公开(公告)号：US3921572A

公开(公告)日：1975-11-25

申请号：US44519974

申请日：1974-02-25

Applicant: IBM

Inventor： BRUNNER ROLF H ,  CARBONE QUIEDO J ,  LESTER WILLIAM C

IPC: C23C14/24 ,  C23C14/56 ,  H01L21/285 ,  C23C13/08

CPC classification number: C23C14/56

Abstract: Vacuum coating apparatus having isolatable coating and vacuum chambers whose volumes are correlated to each other to minimize contamination and pump-down time, with the coating chamber having a closure means mounting a substrate holder for positioning substrates in an evaporant stream from a vapor source contained in the vacuum chamber.

Abstract translation: 具有可分离的涂层和真空室的真空涂布装置，其体积彼此相关，以最小化污染和抽空时间，涂覆室具有封闭装置，该封闭装置安装用于将基板定位在蒸发源中的封闭装置， 真空室。