公开(公告)号：US08206076B2

公开(公告)日：2012-06-26

申请号：US12137076

申请日：2008-06-11

申请人： Issei Ueda ,  Yasushi Hayashida ,  Akira Miyata ,  Kensei Yamamoto ,  Yuichi Yamamoto ,  Michiaki Matsushita

发明人： Issei Ueda ,  Yasushi Hayashida ,  Akira Miyata ,  Kensei Yamamoto ,  Yuichi Yamamoto ,  Michiaki Matsushita

IPC分类号： H01L21/677

CPC分类号： H01L21/67769 ,  Y10S414/139

摘要： A cassette waiting block is connected to a transfer in/out block of a coating and developing treatment system, and in the cassette waiting block, a cassette transfer in/out unit, a cassette waiting unit, a cassette delivery unit, and a substrate processing unit are provided. In the cassette waiting block, a cassette transfer unit for transferring the cassette between the cassette transfer in/out unit, the cassette waiting unit, and the cassette deliver unit, and a transfer unit for transferring the substrate between the cassette in the cassette waiting unit and the substrate processing unit are provided. Each cassette waiting unit has an opening mechanism for opening a port of the cassette.

摘要翻译： 盒式等待块连接到涂覆和显影处理系统的转移输入/输出块，并且在盒式等待块中，盒式磁带传送入/出单元，盒式磁带等待单元，盒传送单元和基板处理 提供单位。 在盒式磁带等待块中，用于在磁带盒输入/输出单元，磁带盒等待单元和磁带盒传送单元之间传送磁带的盒式磁带传送单元，以及用于在盒式磁带等待单元中的盒之间传送基板的传送单元 并提供基板处理单元。 每个盒式待机单元具有用于打开盒的端口的打开机构。

公开(公告)号：US20090003825A1

公开(公告)日：2009-01-01

申请号：US12137076

申请日：2008-06-11

申请人： Issei Ueda ,  Yasushi Hayashida ,  Akira Miyata ,  Kensei Yamamoto ,  Yuichi Yamamoto ,  Michiaki Matsushita

发明人： Issei Ueda ,  Yasushi Hayashida ,  Akira Miyata ,  Kensei Yamamoto ,  Yuichi Yamamoto ,  Michiaki Matsushita

IPC分类号： G03D3/08

CPC分类号： H01L21/67769 ,  Y10S414/139

摘要： A cassette waiting block is connected to a transfer in/out block of a coating and developing treatment system, and in the cassette waiting block, a cassette transfer in/out unit, a cassette waiting unit, a cassette delivery unit, and a substrate processing unit are provided. In the cassette waiting block, a cassette transfer unit for transferring the cassette between the cassette transfer in/out unit, the cassette waiting unit, and the cassette deliver unit, and a transfer unit for transferring the substrate between the cassette in the cassette waiting unit and the substrate processing unit are provided. Each cassette waiting unit has an opening mechanism for opening a port of the cassette.

摘要翻译： 盒式等待块连接到涂覆和显影处理系统的转移输入/输出块，并且在盒式等待块中，盒式磁带传送入/出单元，盒式磁带等待单元，盒传送单元和基板处理 提供单位。 在盒式磁带等待块中，用于在磁带盒输入/输出单元，磁带盒等待单元和磁带盒传送单元之间传送磁带的盒式磁带传送单元，以及用于在盒式磁带等待单元中的盒之间传送基板的传送单元 并提供基板处理单元。 每个盒式待机单元具有用于打开盒的端口的打开机构。

公开(公告)号：US20080241715A1

公开(公告)日：2008-10-02

申请号：US12051995

申请日：2008-03-20

申请人： Syuzo FUJIMARU ,  Kensei Yamamoto

发明人： Syuzo FUJIMARU ,  Kensei Yamamoto

IPC分类号： G03C5/00 ,  G06F7/00

CPC分类号： H01L21/67276

摘要： In the present invention, when trouble occurs and the operation of a substrate processing apparatus is stopped, substrate information containing positions and processing states of the substrates located in the apparatus at that time is stored, and the power supply of the apparatus is then turned off. When the apparatus is restarted, the substrates located in the apparatus are collected into a substrate housing unit, and each of the substrates in the substrate housing unit is then sequentially transferred to a plurality of processing units following the same transfer recipe as that before occurrence of trouble, and substrate processing is not performed in a processing unit in which processing has already been completed, whereas substrate processing is performed in a processing unit in which processing has not been performed yet, based on the substrate information.

摘要翻译： 在本发明中，当故障发生并且基板处理装置的操作停止时，存储包含位于该装置中的基板的位置和处理状态的基板信息，然后关闭该装置的电源 。 当设备重新启动时，位于设备中的基板被收集到基板收纳单元中，然后将基板收纳单元中的每个基板顺序地转移到多个处理单元，遵循与发生之前相同的转移配方 在已经完成处理的处理单元中不执行故障和基板处理，而在尚未执行处理的处理单元中，基于基板信息执行基板处理。

公开(公告)号：US20110243356A1

公开(公告)日：2011-10-06

申请号：US13120813

申请日：2009-09-16

申请人： Takuji Koike ,  Naohito Hato ,  Kensei Yamamoto

发明人： Takuji Koike ,  Naohito Hato ,  Kensei Yamamoto

IPC分类号： H04R25/00

CPC分类号： H04R25/606 ,  H04B5/0081 ,  H04R25/554

摘要： Provided is a high-accuracy embedded audiphone.A transducer (34) made of a giant magnetostrictive element is provided in an intracorporeal unit (3) that is embedded in a skull (5). An audible sound modulation transmission signal (S1), which is amplitude-modulated by a sound collection signal generated in an extracorporeal unit (2), is transmitted from an extracorporeal transmitter coil (31) to an intracorporeal receiver coil (32) provided in the intracorporeal unit (3) with the help of a transmission magnetic flux (33). Moreover, because of an induced electromotive force of the intracorporeal receiver coil (32), the transducer (34) expands and contracts. Therefore, it is possible to highly accurately conduct an audible sound signal through bone with no power source or demodulation circuit provided in the intracorporeal unit (3).

摘要翻译： 提供了一种高精度嵌入式听筒。 由巨磁致伸缩元件制成的换能器（34）设置在嵌入颅骨（5）中的体内单元（3）内。 由在体外单元（2）中产生的声音收集信号进行了幅度调制的声音调制传输信号（S1）从体外发射器线圈（31）传送到体外接收线圈（32） 体内单位（3）借助于传动磁通（33）。 此外，由于体内接收线圈（32）的感应电动势，换能器（34）膨胀和收缩。 因此，能够通过骨骼高效地进行可听见的声音信号，没有设置在体内单元（3）内的电源或解调电路。

公开(公告)号：US08520867B2

公开(公告)日：2013-08-27

申请号：US13120813

申请日：2009-09-16

申请人： Takuji Koike ,  Naohito Hato ,  Kensei Yamamoto

发明人： Takuji Koike ,  Naohito Hato ,  Kensei Yamamoto

IPC分类号： H04R25/00

CPC分类号： H04R25/606 ,  H04B5/0081 ,  H04R25/554

摘要： Provided is a high-accuracy embedded audiphone.A transducer (34) made of a giant magnetostrictive element is provided in an intracorporeal unit (3) that is embedded in a skull (5). An audible sound modulation transmission signal (S1), which is amplitude-modulated by a sound collection signal generated in an extracorporeal unit (2), is transmitted from an extracorporeal transmitter coil (31) to an intracorporeal receiver coil (32) provided in the intracorporeal unit (3) with the help of a transmission magnetic flux (33). Moreover, because of an induced electromotive force of the intracorporeal receiver coil (32), the transducer (34) expands and contracts. Therefore, it is possible to highly accurately conduct an audible sound signal through bone with no power source or demodulation circuit provided in the intracorporeal unit (3).

摘要翻译： 提供了一种高精度嵌入式听筒。 由巨磁致伸缩元件制成的换能器（34）设置在嵌入颅骨（5）中的体内单元（3）内。 由在体外单元（2）中产生的声音收集信号进行了幅度调制的声音调制传输信号（S1）从体外发射器线圈（31）传送到体外接收线圈（32） 体内单位（3）借助于传动磁通（33）。 此外，由于体内接收线圈（32）的感应电动势，换能器（34）膨胀和收缩。 因此，能够通过骨骼高效地进行可听见的声音信号，没有设置在体内单元（3）内的电源或解调电路。

公开(公告)号：US07618203B2

公开(公告)日：2009-11-17

申请号：US12051995

申请日：2008-03-20

申请人： Syuzo Fujimaru ,  Kensei Yamamoto

发明人： Syuzo Fujimaru ,  Kensei Yamamoto

IPC分类号： G03D5/00 ,  G06F19/00 ,  B05C11/00

CPC分类号： H01L21/67276

摘要： In the present invention, when trouble occurs and the operation of a substrate processing apparatus is stopped, substrate information containing positions and processing states of the substrates located in the apparatus at that time is stored, and the power supply of the apparatus is then turned off. When the apparatus is restarted, the substrates located in the apparatus are collected into a substrate housing unit, and each of the substrates in the substrate housing unit is then sequentially transferred to a plurality of processing units following the same transfer recipe as that before occurrence of trouble, and substrate processing is not performed in a processing unit in which processing has already been completed, whereas substrate processing is performed in a processing unit in which processing has not been performed yet, based on the substrate information.

摘要翻译： 在本发明中，当故障发生并且基板处理装置的操作停止时，存储包含位于该装置中的基板的位置和处理状态的基板信息，然后关闭该装置的电源 。 当设备重新启动时，位于设备中的基板被收集到基板收纳单元中，然后将基板收纳单元中的每个基板顺序地转移到多个处理单元，遵循与发生之前相同的转移配方 在已经完成处理的处理单元中不执行故障和基板处理，而在尚未执行处理的处理单元中，基于基板信息执行基板处理。