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公开(公告)号:US09188497B2
公开(公告)日:2015-11-17
申请号:US13982390
申请日:2012-01-11
申请人: Isao Shimoyama , Kiyoshi Matsumoto , Tomoyuki Takahata , Tetsuo Kan , Kenta Kuwana , Hidetoshi Takahashi , Minh-Dung Nguyen
发明人: Isao Shimoyama , Kiyoshi Matsumoto , Tomoyuki Takahata , Tetsuo Kan , Kenta Kuwana , Hidetoshi Takahashi , Minh-Dung Nguyen
CPC分类号: G01L9/06 , G01L9/0002 , G01L9/0042 , G01L9/0054 , G01L13/02 , G01L19/147 , H04R21/02
摘要: There is provided a differential pressure sensor capable of measuring a pressure fluctuation with a simple structure. The differential pressure sensor includes a main body formed with an air chamber, and an opening that causes an interior of the air chamber to be in communication with an exterior, and a detector provided at the opening. The detector includes a cantilever provided in a manner tiltable so as to block off the opening, and the cantilever is formed with a Piezo resistor layer.
摘要翻译: 提供了能够以简单结构测量压力波动的差压传感器。 差压传感器包括形成有空气室的主体和使空气室的内部与外部连通的开口以及设置在开口处的检测器。 检测器包括以可倾斜的方式设置的悬臂,以便阻挡开口,并且悬臂由压电电阻层形成。
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公开(公告)号:US20140000378A1
公开(公告)日:2014-01-02
申请号:US13982390
申请日:2012-01-11
申请人: Isao Shimoyama , Kiyoshi Matsumoto , Tomoyuki Takahata , Tetsuo Kan , Kenta Kuwana , Hidetoshi Takahashi , Minh-Dung Nguyen
发明人: Isao Shimoyama , Kiyoshi Matsumoto , Tomoyuki Takahata , Tetsuo Kan , Kenta Kuwana , Hidetoshi Takahashi , Minh-Dung Nguyen
IPC分类号: G01L9/06
CPC分类号: G01L9/06 , G01L9/0002 , G01L9/0042 , G01L9/0054 , G01L13/02 , G01L19/147 , H04R21/02
摘要: There is provided a differential pressure sensor capable of measuring a pressure fluctuation with a simple structure. The differential pressure sensor includes a main body formed with an air chamber, and an opening that causes an interior of the air chamber to be in communication with an exterior, and a detector provided at the opening. The detector includes a cantilever provided in a manner tiltable so as to block off the opening, and the cantilever is formed with a Piezo resistor layer.
摘要翻译: 提供了能够以简单结构测量压力波动的差压传感器。 差压传感器包括形成有空气室的主体和使空气室的内部与外部连通的开口以及设置在开口处的检测器。 检测器包括以可倾斜的方式设置的悬臂,以便阻挡开口,并且悬臂由压电电阻层形成。
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