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公开(公告)号:US20140292323A1
公开(公告)日:2014-10-02
申请号:US14228090
申请日:2014-03-27
IPC分类号: G01R33/028 , G06F17/50
CPC分类号: G01R33/0286 , G01R15/245 , G01R33/0005 , G01R33/028 , G01R33/0283 , G01V3/087 , G01V3/40 , G06F17/5086
摘要: A two-axes MEMS magnetometer includes, in one plane, a freestanding rectangular frame having inner walls and four torsion springs, wherein opposing inner walls of the frame are contacted by one end of only two torsion springs, each torsion spring being anchored by its other end, towards the centre of the frame, to a substrate. In operation, the magnetometer measures the magnetic field in two orthogonal sensing modes using differential capacitance measurements.
摘要翻译: 双轴MEMS磁力仪在一个平面中包括具有内壁和四个扭转弹簧的独立的矩形框架,其中框架的相对的内壁与仅两个扭转弹簧的一端接触,每个扭转弹簧由其另一个 朝向框架的中心延伸到基板。 在操作中,磁力计使用差分电容测量来测量两个正交感测模式中的磁场。
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公开(公告)号:US09594128B2
公开(公告)日:2017-03-14
申请号:US14228090
申请日:2014-03-27
CPC分类号: G01R33/0286 , G01R15/245 , G01R33/0005 , G01R33/028 , G01R33/0283 , G01V3/087 , G01V3/40 , G06F17/5086
摘要: A two-axes MEMS magnetometer includes, in one plane, a freestanding rectangular frame having inner walls and four torsion springs, wherein opposing inner walls of the frame are contacted by one end of only two torsion springs, each torsion spring being anchored by its other end, towards the center of the frame, to a substrate. In operation, the magnetometer measures the magnetic field in two orthogonal sensing modes using differential capacitance measurements.
摘要翻译: 双轴MEMS磁力仪在一个平面中包括具有内壁和四个扭转弹簧的独立的矩形框架,其中框架的相对的内壁与仅两个扭转弹簧的一端接触,每个扭转弹簧由其另一个 朝向框架的中心延伸到基板。 在操作中,磁力计使用差分电容测量来测量两个正交感测模式中的磁场。
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