公开(公告)号：US08345258B2

公开(公告)日：2013-01-01

申请号：US12701535

申请日：2010-02-06

Applicant: James E. Millerd ,  Michael North-Morris

Inventor： James E. Millerd ,  Michael North-Morris

IPC: G01B9/02

CPC classification number: G01B9/02057 ,  G01B9/02002 ,  G01B9/02045 ,  G01B9/02065 ,  G01B9/0209 ,  G01B2290/70

Abstract: An optical device for characterizing a test surface combines a Fizeau interferometer with a polarization frequency-shifting element. Two substantially collinear, orthogonally polarized beams having respective frequencies differing by a predetermined frequency shift are generated by the polarization frequency-shifting element and projected into the Fizeau optical cavity to produce a pair of test beams and a pair of reference beams, wherein the beams in each pair have orthogonal polarization states and have frequencies differing by the predetermined frequency shift. A second, substantially equal frequency shift is introduced in the Fizeau cavity on either one of the pairs of test and reference beams, thereby generating a four-beam collinear output that produces an interferogram without tilt or short-coherence light. The invention may also be implemented by reversing the order of the Fizeau cavity and the polarization frequency-shifting element in the optical train.

Abstract translation: 用于表征测试表面的光学装置将Fizeau干涉仪与偏振频移元件组合。 通过偏振频移元件产生具有不同频率预定频移的两个基本上共线的正交偏振光束，并投射到菲索光学腔中以产生一对测试光束和一对参考光束，其中光束 每对具有正交偏振状态并且具有与预定频移不同的频率。 第二个基本上相等的频移在Fizeau腔中的任一个测试和参考光束中被引入，从而产生产生没有倾斜或短相干光的干涉图的四光束共线输出。 本发明还可以通过使光纤列中的Fizeau腔和极化频移元件的顺序颠倒来实现。

公开(公告)号：US06552808B2

公开(公告)日：2003-04-22

申请号：US09906542

申请日：2001-07-16

Applicant: James E. Millerd ,  Neal J. Brock

Inventor： James E. Millerd ,  Neal J. Brock

IPC: G01B902

CPC classification number: G01B11/2441 ,  G01B9/0201 ,  G01B9/02081 ,  G01B9/02087 ,  G01B2290/45 ,  G01B2290/70 ,  G01J9/02 ,  G01N21/45

Abstract: Apparatus for splitting, imaging, and measuring wavefronts with a reference wavefront and an object wavefront. A wavefront-combining element receives and combines into a combined wavefront an object wavefront from an object and a reference wavefront. A wavefront-splitting element splits the combined wavefront into a plurality of sub-wavefronts in such a way that each of the sub-wavefronts is substantially contiguous with at least one other sub-wavefront. The wavefront-splitting element may shift the relative phase between the reference wavefront and the object wavefront of the sub-wavefronts to yield a respective plurality of phase-shifted sub-wavefronts. The wavefront-splitting element may then interfering the reference and object wavefronts of the phase-shifted sub-wavefronts to yield a respective plurality of phase-shifted interferograms. An imaging element receives and images the phase-shifted interferograms. A computer connected to the imaging element measures various parameters of the objects based on the phase-shifted interferograms. Examples of measurements include flow parameters such as the concentrations of selected gaseous species, temperature distributions, particle and droplet distributions, density, and so on. In addition to flow parameters, the displacement (e.g., the vibration) and the profile of an object may be measured.

公开(公告)号：US07230717B2

公开(公告)日：2007-06-12

申请号：US10838694

申请日：2004-05-04

Applicant: Neal J. Brock ,  James E. Millerd ,  James C. Wyant ,  John B. Hayes

Inventor： Neal J. Brock ,  James E. Millerd ,  James C. Wyant ,  John B. Hayes

IPC: G01B11/02 ,  G01B9/02

CPC classification number: G01B9/02022 ,  G01B9/02057 ,  G01B9/02081 ,  G01B9/02083 ,  G01B2290/70

Abstract: A phase-difference sensor measures the spatially resolved difference in phase between orthogonally polarized reference and test wavefronts. The sensor is constructed as a pixelated phase-mask aligned to and imaged on a pixelated detector array. Each adjacent pixel of the phase-mask measures a predetermined relative phase shift between the orthogonally polarized reference and test beams. Thus, multiple phase-shifted interferograms can be synthesized at the same time by combining pixels with identical phase-shifts. The multiple phase-shifted interferograms can be combined to calculate standard parameters such as modulation index or average phase step. Any configuration of interferometer that produces orthogonally polarized reference and object beams may be combined with the phase-difference sensor of the invention to provide, single-shot, simultaneous phase-shifting measurements.

Abstract translation: 相位差传感器测量正交极化参考和测试波前的相位的空间分辨差异。 传感器被构造为与像素化检测器阵列对准并成像的像素化相位掩模。 相位掩模的每个相邻像素测量正交极化参考和测试光束之间的预定相对相移。 因此，通过组合具有相同相移的像素，可以同时合成多个相移干涉图。 可以组合多个相移干涉图以计算标准参数，例如调制指数或平均相位步长。 可以将产生正交极化参考和物体光束的干涉仪的任何配置与本发明的相位差传感器组合以提供单次同时相移测量。

公开(公告)号：US07057737B2

公开(公告)日：2006-06-06

申请号：US10652903

申请日：2003-08-29

Applicant: James E. Millerd ,  Neal J. Brock ,  John B. Hayes ,  James C. Wyant

Inventor： James E. Millerd ,  Neal J. Brock ,  John B. Hayes ,  James C. Wyant

IPC: G01B9/02

CPC classification number: G01B9/02022 ,  G01B9/02023 ,  G01B9/02024 ,  G01B9/02038 ,  G01B9/02057 ,  G01B9/02081 ,  G01B9/02097 ,  G01B2290/30 ,  G01B2290/70 ,  G01J9/02

Abstract: A polarizing point-diffraction plate is used to produce common-path test and reference wavefronts with mutually orthogonal polarizations from an input wavefront. The common-path test and reference wavefronts are collimated, phase shifted and interfered, and the resulting interferograms are imaged on a detector. The interference patterns are then processed using conventional algorithms to characterize the input light wavefront.

Abstract translation: 偏振点衍射板用于产生具有来自输入波前的相互正交偏振的共路径测试和参考波前。 公共路径测试和参考波前被准直，相移和干扰，并将所得的干涉图成像在检测器上。 然后使用常规算法处理干涉图案以表征输入光波前。

公开(公告)号：US5838439A

公开(公告)日：1998-11-17

申请号：US818310

申请日：1997-03-14

Applicant: De Yu Zang ,  James E. Millerd

Inventor： De Yu Zang ,  James E. Millerd

IPC: G01H9/00 ,  G01S7/481 ,  G01S7/491 ,  G01S17/58 ,  G01B9/02

CPC classification number: G01H9/00 ,  G01S17/58 ,  G01S7/4916 ,  G01S7/4813

Abstract: This patent describes a new method for remotely measuring vibration of an object based on laser Doppler vibrometry. The method combines an external two-pass frequency shifting technique with self-mixed, heterodyne detection to provide a compact measurement system that requires only three optical components. A standard diode laser package, consisting of a laser and a monitor photodiode, is used to emit light and detect the scattered signal, a lens is used to collimate the light, and an external modulator is used to shift the optical frequency. The diode laser may be used with or without temperature stabilization. The unique design permits the measurement of objects from a range of long distances without the need for focusing or alignment. Measurements made with the system are characterized by high signal-to-noise ratio, wide dynamic range, and simple alignment.

Abstract translation: 该专利描述了基于激光多普勒振动测量远程测量物体的振动的新方法。 该方法结合了外部双通频移技术与自混合外差检测，以提供只需要三个光学部件的紧凑的测量系统。 使用由激光器和监视器光电二极管组成的标准二极管激光器封装发光并检测散射信号，透镜用于准直光，外部调制器用于移动光频率。 二极管激光器可用于或不具有温度稳定性。 独特的设计允许从远距离范围测量物体，而不需要对焦或对准。 用系统测量的特点是信噪比高，动态范围宽，对齐简单。

公开(公告)号：US07777895B2

公开(公告)日：2010-08-17

申请号：US11800840

申请日：2007-05-08

Applicant: Brian S. Medower ,  James E. Millerd

Inventor： Brian S. Medower ,  James E. Millerd

IPC: G01B11/02

CPC classification number: G01B9/0201 ,  G01B9/02022 ,  G01B9/02057 ,  G01B9/02065 ,  G01B9/02079 ,  G01B9/0209 ,  G01B9/02098 ,  G01B11/2441 ,  G01B11/25 ,  G01B2290/70 ,  G06T7/521

Abstract: A phase-difference sensor measures the spatially resolved difference in phase between orthogonally polarized reference and test wavefronts. The sensor is constructed as a linear-carrier phase-mask aligned to and imaged on a linear-carrier detector array. Each adjacent element of the phase-mask measures a predetermined relative phase shift between the orthogonally polarized reference and test beams. Thus, multiple phase-shifted interferograms can be synthesized at the same time by combining pixels with identical phase-shifts. The multiple phase-shifted interferograms can be combined to calculate standard parameters such as modulation index or average phase step. Any configuration of interferometer that produces orthogonally polarized reference and object beams may be combined with the phase-difference sensor of the invention to provide single-shot, simultaneous phase-shifting measurements.

Abstract translation: 相位差传感器测量正交极化参考和测试波前的相位的空间分辨差异。 传感器被构造为与线性载波检测器阵列对准并成像的线性载波相位掩模。 相位掩模的每个相邻元件测量正交极化参考和测试光束之间的预定相对相移。 因此，通过组合具有相同相移的像素，可以同时合成多个相移干涉图。 可以组合多个相移干涉图以计算标准参数，例如调制指数或平均相位步长。 可以将产生正交偏振的参考和物体光束的干涉仪的任何配置与本发明的相位差传感器组合以提供单次，同时的相移测量。

公开(公告)号：US07079251B2

公开(公告)日：2006-07-18

申请号：US10687308

申请日：2003-10-16

Applicant: James E. Millerd ,  Neal J. Brock ,  Larry Denneau, Jr.

Inventor： James E. Millerd ,  Neal J. Brock ,  Larry Denneau, Jr.

IPC: G01B9/02

CPC classification number: G01B9/02072 ,  G01B9/0207 ,  G01B9/02083 ,  G01B2290/70 ,  G01J3/2803 ,  G01J9/02 ,  G06T5/006 ,  G06T5/008 ,  G06T7/80

Abstract: A multi-channel imaging system is calibrated by measuring the geometric distortion in each sub-image, generating corresponding correction factors, and applying such factors to correct subsequent image data. In addition, intensity transfer-function arrays are measured at each pixel, and further used to correct for system and detector nonlinearities and nonuniformity between images. The procedure is repeated over a range of wavelengths to produce a complete set of correction coefficients and transfer functions. When the system is used for interferometric phase measurements, multiple measurements are preferably taken and a random phase offset in the reference path length is introduced at each measurement. The multiple phase data so derived are then averaged to reduce phase-dependent systematic measurement errors.

Abstract translation: 通过测量每个子图像中的几何失真来校准多通道成像系统，产生相应的校正因子，并应用这些因素来校正随后的图像数据。 此外，在每个像素处测量强度传递函数阵列，并进一步用于校正系统和检测器的非线性和图像之间的不均匀性。 该过程在波长范围内重复以产生一整套校正系数和传递函数。 当系统用于干涉测量时，优选进行多次测量，并在每次测量时引入参考路径长度的随机相位偏移。 然后平均如此导出的多相数据以减少相位依赖的系统测量误差。

公开(公告)号：US07057738B2

公开(公告)日：2006-06-06

申请号：US10746228

申请日：2003-12-24

Applicant: James E. Millerd ,  James C. Wyant

Inventor： James E. Millerd ,  James C. Wyant

IPC: G01B9/02

CPC classification number: G01B9/02057 ,  G01B9/02003 ,  G01B9/02091 ,  G01B11/303 ,  G01B2290/45 ,  G01B2290/50 ,  G01B2290/70

Abstract: The tilted relationship between the reference and test mirrors of a Fizeau interferometer is used to spatially separate the reflections from the two surfaces. The separate beams are filtered through a spatial polarization element that provides different states of polarization to the beams. The beams are subsequently recombined to form a substantially collinear beam that is processed using a spatial-phase-shift interferometer that permits quantitative phase measurement in a single video frame. Alternatively, two beams with orthogonal polarization are injected into the Fizeau cavity at different angles, such that after reflection from the reference and test optics they are substantially collinear. Unwanted reflections are blocked at the focal plane through the use of a circular aperture. Short coherence length light and a delay line may be used to mitigate stray reflections, reduce measurement integration times, and implement temporal phase averaging.

Abstract translation: 使用Fizeau干涉仪的参考镜和测试镜之间的倾斜关系用于在空间上分离两个表面的反射。 单独的光束通过空间偏振元件被滤波，该偏振元件向光束提供不同的偏振状态。 随后将光束重新组合以形成基本上共线的光束，其使用允许在单个视频帧中进行定量相位测量的空间相移干涉仪进行处理。 或者，具有正交偏振的两个光束以不同的角度注入到Fizeau腔中，使得在来自参考和测试光学器件的反射之后，它们基本上共线。 不需要的反射通过使用圆形孔径在焦平面处被阻挡。 短相干长度光和延迟线可用于减轻杂散反射，减少测量积分时间，并实现时间相位平均。

公开(公告)号：US08351048B2

公开(公告)日：2013-01-08

申请号：US12856723

申请日：2010-08-16

Applicant: James E. Millerd

Inventor： James E. Millerd

IPC: G01B9/02

CPC classification number: G01B9/0201 ,  G01B9/02057 ,  G01B9/02065 ,  G01B9/02079 ,  G01B9/0209 ,  G01B11/2441 ,  G01B11/25 ,  G01B2290/70

Abstract: A phase-difference sensor measures the spatially resolved difference in phase between orthogonally polarized reference and test wavefronts. The sensor is constructed as a linear-carrier phase-mask aligned to and imaged on a linear-carrier detector array. Mireau and Fizeau polarization interferometric objectives are implemented with a thin conductive wire grid optically coupled to the objective beam splitter.

Abstract translation: 相位差传感器测量正交极化参考和测试波前的相位的空间分辨差异。 传感器被构造为与线性载波检测器阵列对准并成像的线性载波相位掩模。 Mireau和Fizeau偏振干涉仪目标通过光学耦合到物镜分束器的薄导电网格实现。

公开(公告)号：US20080062428A1

公开(公告)日：2008-03-13

申请号：US11899883

申请日：2007-09-07

Applicant: James E. Millerd ,  Michael North-Morris

Inventor： James E. Millerd ,  Michael North-Morris

IPC: G01B9/02

CPC classification number: G01B9/02057 ,  G01B9/02002 ,  G01B9/02045 ,  G01B9/02065 ,  G01B9/0209 ,  G01B2290/70

Abstract: An optical device for characterizing a test surface combines a Fizeau interferometer with a polarization frequency-shifting element. Two substantially collinear, orthogonally polarized beams having respective frequencies differing by a predetermined frequency shift are generated by the polarization frequency-shifting element and projected into the Fizeau optical cavity to produce a pair of test beams and a pair of reference beams, wherein the beams in each pair have orthogonal polarization states and have frequencies differing by the predetermined frequency shift. A second, substantially equal frequency shift is introduced in the Fizeau cavity on either one of the pairs of test and reference beams, thereby generating a four-beam collinear output that produces an interferogram without tilt or short-coherence light. The invention may also be implemented by reversing the order of the Fizeau cavity and the polarization frequency-shifting element in the optical train.

Abstract translation: 用于表征测试表面的光学装置将Fizeau干涉仪与偏振频移元件组合。 通过偏振频移元件产生具有不同频率预定频移的两个基本上共线的正交偏振光束，并投射到菲索光学腔中以产生一对测试光束和一对参考光束，其中光束 每对具有正交偏振状态并且具有与预定频移不同的频率。 第二个基本上相等的频移在Fizeau腔中的任一个测试和参考光束中被引入，从而产生产生没有倾斜或短相干光的干涉图的四光束共线输出。 本发明还可以通过使光纤列中的Fizeau腔和极化频移元件的顺序颠倒来实现。