and random defect. In the manufacturing process for semiconductor substrates, defect distribution states are analyzed on the basis of defect data detected by an inspection apparatus, thereby specifying the cause of defect in apparatus or process.

摘要翻译： 基于由检查装置检测到的缺陷坐标来分析缺陷的分布状态，将其分类为分布特征类别，或重复缺陷，拥塞缺陷，线性分布缺陷，环/块分布缺陷和随机 缺陷。 在半导体基板的制造工序中，基于由检查装置检测出的缺陷数据来分析缺陷分布状态，从而指定装置或处理中的缺陷的原因。

公开(公告)号：US20110164809A1

公开(公告)日：2011-07-07

申请号：US13049943

申请日：2011-03-17

申请人： Hisae Shibuya ,  Akira Hamamatsu ,  Yuji Takagi

发明人： Hisae Shibuya ,  Akira Hamamatsu ,  Yuji Takagi

IPC分类号： G06K9/00

CPC分类号： G06K9/6221 ,  G01N21/9501 ,  G01N21/95607 ,  G01N2021/8854 ,  G01N2021/95676

摘要： With the objective of achieving defect kind training in a short period of time to teach classification conditions of defects detected as a result of inspecting a thin film device, according to one aspect of the present invention, there is provided a visual inspection method, and an apparatus therefor, comprising the steps of: detecting defects based on inspection images acquired by optical or electronic defect detection means, and at the same time calculating features of the defects; and classifying the defects according to classification conditions set beforehand, wherein said classification condition setting step further includes the steps of: collecting defect features over a large number of defects acquired beforehand from the defect detection step; sampling defects based on the distribution of the collected defect features over the large number of defects; and setting defect classification conditions based on the result of reviewing the sampled defects.

摘要翻译： 为了在短时间内实现缺陷种类训练，目的在于教导检查薄膜装置的检测缺陷的分类条件，根据本发明的一个方面，提供一种目视检查方法， 其装置包括以下步骤：基于由光学或电子缺陷检测装置获取的检查图像检测缺陷，同时计算缺陷的特征; 并根据预先设定的分类条件对缺陷进行分类，其中所述分类条件设置步骤还包括以下步骤：从缺陷检测步骤预先获取的大量缺陷中收集缺陷特征; 基于收集的缺陷特征分布在大量缺陷上的采样缺陷; 并根据检查采样缺陷的结果设置缺陷分类条件。