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公开(公告)号:US20120291709A1
公开(公告)日:2012-11-22
申请号:US13559511
申请日:2012-07-26
申请人: Jacob Smith , ALEXANDER TAM , R. SURYANARAYANAN IYER , SEAN SEUTTER , BINH TRAN , NIR MERRY , ADAM BRAILOVE , ROBERT SHYDO, JR. , ROBERT ANDREWS , FRANK ROBERTS , THEODORE SMICK , GEOFFREY RYDING
发明人: Jacob Smith , ALEXANDER TAM , R. SURYANARAYANAN IYER , SEAN SEUTTER , BINH TRAN , NIR MERRY , ADAM BRAILOVE , ROBERT SHYDO, JR. , ROBERT ANDREWS , FRANK ROBERTS , THEODORE SMICK , GEOFFREY RYDING
IPC分类号: C23C14/50
CPC分类号: H01L21/68792 , C23C16/4584 , H01L21/67126 , H01L21/68742
摘要: A method and apparatus for processing a substrate utilizing a rotating substrate support are disclosed herein. In one embodiment, an apparatus for processing a substrate includes a chamber having a substrate support assembly disposed within the chamber. The substrate support assembly includes a substrate support having a support surface and a heater disposed beneath the support surface. A shaft is coupled to the substrate support and a motor is coupled to the shaft through a rotor to provide rotary movement to the substrate support. A seal block is disposed around the rotor and forms a seal therewith. The seal block has at least one seal and at least one channel disposed along the interface between the seal block and the shaft. A port is coupled to each channel for connecting to a pump. A lift mechanism is coupled to the shaft for raising and lowering the substrate support.
摘要翻译: 本文公开了一种利用旋转衬底支撑件来处理衬底的方法和装置。 在一个实施例中,用于处理衬底的装置包括具有设置在腔室内的衬底支撑组件的室。 衬底支撑组件包括具有支撑表面的衬底支撑件和设置在支撑表面下方的加热器。 轴联接到基板支撑件,并且电机通过转子联接到轴,以向基板支撑件提供旋转运动。 密封块设置在转子周围并与其形成密封。 密封块具有至少一个密封件和沿密封块和轴之间的界面设置的至少一个通道。 端口连接到每个通道以连接到泵。 升降机构联接到轴上以升高和降低基板支撑。
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公开(公告)号:US1343282A
公开(公告)日:1920-06-15
申请号:US21655618
申请日:1918-02-11
申请人: FRANK ROBERTS , GIFFIN JOHN M
发明人: FRANK ROBERTS , GIFFIN JOHN M
IPC分类号: C09J193/04
CPC分类号: C09J193/04
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