公开(公告)号：US09728653B2

公开(公告)日：2017-08-08

申请号：US13947823

申请日：2013-07-22

Applicant: Infineon Technologies AG

Inventor： Alfons Dehe ,  Mohsin Nawaz

IPC: H04R25/00 ,  H01L29/84 ,  H01L21/306 ,  H04R19/00 ,  B81B3/00

CPC classification number: H01L29/84 ,  B81B3/0021 ,  B81B2201/0257 ,  B81B2203/0136 ,  B81B2203/053 ,  H01L21/30604 ,  H04R19/005 ,  H04R2201/003

Abstract: A MEMS device includes a membrane comprising a first plurality of fingers. A counter electrode arrangement includes a second plurality of fingers disposed in a interdigitated relationship with the first plurality of fingers of the membrane. A deflector is configured to deflect the membrane such that the first and second plurality of fingers are displaced in a position excluding maximum overlapping of surfaces of the fingers.

公开(公告)号：US08742873B2

公开(公告)日：2014-06-03

申请号：US13929058

申请日：2013-06-27

Applicant: Infineon Technologies AG

Inventor： Bernhard Winkler ,  Florian Schoen ,  Mohsin Nawaz

IPC: H03H9/24 ,  H03H9/125 ,  H03H9/02

CPC classification number: H03H9/02244 ,  G04C3/12 ,  G04F5/063 ,  H03B5/30 ,  H03H3/0072 ,  H03H9/02433 ,  H03H9/02448 ,  H03H9/2431

Abstract: Embodiments are related to micro-electromechanical system (MEMS) devices, systems and methods. In one embodiment, a MEMS resonating device comprises a resonator element configured to provide timing; and at least one passive temperature compensation structure arranged on the resonator element.

Abstract translation: 实施例涉及微机电系统（MEMS）装置，系统和方法。 在一个实施例中，MEMS谐振装置包括被配置为提供定时的谐振元件; 以及布置在谐振器元件上的至少一个被动温度补偿结构。

公开(公告)号：US20150021722A1

公开(公告)日：2015-01-22

申请号：US13947823

申请日：2013-07-22

Applicant: Infineon Technologies AG

Inventor： Alfons Dehe ,  Mohsin Nawaz

IPC: H01L29/84 ,  H01L21/306

CPC classification number: H01L29/84 ,  B81B3/0021 ,  B81B2201/0257 ,  B81B2203/0136 ,  B81B2203/053 ,  H01L21/30604 ,  H04R19/005 ,  H04R2201/003

Abstract: A MEMS device includes a membrane comprising a first plurality of fingers. A counter electrode arrangement includes a second plurality of fingers disposed in a interdigitated relationship with the first plurality of fingers of the membrane. A deflector is configured to deflect the membrane such that the first and second plurality of fingers are displaced in a position excluding maximum overlapping of surfaces of the fingers.

Abstract translation: MEMS器件包括包括第一多个指状物的膜。 对电极装置包括与膜的第一多个指状物以交叉关系设置的第二多个指状物。 偏转器被配置成偏转膜，使得第一和第二多个指状物在除了指状物的表面的最大重叠之外的位置移位。