公开(公告)号：US08404128B1

公开(公告)日：2013-03-26

申请号：US12391095

申请日：2009-02-23

申请人： Hong Zhang ,  Ge Yi ,  Lei Wang ,  Dujiang Wan ,  Guanghong Luo ,  Xiaohai Xiang

发明人： Hong Zhang ,  Ge Yi ,  Lei Wang ,  Dujiang Wan ,  Guanghong Luo ,  Xiaohai Xiang

IPC分类号： G11B5/127

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163 ,  Y10T29/4902 ,  Y10T29/49021 ,  Y10T29/49032 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method and system for providing a magnetic recording transducer having a pole are disclosed. The pole has side(s), a bottom, and a top wider than the bottom. The method and system include providing at least one side gap layer that covers the side(s) and the top of the pole. At least one sacrificial layer is provided on the side gap layer(s). The sacrificial layer(s) are wet etchable and cover the side gap layer(s). The magnetic recording transducer is planarized after the sacrificial layer(s) are provided. Thus, a portion of the side gap and sacrificial layer(s) is removed. A remaining portion of the sacrificial layer(s) is thus left. The method and system also include wet etching the sacrificial layer(s) to remove the remaining portion of the sacrificial layer(s). A wrap around shield is provided after the remaining portion of the sacrificial layer(s) is removed.

摘要翻译： 公开了一种用于提供具有极点的磁记录换能器的方法和系统。 电极具有侧面，底部和顶部比底部更宽。 该方法和系统包括提供覆盖极的侧面和顶部的至少一个侧面间隙层。 在侧间隙层上提供至少一个牺牲层。 牺牲层是可湿蚀刻的并且覆盖侧间隙层。 在提供牺牲层之后，磁记录传感器被平坦化。 因此，侧面间隙和牺牲层的一部分被去除。 因此留下牺牲层的剩余部分。 该方法和系统还包括湿蚀刻牺牲层以去除牺牲层的剩余部分。 在除去牺牲层的剩余部分之后提供环绕护罩。

公开(公告)号：US08191237B1

公开(公告)日：2012-06-05

申请号：US12470385

申请日：2009-05-21

申请人： Guanghong Luo ,  Ge Yi ,  Dujiang Wan ,  Lei Wang ,  Xiaohai Xiang ,  Ming Jiang

发明人： Guanghong Luo ,  Ge Yi ,  Dujiang Wan ,  Lei Wang ,  Xiaohai Xiang ,  Ming Jiang

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for providing a structure in a magnetic transducer is described. The method includes performing a first planarization that exposes a top surface of the magnetic transducer. This first planarization also terminates before a portion of a first planarization buffer layer is removed. The method also includes providing a second planarization buffer layer after the first planarization is performed. The second planarization buffer layer is above the first planarization buffer layer. The method also includes performing a second planarization. This second planarization does not completely remove the second planarization buffer layer. The method also includes performing a third planarization terminating after the first planarization buffer layer is exposed and before the first planarization buffer layer is completely removed.

摘要翻译： 描述了一种用于在磁换能器中提供结构的方法。 该方法包括执行暴露磁换能器的顶表面的第一平面化。 该第一平面化还在第一平坦化缓冲层的一部分被去除之前终止。 该方法还包括在执行第一平面化之后提供第二平坦化缓冲层。 第二平坦化缓冲层在第一平坦化缓冲层之上。 该方法还包括执行第二平面化。 该第二平面化不能完全去除第二平坦化缓冲层。 该方法还包括在第一平坦化缓冲层暴露之后并且在第一平坦化缓冲层被完全去除之前执行终止的第三平坦化。

公开(公告)号：US08413317B1

公开(公告)日：2013-04-09

申请号：US12945681

申请日：2010-11-12

申请人： Dujiang Wan ,  Hai Sun ,  Ge Yi ,  Wei Gao ,  Hong Zhang ,  Guanghong Luo ,  Yunjun Tang ,  Tiffany Yun Wen Jiang ,  Zhigang Zhou ,  Wencheng Su

发明人： Dujiang Wan ,  Hai Sun ,  Ge Yi ,  Wei Gao ,  Hong Zhang ,  Guanghong Luo ,  Yunjun Tang ,  Tiffany Yun Wen Jiang ,  Zhigang Zhou ,  Wencheng Su

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3163 ,  G11B2005/0021 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method and system for fabricating a microelectric device are described. A write pole of an energy assisted magnetic recording head or a capacitor might be fabricated. The method includes depositing a resist film and curing the resist film at a temperature of at least 180 degrees centigrade. A cured resist film capable of supporting a line having an aspect ratio of at least ten is thus provided. A portion of the cured resist film is removed. A remaining portion of the resist film forms the line. An insulating or nonmagnetic layer is deposited after formation of the line. The line is removed to provide a trench in the insulating or nonmagnetic layer. The trench has a height and a width. The height divided by the width corresponds to the aspect ratio. At least part of the structure is provided in the trench.

摘要翻译： 描述了一种用于制造微电子器件的方法和系统。 可以制造能量辅助磁记录头或电容器的写极。 该方法包括在至少180摄氏度的温度下沉积抗蚀剂膜并固化抗蚀剂膜。 因此提供了能够支撑纵横比至少为10的线的固化的抗蚀剂膜。 去除一部分固化的抗蚀剂膜。 抗蚀剂膜的剩余部分形成线。 在形成线之后沉积绝缘或非磁性层。 去除线以在绝缘或非磁性层中提供沟槽。 沟槽具有高度和宽度。 高度除以宽度对应于纵横比。 该结构的至少一部分设置在沟槽中。

公开(公告)号：US08846534B1

公开(公告)日：2014-09-30

申请号：US13269453

申请日：2011-10-07

申请人： Yunfei Li ,  Ge Yi ,  Dujiang Wan ,  Guanghong Luo ,  Lijie Zhao ,  Yanfeng Chen ,  Lily Yao ,  Ming Jiang

发明人： Yunfei Li ,  Ge Yi ,  Dujiang Wan ,  Guanghong Luo ,  Lijie Zhao ,  Yanfeng Chen ,  Lily Yao ,  Ming Jiang

IPC分类号： H01L21/302

CPC分类号： G11B5/3163

摘要： Embodiments of the present invention relate to reducing the size variation on a wafer fabrication. In some embodiments, at least a portion the backfill material over features larger than a threshold size is etched or milled to provide backfill protrusions over those features. The backfill protrusions are configured to reduce the size variation across the fabrication. Embodiments of the invention may be used in fabrication of many types of devices, such as tapered wave guides (TWG), near-field transducers (NFT), MEMS devices, EAMR optical devices, optical structures, bio-optical devices, micro-fluidic devices, and magnetic writers.

摘要翻译： 本发明的实施例涉及减小晶片制造的尺寸变化。 在一些实施例中，至少一部分覆盖材料超过阈值尺寸的特征被蚀刻或研磨以在这些特征上提供回填突起。 回填突起构造成减小制造过程中的尺寸变化。 本发明的实施例可用于制造诸如锥形波导（TWG），近场换能器（NFT），MEMS装置，EAMR光学装置，光学结构，生物光学装置，微流体 设备和磁性作者。

公开(公告)号：US08506828B1

公开(公告)日：2013-08-13

申请号：US13171242

申请日：2011-06-28

申请人： Masahiro Osugi ,  Guanghong Luo ,  Ronghui Zhou ,  Danning Yang ,  Dujiang Wan ,  Ming Jiang

发明人： Masahiro Osugi ,  Guanghong Luo ,  Ronghui Zhou ,  Danning Yang ,  Dujiang Wan ,  Ming Jiang

IPC分类号： B44C1/22

CPC分类号： G11B5/3932 ,  G11B5/3163 ,  G11B5/3909 ,  Y10T29/49043

摘要： A method and system for fabricating a read sensor on a substrate for a read transducer is described. A read sensor stack is deposited on the substrate. A mask is provided on the on the read sensor stack. The mask has a pattern that covers a first portion of the read sensor stack corresponding to the read sensor, covers a second portion of the read sensor stack distal from the read sensor, and exposes a third portion of the read sensor stack between the first and second portions. The read sensor is defined from the read sensor stack. A hard bias layer is deposited. An aperture free mask layer including multiple thicknesses is provided. A focused ion beam scan (FIBS) polishing step is performed on the mask and hard bias layers to remove a portion of the mask and hard bias layers based on the thicknesses.

摘要翻译： 描述了用于在读取换能器的基板上制造读取传感器的方法和系统。 读取传感器堆叠沉积在衬底上。 在读取传感器堆叠上提供掩模。 掩模具有覆盖对应于读取传感器的读取传感器堆叠的第一部分的图案，其覆盖远离读取传感器的读取传感器堆叠的第二部分，并将读取传感器堆叠的第三部分暴露在第一和第 第二部分。 读取传感器由读取传感器堆栈定义。 沉积硬偏压层。 提供包括多个厚度的无孔掩模层。 在掩模和硬偏压层上执行聚焦离子束扫描（FIBS）抛光步骤，以基于厚度去除掩模和硬偏压层的一部分。

公开(公告)号：US08375564B1

公开(公告)日：2013-02-19

申请号：US12633562

申请日：2009-12-08

申请人： Guanghong Luo ,  Danning Yang ,  Weimin Si ,  Dujiang Wan ,  Yun-Fei Li ,  Lijie Guan ,  Ming Jiang

发明人： Guanghong Luo ,  Danning Yang ,  Weimin Si ,  Dujiang Wan ,  Yun-Fei Li ,  Lijie Guan ,  Ming Jiang

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method provides a pole of magnetic recording transducer. A nonmagnetic stop layer having a thickness and a top surface is provided. A depression that forms a bevel is provided in the stop layer. The bevel has a depth less than the thickness and a bevel angle with respect to a remaining portion of the top surface. The bevel angle is greater than zero and less than ninety degrees. An intermediate layer having a substantially flat top surface is provided over the stop layer. A trench is formed in the intermediate layer via a removal process. The trench has a profile corresponding to the pole. The stop layer is a stop for the removal process. The method also includes providing the pole in the trench. The pole has a leading edge bevel corresponding to the bevel in the stop layer.

摘要翻译： 一种方法提供磁记录传感器的极点。 提供具有厚度和顶表面的非磁性停止层。 形成斜面的凹陷设置在停止层中。 该斜面具有小于该厚度的深度和相对于顶部表面的剩余部分的斜角。 斜角大于零，小于九十度。 具有基本上平坦的顶表面的中间层设置在停止层上。 通过去除工艺在中间层中形成沟槽。 沟槽具有对应于极点的轮廓。 停止层是移除过程的停止点。 该方法还包括在沟槽中设置极点。 极具有对应于停止层中的斜面的前缘斜面。

公开(公告)号：US08322022B1

公开(公告)日：2012-12-04

申请号：US12825098

申请日：2010-06-28

申请人： Ge Yi ,  Hongxing Yuan ,  Ming Sun ,  Dujiang Wan

发明人： Ge Yi ,  Hongxing Yuan ,  Ming Sun ,  Dujiang Wan

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3173 ,  G11B5/314 ,  G11B2005/0021 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49083

摘要： A method for providing energy assisted magnetic recording (EAMR) heads is described. The method comprises bonding a plurality of lasers to a first substrate. The plurality of lasers corresponds to the plurality of EAMR heads and is for providing energy to a plurality of EAMR transducers. The method further comprises fabricating the plurality of EAMR transducers for the plurality of EAMR heads on a second substrate, bonding the first substrate to the second substrate such that the plurality of EAMR transducers and the plurality of lasers reside between the first substrate and the second substrate, removing at least one of the first substrate and the second substrate, and separating a remaining substrate into the plurality of EAMR heads.

摘要翻译： 描述了一种用于提供能量辅助磁记录（EAMR）头的方法。 该方法包括将多个激光器接合到第一基板。 多个激光器对应于多个EAMR头，并且用于向多个EAMR换能器提供能量。 该方法还包括在第二衬底上制造用于多个EAMR头的多个EAMR换能器，将第一衬底结合到第二衬底，使得多个EAMR换能器和多个激光器位于第一衬底和第二衬底之间 去除所述第一衬底和所述第二衬底中的至少一个，以及将剩余衬底分离成所述多个EAMR头。

公开(公告)号：US09412252B2

公开(公告)日：2016-08-09

申请号：US14161695

申请日：2014-01-23

申请人： Ge Yi ,  Dujiang Wan

发明人： Ge Yi ,  Dujiang Wan

IPC分类号： G08B21/04 ,  H01H35/14 ,  G01P15/135 ,  A61B5/11 ,  G08B25/08 ,  G08B25/10

CPC分类号： G08B21/0446 ,  A61B5/1116 ,  A61B5/1117 ,  G01P15/135 ,  G08B25/08 ,  G08B25/10 ,  H01H35/14

摘要： A universal fall detect system and its unique designed sensor as well as methodology to detect the fall event are disclosed. The fall event is detected by measuring relative position, and/or orientation between host body and direction of gravity at the spot where falling event happens. The system can present either as a standalone system or a built-in component with supporting software installed on other devices. The system linked to wide network and wide audience can trigger several emergency response and assistances if needed in time when a falling event happens.

摘要翻译： 公开了通用跌落检测系统及其独特的设计传感器以及检测坠落事件的方法。 通过在下降事件发生的地点测量主体与主体与重力方向之间的相对位置和/或方向来检测坠落事件。 该系统可以作为独立系统或内置组件提供其他设备上安装的支持软件。 与广泛的网络和广泛的受众相关联的系统可以在发生下降事件的时候触发几个紧急响应和协助。

公开(公告)号：US09278696B2

公开(公告)日：2016-03-08

申请号：US14304913

申请日：2014-06-14

申请人： Ge Yi ,  Dujiang Wan

发明人： Ge Yi ,  Dujiang Wan

IPC分类号： G08B23/00 ,  B60W40/08 ,  A61B5/18 ,  B60K28/06

CPC分类号： B60W40/08 ,  A61B5/097 ,  A61B5/117 ,  A61B5/18 ,  B60K28/06 ,  B60K28/063 ,  B60W2040/0836

摘要： Vehicle onboard safety systems against deception during driving-under-influence (DUI) test, using cheiloscopy sensor or bite mark sensor as biometrics have been invented. The systems have an engine interlock system, which controls the engine ignition based on the onboard DUI testing result. The systems also have a smart phone locker designed to take the smart phone away from the driver in order to avoid any driving distraction, while allowing connection to external network and resource through tethering.

摘要翻译： 已经发明了使用车辙检测传感器或咬合标记传感器作为生物识别技术的驾驶 - 影响下驾驶（DUI）测试中的车辆安全系统。 该系统具有发动机联锁系统，其根据车载DUI测试结果控制发动机点火。 这些系统还有一个智能手机储物柜，旨在将智能手机远离驾驶员，以避免任何驾驶分心，同时允许通过系链连接到外部网络和资源。

公开(公告)号：US20150228177A1

公开(公告)日：2015-08-13

申请号：US14174847

申请日：2014-02-07

申请人： Ge Yi ,  Dujiang Wan

发明人： Ge Yi ,  Dujiang Wan

IPC分类号： G08B21/04

CPC分类号： G08B21/0446 ,  A61B5/1117 ,  G01P15/036 ,  G01P15/08 ,  G01P15/105 ,  G01P15/125 ,  G08B13/10 ,  G08B21/043 ,  G08B29/183

摘要： Fall detection method and systems with its unique designed sensors are disclosed. The capacitive sensing based systems use the abrupt changes of the capacitance value to detect whether a real fall event happens, while the reed sensor/or reed switch based systems work in power saving passive mode to detect the real fall event by analyzing the binary “on/off” signal available from the reed sensor/or reed switch. Both rely on the orientation change of the host body respects to local gravity direction during the falling process. The system can present either as a standalone system or a built-in component with supporting software installed on other devices.

摘要翻译： 公开了具有独特设计传感器的跌落检测方法和系统。 基于电容感测的系统使用电容值的突然变化来检测是否发生真实的下降事件，而基于簧片传感器/或簧片开关的系统工作在省电被动模式中以通过分析二进制“on /关闭“信号可从簧片传感器/或舌簧开关。 在下降过程中，两者均依赖于主体方位向局部重力方向的变化。 该系统可以作为独立系统或内置组件，其他设备上安装有支持软件。