公开(公告)号：US20120075628A1

公开(公告)日：2012-03-29

申请号：US13306941

申请日：2011-11-29

申请人： Hiroyuki SANO ,  Makoto OKAWAUCHI ,  Kosei OSHIMA ,  Kazuaki OHKUBO ,  Tsutomu MIZUGUCHI ,  Shiro SHIMA

发明人： Hiroyuki SANO ,  Makoto OKAWAUCHI ,  Kosei OSHIMA ,  Kazuaki OHKUBO ,  Tsutomu MIZUGUCHI ,  Shiro SHIMA

IPC分类号： G01J3/28

CPC分类号： G01J3/02 ,  G01J1/0219 ,  G01J3/0232 ,  G01J3/28

摘要： An optical characteristic measurement device includes a photodetector and a processor. The photodetector has a detection surface greater than a light incident surface receiving light from a spectrometer. The processor is configured to obtain a measurement spectrum detected in a first detection area corresponding to the light incident surface and a signal intensity detected in a second detection area different from the light incident surface, correct a pattern prepared in advance and exhibiting a noise characteristic of the photodetector based on the signal intensity to calculate a first correction spectrum, subtract a correction value calculated based on the signal intensity from each component value of the measurement spectrum to calculate a second correction spectrum, and subtract each component value of the first correction spectrum from a corresponding component value of the second correction spectrum to calculate an output spectrum.

摘要翻译： 光学特性测量装置包括光电检测器和处理器。 光电检测器具有大于接收来自光谱仪的光的光入射表面的检测表面。 处理器被配置为获得在与光入射面对应的第一检测区域中检测的测量光谱和在与光入射面不同的第二检测区域中检测的信号强度，校正预先准备的图案，并且显示噪声特性 光电检测器基于信号强度计算第一校正光谱，从每个测量光谱的分量值中减去基于信号强度计算的校正值，以计算第二校正光谱，并将第一校正光谱的每个分量值从 第二校正频谱的相应分量值来计算输出频谱。