System and Method for a MEMS Transducer
    6.
    发明申请
    System and Method for a MEMS Transducer 有权
    MEMS传感器的系统和方法

    公开(公告)号:US20160377569A1

    公开(公告)日:2016-12-29

    申请号:US14749102

    申请日:2015-06-24

    IPC分类号: G01N27/22 B81C1/00 B81B3/00

    摘要: According to an embodiment, a microelectromechanical systems (MEMS) transducer includes a substrate with a first cavity that passes through the substrate from a backside of the substrate. The MEMS transducer also includes a perforated first electrode plate overlying the first cavity on a topside of the substrate, a second electrode plate overlying the first cavity on the topside of the substrate and spaced apart from the perforated first electrode plate by a spacing region, and a gas sensitive material in the spacing region between the perforated first electrode plate and the second electrode plate. The gas sensitive material has an electrical property that is dependent on a concentration of a target gas.

    摘要翻译: 根据实施例,微机电系统(MEMS)换能器包括具有第一空腔的衬底,该衬底从衬底的背面穿过衬底。 所述MEMS换能器还包括覆盖所述基底顶面上的所述第一空腔的穿孔第一电极板,覆盖所述基底的顶侧上的所述第一空腔并且与穿孔的第一电极板间隔开间隔区域的第二电极板,以及 在穿孔的第一电极板和第二电极板之间的间隔区域中的气体敏感材料。 气体敏感材料具有取决于目标气体浓度的电性质。