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公开(公告)号:US10989674B2
公开(公告)日:2021-04-27
申请号:US16730901
申请日:2019-12-30
Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION
Inventor: Masaki Tatsumi , Isao Yagi , Haruo Takahashi
IPC: G01N23/083 , H04N5/372 , G01N23/18
Abstract: Provided are an X-ray inspection apparatus and an X-ray inspection method. The X-ray inspection apparatus includes: an X-ray source; a sample moving mechanism; the TDI sensor; and a TDI computing unit. The TDI computing unit includes a data transfer unit configured to transfer, to an outside, data of accumulated charges obtained by accumulating and transferring the charges, and has a function of setting in advance, as a determination region, a plurality of columns of line sensors with which the sample is detectable, and of detecting the sample in the determination region. The data transfer unit is configured to set, as detecting rows, rows of the pixels with which the sample has been detected in the determination region and rows around the rows, and transfer, to the outside, the data of accumulated charges only for pixels in the detecting rows.
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公开(公告)号:US20200284738A1
公开(公告)日:2020-09-10
申请号:US16730901
申请日:2019-12-30
Applicant: Hitachi High-Tech Science Corporation
Inventor: Masaki Tatsumi , Isao Yagi , Haruo Takahashi
IPC: G01N23/083 , G01N23/18 , H04N5/372
Abstract: Provided are an X-ray inspection apparatus and an X-ray inspection method. The X-ray inspection apparatus includes: an X-ray source; a sample moving mechanism; the TDI sensor; and a TDI computing unit. The TDI computing unit includes a data transfer unit configured to transfer, to an outside, data of accumulated charges obtained by accumulating and transferring the charges, and has a function of setting in advance, as a determination region, a plurality of columns of line sensors with which the sample is detectable, and of detecting the sample in the determination region. The data transfer unit is configured to set, as detecting rows, rows of the pixels with which the sample has been detected in the determination region and rows around the rows, and transfer, to the outside, the data of accumulated charges only for pixels in the detecting rows.
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公开(公告)号:US11460417B2
公开(公告)日:2022-10-04
申请号:US17183739
申请日:2021-02-24
Inventor: Shinya Takeshita , Toshiyuki Takahara , Masaki Tatsumi
IPC: G01N23/04 , G01N23/18 , H01M8/04664 , H01M8/1004 , G01N23/083 , G01B15/02 , G01N23/16
Abstract: A method of inspecting a membrane-electrode assembly includes obtaining an X-ray transmission image by applying X-rays to the membrane-electrode assembly, and determining whether a foreign matter having a size equal to or larger than a predetermined value is included in the membrane-electrode assembly, according to a brightness reduction amount in each pixel of the X-ray transmission image obtained, while referring to a correlative relationship between the size of the foreign matter measured in a planar direction of the membrane-electrode assembly, and the brightness reduction amount in the X-ray transmission image.
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公开(公告)号:US20230417691A1
公开(公告)日:2023-12-28
申请号:US18129597
申请日:2023-03-31
Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION
Inventor: Yuki KANAZAWA , Tsuneo Sato , Masaki Tatsumi
IPC: G01N23/223
CPC classification number: G01N23/223 , G01N2223/076
Abstract: With the use of the sample cell, it is possible to control the thickness of a fluid sample to be analyzed. The sample cell includes a sample cell outer frame 107 having openings at both ends, a lower window member 104 configured to close an opening of the sample cell outer frame, a sample cell inner frame 106 having narrower openings at both ends than the openings of the sample cell outer frame, and an upper window member 105 configured to close an opening of the sample cell inner frame, in which at least one of the lower window member and the upper window member is made of a material that transmits X-rays, the sample cell inner frame is inserted into the sample cell outer frame, and a gap between the lower window member and the upper window member is filled with a fluid sample 100.