METHOD FOR MANUFACTURING A PERIODICALLY-POLED STRUCTURE
    1.
    发明申请
    METHOD FOR MANUFACTURING A PERIODICALLY-POLED STRUCTURE 审中-公开
    制造周期性结构的方法

    公开(公告)号:US20090022903A1

    公开(公告)日:2009-01-22

    申请号:US11814894

    申请日:2006-03-17

    IPC分类号: B29C71/00

    CPC分类号: G02F1/3558

    摘要: The present invention provides a periodically-poled structure with high conversion efficiency and improved manufacturing yield. The method for manufacturing a periodically-poled structure in a second order nonlinear optical crystal having a single domain structure (31) includes the steps of forming a resist pattern (32) which matches a polarization-inverted period on a −Z surface of the second order nonlinear optical crystal (31), and applying voltage to the −Z surface as a negative voltage where the resist pattern (32) is formed, and a +Z surface as a positive voltage so as to apply an electric field in the second order nonlinear optical crystal (31), wherein the second order nonlinear optical crystal (31) contains at least one element as a dopant which compensate for the crystal defects.

    摘要翻译: 本发明提供了具有高转换效率和提高的制造产量的周期性极化结构。 在具有单畴结构(31)的二阶非线性光学晶体中制造周期性极化结构的方法包括以下步骤:形成与第二晶体结构的-Z表面上的偏振反转周期匹配的抗蚀剂图案(32) 并且向-Z面施加电压作为形成抗蚀剂图案(32)的负电压,并且将+ Z表面作为正电压施加电压,以便以第二次施加电场 非线性光学晶体(31),其中二阶非线性光学晶体(31)包含补偿晶体缺陷的至少一种元素作为掺杂剂。