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公开(公告)号：US11408764B2
公开(公告)日：2022-08-09
申请号：US16703657
申请日：2019-12-04
摘要： A sensor comprises: a thin structure, which is configured to receive a force for deforming a shape of the thin structure and which is arranged above a substrate; and a waveguide for guiding an electro-magnetic wave comprising: a first waveguide part; and a second waveguide part; wherein the second waveguide part has a larger width than the first waveguide part; and wherein the first and the second waveguide parts are spaced apart by a gap which is sufficiently small such that the first and second waveguide parts unitely form a single waveguide, wherein one of the first and the second waveguide part is arranged at least partly on the thin structure and another of the first and the second waveguide part is arranged on the substrate.
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公开(公告)号：US11531418B2
公开(公告)日：2022-12-20
申请号：US17104844
申请日：2020-11-25
申请人： IMEC VZW
摘要： A phased array ultrasound device includes transducer elements arranged in a two dimensional array; first electrodes, each first electrode extending along a first direction; and second electrodes, each second electrode extending along a second direction, where each transducer element is associated with one first electrode and one second electrode, where each transducer element includes a material located between its associated first electrode and second electrode, and is configured to emit an ultrasonic wave induced by a vibration force or an oscillation force of its material when the transducer element is actuated based on control signals applied to its associated first electrode and second electrode, where each transducer element has a unipolar actuation force direction, and where the phased array ultrasound device is configured to create a pressure focus point by actuating a set of transducer elements to form a combined ultrasonic wave.
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公开(公告)号：US20220223175A1
公开(公告)日：2022-07-14
申请号：US17645107
申请日：2021-12-20
申请人： IMEC vzw
摘要： A storage device configured to store data on a tape is provided. In one aspect, the storage device includes the tape, which is configured to store data, and a data head, which is configured to read and/or write data from and/or to the tape. The storage device further includes an actuator configured to move the tape in a length direction in a step-wise manner. The actuator can include a plurality of pulling electrodes, wherein each pulling electrode can be activated to exert a pulling force on the tape, and a plurality of clamping electrodes, wherein each clamping electrode can be activated to clamp the tape.
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公开(公告)号：US20200158506A1
公开(公告)日：2020-05-21
申请号：US16690667
申请日：2019-11-21
申请人： IMEC VZW
发明人： Veronique Rochus , Roelof Jansen , Benedetto Troia
IPC分类号： G01C19/66
摘要： An optical gyroscope and a method for measuring an angular velocity of rotation are described. A closed-path optical cavity is configured for receiving at least a first optical signal circulating as at least one cavity mode of pre-determined orientation (inside the optical cavity. An extractor in optical communication with the optical cavity is configured for extracting a fraction of at least the circulating first optical signal from the optical cavity, wherein an amplitude of the extracted fraction increases when a resonance condition for the optical cavity in optical communication with the extractor is approached. A readout channel included in the optical gyroscope comprises an interferometric device adapted to spectrally modify the extracted fraction so as to produce a spectral Vernier effect. A difference between free spectral ranges of the interferometric device and the optical cavity is larger than the associated spectral widths. Readout detectors are included in the readout channel for detecting optical power levels of the spectrally modified optical signal, based on which the angular velocity is determined.
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公开(公告)号：US10520677B2
公开(公告)日：2019-12-31
申请号：US16231452
申请日：2018-12-22
申请人： IMEC VZW
摘要： An integrated photonic device comprises: an input waveguide configured to extend in an input plane, and an output waveguide configured to extend in an output plane, wherein the output plane is parallel to or contained within the input plane; an input coupler optically coupled to the input waveguide, wherein the input coupler is configured to redirect a light signal out of the input waveguide and the input plane; a light property modifier configured to receive the light signal from the input coupler and reflect the light signal towards the output plane, wherein the light property modifier is configured to selectively adjust an optical path length of the light signal; and an output coupler optically coupled to the output waveguide, wherein the output coupler is configured to receive the reflected light signal from the light property modifier and redirect the light signal into the output waveguide and the output plane.
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公开(公告)号：US11320303B2
公开(公告)日：2022-05-03
申请号：US16840269
申请日：2020-04-03
IPC分类号： G01H9/00
摘要： Embodiments relate to a sensor structure for an acoustical pressure sensor and an opto-mechanical sensor and system that may be used for detecting acoustical pressure waves. Embodiments of a sensor structure for an acoustical pressure sensor include an optical waveguide closed-loop resonator and a plurality of sensor elements. The individual sensor elements of the plurality of sensor elements are configured to be affected by an acoustical pressure wave such that a physical property of the individual sensor element is changed. The optical waveguide closed-loop resonator is arranged at the plurality of sensor elements and associated with each of the individual sensor elements such that a resonance frequency of the optical waveguide closed-loop resonator is shifted due to the affected physical properties of all individual sensor elements. The sensor structure provides a high sensitivity from each sensor element, which is advantageous in e.g. ultrasonic imaging, such as photo-acoustic imaging where the signals typically are low.
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公开(公告)号：US20210165546A1
公开(公告)日：2021-06-03
申请号：US17104844
申请日：2020-11-25
申请人： IMEC VZW
摘要： A phased array ultrasound device includes transducer elements arranged in a two dimensional array; first electrodes, each first electrode extending along a first direction; and second electrodes, each second electrode extending along a second direction, where each transducer element is associated with one first electrode and one second electrode, where each transducer element includes a material located between its associated first electrode and second electrode, and is configured to emit an ultrasonic wave induced by a vibration force or an oscillation force of its material when the transducer element is actuated based on control signals applied to its associated first electrode and second electrode, where each transducer element has a unipolar actuation force direction, and where the phased array ultrasound device is configured to create a pressure focus point by actuating a set of transducer elements to form a combined ultrasonic wave.
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公开(公告)号：US10985200B2
公开(公告)日：2021-04-20
申请号：US16234472
申请日：2018-12-27
申请人： IMEC VZW
IPC分类号： H01L31/0232 , H01L27/146
摘要： A method for producing an image sensor comprises: depositing a first back-end-of-line, BEOL, layer above a substrate comprising an array of light-detecting elements, said BEOL layer comprising metal wirings being arranged to form connections to components on the substrate and together with depositing the first BEOL layer, improving planarization of the first BEOL layer by depositing a planarizing metal dummy pattern in the first BEOL layer, wherein a part of the planarizing metal dummy pattern is arranged above a light-detecting element, wherein the planarizing metal dummy patterns is formed from the same material as the metal wirings and is deposited to planarize density of the metal deposited in the first BEOL layer across a surface of the layer and wherein a shape and/or position of the metal dummy pattern above the array of light-detecting elements is designed to provide a desired effect on incident light.
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公开(公告)号：US10921125B2
公开(公告)日：2021-02-16
申请号：US16690667
申请日：2019-11-21
申请人： IMEC VZW
发明人： Veronique Rochus , Roelof Jansen , Benedetto Troia
IPC分类号： G01C19/66
摘要： An optical gyroscope and a method for measuring an angular velocity of rotation are described. A closed-path optical cavity is configured for receiving at least a first optical signal circulating as at least one cavity mode of pre-determined orientation (inside the optical cavity. An extractor in optical communication with the optical cavity is configured for extracting a fraction of at least the circulating first optical signal from the optical cavity, wherein an amplitude of the extracted fraction increases when a resonance condition for the optical cavity in optical communication with the extractor is approached. A readout channel included in the optical gyroscope comprises an interferometric device adapted to spectrally modify the extracted fraction so as to produce a spectral Vernier effect. A difference between free spectral ranges of the interferometric device and the optical cavity is larger than the associated spectral widths. Readout detectors are included in the readout channel for detecting optical power levels of the spectrally modified optical signal, based on which the angular velocity is determined.
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公开(公告)号：US11372158B2
公开(公告)日：2022-06-28
申请号：US16703242
申请日：2019-12-04
摘要： A waveguide for guiding an electro-magnetic wave comprises: a first waveguide part; and a second waveguide part; wherein the first waveguide part has a first width in a first direction (Y) perpendicular to the direction of propagation of the electro-magnetic wave and the second waveguide part has a second width in the first direction (Y), wherein the second width is larger than the first width; and wherein the first and the second waveguide parts are spaced apart by a gap in a second direction (Z) perpendicular to the first and second planes in which the waveguide parts are formed, wherein the gap has a size which is sufficiently small such that the first and second waveguide parts unitely form a single waveguide for guiding the electro-magnetic wave. The waveguide may be used in numerous applications, such as in a photonic integrated circuit, in a sensor or in an actuator.
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