Force sensing device and a force sensing system

    公开(公告)号:US10775254B2

    公开(公告)日:2020-09-15

    申请号:US16006835

    申请日:2018-06-12

    申请人: IMEC VZW

    IPC分类号: G01L11/02 G01L13/02

    摘要: A force sensing device comprises: a membrane (120), which is configured to deform upon receiving a force; a first Mach Zehnder-type interferometer device (110); a second Mach Zehnder-type interferometer device (130), wherein a first measurement propagation path (114) of the first Mach Zehnder-type interferometer device (110) and a second measurement propagation path (134) of the second Mach Zehnder-type interferometer device (130) are arranged on or in the membrane (120), and wherein the first measurement propagation path (114) and the second measurement propagation path (134) are differently sensitive to applied force on the membrane (120).

    Light coupler with microstructures asymmetrically distributed along longitudinal axis

    公开(公告)号:US10564362B2

    公开(公告)日:2020-02-18

    申请号:US15538926

    申请日:2015-12-28

    申请人: IMEC VZW

    摘要: Embodiments described herein relate to a light coupler, a photonic integrated circuit, and a method for manufacturing a light coupler. The light coupler is for optically coupling to an integrated waveguide and for out-coupling a light signal propagating in the integrated waveguide into free space. The light coupler includes a plurality of microstructures. The plurality of microstructures is adapted in shape and position to compensate decay of the light signal when propagating in the light coupler. The plurality of microstructures is also adapted in shape and position to provide a power distribution of the light signal when coupled into free space such that the power distribution corresponds to a predetermined target power distribution. Each of the microstructures forms an optical scattering center. The microstructures are positioned on the light coupler in accordance with a non-uniform number density distribution.

    Devices and methods for generation and detection of spin waves

    公开(公告)号:US10211809B2

    公开(公告)日:2019-02-19

    申请号:US15143228

    申请日:2016-04-29

    申请人: IMEC VZW

    摘要: The disclosed technology generally relates to semiconductor devices, and more particularly to a device configured as one or both of a spin wave generator or a spin wave detector. In one aspect, the device includes a magnetostrictive film and a deformation film physically connected to the magnetorestrictive film. The device also includes an acoustic isolation surrounding the magnetostrictive film and the deformation film to form an acoustic resonator. When the device is configured as the spin wave generator, the deformation film is configured to undergo a change physical dimensions in response to an actuation, where the change in the physical dimensions of the deformation film induces a mechanical stress in the magnetostrictive film to cause a change in the magnetization of the magnetostrictive film. When the device is configured as the spin wave detector, the magnetostrictive film is configured to undergo to a change in physical dimensions in response to a change in magnetization, wherein the change in the physical dimensions of the magnetostrictive film induces a mechanical stress in the deformation film to cause generation of electrical power by the deformation film.

    Calibration of Micro-Mirror Arrays
    7.
    发明申请
    Calibration of Micro-Mirror Arrays 有权
    微镜阵列校准

    公开(公告)号:US20130187669A1

    公开(公告)日:2013-07-25

    申请号:US13746149

    申请日:2013-01-21

    申请人: IMEC

    IPC分类号: G02B27/00

    摘要: A built-in self-calibration system and method for a micro-mirror array device, for example, operating as a variable focal length lens is described. The calibration method comprises determining a capacitance value for each micro-mirror element in the array device at a number of predetermined reference angles to provide a capacitance-reference angle relationship. From the capacitance values, an interpolation step is carried to determine intermediate tilt angles for each micro-mirror element in the array. A voltage sweep is applied to the micro-mirror array and capacitance values, for each micro-mirror element in the array, are measured. For a capacitance value that matches one of the values in the capacitance-reference angle relationship, the corresponding voltage is linked to the associated tilt angle to provide a voltage-tilt angle characteristic which then stored in a memory for subsequent use.

    摘要翻译: 描述了用作微反射镜阵列器件的内置自校准系统和方法,例如作为可变焦距透镜操作。 校准方法包括以多个预定参考角度确定阵列器件中的每个微镜元件的电容值,以提供电容参考角度关系。 根据电容值,进行插值步骤以确定阵列中的每个微镜元件的中间倾斜角度。 对微镜阵列施加电压扫描,并测量阵列中每个微镜元件的电容值。 对于与电容参考角度关系中的一个值匹配的电容值,相应的电压与相关联的倾斜角度相关联,以提供电压倾斜角特性,然后将其存储在存储器中用于随后的使用。

    OPTICAL SYSTEM AND CORRESPONDING OPTICAL METHOD

    公开(公告)号:US20220350040A1

    公开(公告)日:2022-11-03

    申请号:US17661251

    申请日:2022-04-28

    申请人: IMEC vzw

    IPC分类号: G01T1/24 G02B6/42

    摘要: In one aspect, an optical system is disclosed. In some embodiments, the optical system includes an optical waveguide, and at least two coupling means forming at least one confocal point being located within the optical waveguide, where a first coupling means of the at least two coupling means has a first focal length, and a second coupling means of the at least two coupling means has a second focal length. In some examples, the first coupling means is configured to couple and/or focus incident light to the optical waveguide, and the second coupling means is configured to emit and/or collimate light conveyed by the optical waveguide.

    TAPE BASED STORAGE DEVICE
    9.
    发明申请

    公开(公告)号:US20220223175A1

    公开(公告)日:2022-07-14

    申请号:US17645107

    申请日:2021-12-20

    申请人: IMEC vzw

    IPC分类号: G11B5/008 G11B5/127

    摘要: A storage device configured to store data on a tape is provided. In one aspect, the storage device includes the tape, which is configured to store data, and a data head, which is configured to read and/or write data from and/or to the tape. The storage device further includes an actuator configured to move the tape in a length direction in a step-wise manner. The actuator can include a plurality of pulling electrodes, wherein each pulling electrode can be activated to exert a pulling force on the tape, and a plurality of clamping electrodes, wherein each clamping electrode can be activated to clamp the tape.

    Integrated photonic device for modulating the phase of a light signal

    公开(公告)号:US10520677B2

    公开(公告)日:2019-12-31

    申请号:US16231452

    申请日:2018-12-22

    申请人: IMEC VZW

    IPC分类号: G02B6/35 G02B6/34 G02B6/12

    摘要: An integrated photonic device comprises: an input waveguide configured to extend in an input plane, and an output waveguide configured to extend in an output plane, wherein the output plane is parallel to or contained within the input plane; an input coupler optically coupled to the input waveguide, wherein the input coupler is configured to redirect a light signal out of the input waveguide and the input plane; a light property modifier configured to receive the light signal from the input coupler and reflect the light signal towards the output plane, wherein the light property modifier is configured to selectively adjust an optical path length of the light signal; and an output coupler optically coupled to the output waveguide, wherein the output coupler is configured to receive the reflected light signal from the light property modifier and redirect the light signal into the output waveguide and the output plane.