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公开(公告)号:US20140292323A1
公开(公告)日:2014-10-02
申请号:US14228090
申请日:2014-03-27
IPC分类号: G01R33/028 , G06F17/50
CPC分类号: G01R33/0286 , G01R15/245 , G01R33/0005 , G01R33/028 , G01R33/0283 , G01V3/087 , G01V3/40 , G06F17/5086
摘要: A two-axes MEMS magnetometer includes, in one plane, a freestanding rectangular frame having inner walls and four torsion springs, wherein opposing inner walls of the frame are contacted by one end of only two torsion springs, each torsion spring being anchored by its other end, towards the centre of the frame, to a substrate. In operation, the magnetometer measures the magnetic field in two orthogonal sensing modes using differential capacitance measurements.
摘要翻译: 双轴MEMS磁力仪在一个平面中包括具有内壁和四个扭转弹簧的独立的矩形框架,其中框架的相对的内壁与仅两个扭转弹簧的一端接触,每个扭转弹簧由其另一个 朝向框架的中心延伸到基板。 在操作中,磁力计使用差分电容测量来测量两个正交感测模式中的磁场。
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公开(公告)号:US09594128B2
公开(公告)日:2017-03-14
申请号:US14228090
申请日:2014-03-27
CPC分类号: G01R33/0286 , G01R15/245 , G01R33/0005 , G01R33/028 , G01R33/0283 , G01V3/087 , G01V3/40 , G06F17/5086
摘要: A two-axes MEMS magnetometer includes, in one plane, a freestanding rectangular frame having inner walls and four torsion springs, wherein opposing inner walls of the frame are contacted by one end of only two torsion springs, each torsion spring being anchored by its other end, towards the center of the frame, to a substrate. In operation, the magnetometer measures the magnetic field in two orthogonal sensing modes using differential capacitance measurements.
摘要翻译: 双轴MEMS磁力仪在一个平面中包括具有内壁和四个扭转弹簧的独立的矩形框架,其中框架的相对的内壁与仅两个扭转弹簧的一端接触,每个扭转弹簧由其另一个 朝向框架的中心延伸到基板。 在操作中,磁力计使用差分电容测量来测量两个正交感测模式中的磁场。
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公开(公告)号:US10775254B2
公开(公告)日:2020-09-15
申请号:US16006835
申请日:2018-06-12
申请人: IMEC VZW
摘要: A force sensing device comprises: a membrane (120), which is configured to deform upon receiving a force; a first Mach Zehnder-type interferometer device (110); a second Mach Zehnder-type interferometer device (130), wherein a first measurement propagation path (114) of the first Mach Zehnder-type interferometer device (110) and a second measurement propagation path (134) of the second Mach Zehnder-type interferometer device (130) are arranged on or in the membrane (120), and wherein the first measurement propagation path (114) and the second measurement propagation path (134) are differently sensitive to applied force on the membrane (120).
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公开(公告)号:US10564362B2
公开(公告)日:2020-02-18
申请号:US15538926
申请日:2015-12-28
申请人: IMEC VZW
发明人: Xavier Rottenberg , Tom Claes , Dries Vercruysse
摘要: Embodiments described herein relate to a light coupler, a photonic integrated circuit, and a method for manufacturing a light coupler. The light coupler is for optically coupling to an integrated waveguide and for out-coupling a light signal propagating in the integrated waveguide into free space. The light coupler includes a plurality of microstructures. The plurality of microstructures is adapted in shape and position to compensate decay of the light signal when propagating in the light coupler. The plurality of microstructures is also adapted in shape and position to provide a power distribution of the light signal when coupled into free space such that the power distribution corresponds to a predetermined target power distribution. Each of the microstructures forms an optical scattering center. The microstructures are positioned on the light coupler in accordance with a non-uniform number density distribution.
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公开(公告)号:US10211809B2
公开(公告)日:2019-02-19
申请号:US15143228
申请日:2016-04-29
申请人: IMEC VZW
IPC分类号: G01B7/14 , H03H9/22 , H01L41/00 , H01L41/12 , G01B7/24 , G01R33/12 , H03H9/17 , H03H9/24 , G01R33/18 , H03B15/00 , H01F10/12 , H01F10/14 , B82Y25/00
摘要: The disclosed technology generally relates to semiconductor devices, and more particularly to a device configured as one or both of a spin wave generator or a spin wave detector. In one aspect, the device includes a magnetostrictive film and a deformation film physically connected to the magnetorestrictive film. The device also includes an acoustic isolation surrounding the magnetostrictive film and the deformation film to form an acoustic resonator. When the device is configured as the spin wave generator, the deformation film is configured to undergo a change physical dimensions in response to an actuation, where the change in the physical dimensions of the deformation film induces a mechanical stress in the magnetostrictive film to cause a change in the magnetization of the magnetostrictive film. When the device is configured as the spin wave detector, the magnetostrictive film is configured to undergo to a change in physical dimensions in response to a change in magnetization, wherein the change in the physical dimensions of the magnetostrictive film induces a mechanical stress in the deformation film to cause generation of electrical power by the deformation film.
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公开(公告)号:US20180164214A1
公开(公告)日:2018-06-14
申请号:US15580265
申请日:2016-06-30
申请人: IMEC VZW
发明人: Xavier Rottenberg
CPC分类号: G01N21/59 , B01L3/502715 , B01L2300/0816 , B01L2400/0406 , B01L2400/0457 , B01L2400/0487 , G01N21/31 , G01N21/3577 , G01N21/552 , G01N21/61 , G01N21/7746 , G01N2021/0346 , G01N2021/3137 , G01N2021/3166 , G01N2021/3181 , G01N2201/062 , G01N2201/0633 , G01N2201/0636 , G01N2201/066 , G01N2201/0873
摘要: The present disclosure relates to a device for measuring an optical absorption property of a fluid as function of wavelength. The device comprises a broadband light source for emitting light, a plurality of integrated optical waveguides for guiding this light, and a light coupler for coupling the emitted light into the integrated optical waveguides such that the light coupled into each integrated optical waveguide has substantially the same spectral distribution. The device also comprises a microfluidic channel for containing the fluid, arranged such as to allow an interaction of the light propagating through each waveguide with the fluid in the microfluidic channel. Each integrated optical waveguide comprises an optical resonator for filtering the light guided by the waveguide according to a predetermined spectral component. The spectral component corresponding to each waveguide is substantially different from the spectral component corresponding to another of the waveguides.
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公开(公告)号:US20130187669A1
公开(公告)日:2013-07-25
申请号:US13746149
申请日:2013-01-21
申请人: IMEC
发明人: Murali Jayapala , Geert Van Der Plas , Veronique Rochus , Xavier Rottenberg , Simone Severi , Stéphane Donnay
IPC分类号: G02B27/00
CPC分类号: G02B27/00 , G02B1/00 , G02B6/352 , G02B6/359 , G02B26/0825 , G02B26/0841 , G02B2207/00 , H04N1/00
摘要: A built-in self-calibration system and method for a micro-mirror array device, for example, operating as a variable focal length lens is described. The calibration method comprises determining a capacitance value for each micro-mirror element in the array device at a number of predetermined reference angles to provide a capacitance-reference angle relationship. From the capacitance values, an interpolation step is carried to determine intermediate tilt angles for each micro-mirror element in the array. A voltage sweep is applied to the micro-mirror array and capacitance values, for each micro-mirror element in the array, are measured. For a capacitance value that matches one of the values in the capacitance-reference angle relationship, the corresponding voltage is linked to the associated tilt angle to provide a voltage-tilt angle characteristic which then stored in a memory for subsequent use.
摘要翻译: 描述了用作微反射镜阵列器件的内置自校准系统和方法,例如作为可变焦距透镜操作。 校准方法包括以多个预定参考角度确定阵列器件中的每个微镜元件的电容值,以提供电容参考角度关系。 根据电容值,进行插值步骤以确定阵列中的每个微镜元件的中间倾斜角度。 对微镜阵列施加电压扫描,并测量阵列中每个微镜元件的电容值。 对于与电容参考角度关系中的一个值匹配的电容值,相应的电压与相关联的倾斜角度相关联,以提供电压倾斜角特性,然后将其存储在存储器中用于随后的使用。
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公开(公告)号:US20220350040A1
公开(公告)日:2022-11-03
申请号:US17661251
申请日:2022-04-28
申请人: IMEC vzw
发明人: Jiwon Lee , Xavier Rottenberg , Murali Jayapala
摘要: In one aspect, an optical system is disclosed. In some embodiments, the optical system includes an optical waveguide, and at least two coupling means forming at least one confocal point being located within the optical waveguide, where a first coupling means of the at least two coupling means has a first focal length, and a second coupling means of the at least two coupling means has a second focal length. In some examples, the first coupling means is configured to couple and/or focus incident light to the optical waveguide, and the second coupling means is configured to emit and/or collimate light conveyed by the optical waveguide.
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公开(公告)号:US20220223175A1
公开(公告)日:2022-07-14
申请号:US17645107
申请日:2021-12-20
申请人: IMEC vzw
摘要: A storage device configured to store data on a tape is provided. In one aspect, the storage device includes the tape, which is configured to store data, and a data head, which is configured to read and/or write data from and/or to the tape. The storage device further includes an actuator configured to move the tape in a length direction in a step-wise manner. The actuator can include a plurality of pulling electrodes, wherein each pulling electrode can be activated to exert a pulling force on the tape, and a plurality of clamping electrodes, wherein each clamping electrode can be activated to clamp the tape.
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公开(公告)号:US10520677B2
公开(公告)日:2019-12-31
申请号:US16231452
申请日:2018-12-22
申请人: IMEC VZW
摘要: An integrated photonic device comprises: an input waveguide configured to extend in an input plane, and an output waveguide configured to extend in an output plane, wherein the output plane is parallel to or contained within the input plane; an input coupler optically coupled to the input waveguide, wherein the input coupler is configured to redirect a light signal out of the input waveguide and the input plane; a light property modifier configured to receive the light signal from the input coupler and reflect the light signal towards the output plane, wherein the light property modifier is configured to selectively adjust an optical path length of the light signal; and an output coupler optically coupled to the output waveguide, wherein the output coupler is configured to receive the reflected light signal from the light property modifier and redirect the light signal into the output waveguide and the output plane.
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