公开(公告)号：US09058455B2

公开(公告)日：2015-06-16

申请号：US13354705

申请日：2012-01-20

申请人： James W. Adkisson ,  Panglijen Candra ,  Thomas J. Dunbar ,  Jeffrey P. Gambino ,  Mark D. Jaffe ,  Anthony K. Stamper ,  Randy L. Wolf

发明人： James W. Adkisson ,  Panglijen Candra ,  Thomas J. Dunbar ,  Jeffrey P. Gambino ,  Mark D. Jaffe ,  Anthony K. Stamper ,  Randy L. Wolf

IPC分类号： G06F17/50 ,  H01L21/768 ,  H01L23/48 ,  H03H9/64 ,  H01L23/00 ,  H01L27/06 ,  H01L49/02 ,  H01L23/66 ,  H01L25/16

CPC分类号： H01L41/293 ,  G06F17/5063 ,  G06F17/5068 ,  H01L21/76898 ,  H01L23/481 ,  H01L23/66 ,  H01L24/03 ,  H01L24/05 ,  H01L24/24 ,  H01L25/16 ,  H01L27/0694 ,  H01L28/40 ,  H01L41/0815 ,  H01L41/25 ,  H01L2224/03009 ,  H01L2224/0401 ,  H01L2224/04105 ,  H01L2224/0557 ,  H01L2224/05572 ,  H01L2224/06181 ,  H01L2224/12105 ,  H01L2224/14181 ,  H01L2224/16145 ,  H01L2224/24145 ,  H01L2225/06548 ,  H03H9/64

摘要： A design structure for an integrated radio frequency (RF) filter on a backside of a semiconductor substrate includes: a device on a first side of a substrate; a radio frequency (RF) filter on a backside of the substrate; and at least one substrate conductor extending from the front side of the substrate to the backside of the substrate and electrically coupling the RF filter to the device.

摘要翻译： 在半导体衬底的背面上的集成射频（RF）滤波器的设计结构包括：在衬底的第一侧上的器件; 在衬底的背面上的射频（RF）滤波器; 以及至少一个衬底导体，其从所述衬底的前侧延伸到所述衬底的所述背面并将所述RF滤波器电耦合到所述器件。

公开(公告)号：US08723392B2

公开(公告)日：2014-05-13

申请号：US13183977

申请日：2011-07-15

申请人： James W. Adkisson ,  Panglijen Candra ,  Thomas J. Dunbar ,  Jeffrey P. Gambino ,  Mark D. Jaffe ,  Anthony K. Stamper ,  Randy L. Wolf

发明人： James W. Adkisson ,  Panglijen Candra ,  Thomas J. Dunbar ,  Jeffrey P. Gambino ,  Mark D. Jaffe ,  Anthony K. Stamper ,  Randy L. Wolf

IPC分类号： H03H9/25

CPC分类号： H03H9/14538 ,  H03H3/08

摘要： Disclosed herein is a surface acoustic wave (SAW) filter and method of making the same. The SAW filter includes a piezoelectric substrate; a planar barrier layer disposed above the piezoelectric substrate, and at least one conductor buried in the piezoelectric substrate and the planar barrier layer.

摘要翻译： 本文公开了一种表面声波（SAW）滤波器及其制造方法。 SAW滤波器包括压电基片; 设置在所述压电基板上方的平面阻挡层，以及埋设在所述压电基板和所述平面阻挡层中的至少一个导体。

公开(公告)号：US08910355B2

公开(公告)日：2014-12-16

申请号：US13323285

申请日：2011-12-12

申请人： James W. Adkisson ,  Panglijen Candra ,  Thomas J. Dunbar ,  Jeffrey P. Gambino ,  Mark D. Jaffe ,  Anthony K. Stamper ,  Randy L. Wolf

发明人： James W. Adkisson ,  Panglijen Candra ,  Thomas J. Dunbar ,  Jeffrey P. Gambino ,  Mark D. Jaffe ,  Anthony K. Stamper ,  Randy L. Wolf

IPC分类号： H03H3/04 ,  H03H9/15 ,  H03H9/10 ,  H03H3/02 ,  H03H3/007 ,  C23C16/40

CPC分类号： H03H3/04 ,  C23C16/401 ,  C23C16/402 ,  H03H3/007 ,  H03H3/02 ,  H03H9/1007 ,  H03H9/105 ,  H03H9/1085 ,  H03H9/1092 ,  H03H9/173 ,  H03H2003/021 ,  H03H2003/0428 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49126 ,  Y10T29/49155

摘要： Manufacturing a semiconductor structure including modifying a frequency of a Film Bulk Acoustic Resonator (FBAR) device though a vent hole of a sealing layer surrounding the FBAR device.

摘要翻译： 制造半导体结构，包括通过围绕FBAR器件的密封层的通气孔来修改膜体声波谐振器（FBAR）器件的频率。

公开(公告)号：US20130015744A1

公开(公告)日：2013-01-17

申请号：US13183977

申请日：2011-07-15

申请人： James W. Adkisson ,  Panglijen Candra ,  Thomas J. Dunbar ,  Jeffrey P. Gambino ,  Mark D. Jaffe ,  Anthony K. Stamper ,  Randy L. Wolf

发明人： James W. Adkisson ,  Panglijen Candra ,  Thomas J. Dunbar ,  Jeffrey P. Gambino ,  Mark D. Jaffe ,  Anthony K. Stamper ,  Randy L. Wolf

IPC分类号： H01L41/04 ,  H04R17/00

CPC分类号： H03H9/14538 ,  H03H3/08

摘要： Disclosed herein is a surface acoustic wave (SAW) filter and method of making the same. The SAW filter includes a piezoelectric substrate; a planar barrier layer disposed above the piezoelectric substrate, and at least one conductor buried in the piezoelectric substrate and the planar barrier layer.

摘要翻译： 本文公开了一种表面声波（SAW）滤波器及其制造方法。 SAW滤波器包括压电基片; 设置在所述压电基板上方的平面阻挡层，以及埋设在所述压电基板和所述平面阻挡层中的至少一个导体。

公开(公告)号：US09048809B2

公开(公告)日：2015-06-02

申请号：US13342375

申请日：2012-01-03

申请人： James W. Adkisson ,  Panglijen Candra ,  Thomas J. Dunbar ,  Jeffrey P. Gambino ,  Mark D. Jaffe ,  Anthony K. Stamper ,  Randy L. Wolf

发明人： James W. Adkisson ,  Panglijen Candra ,  Thomas J. Dunbar ,  Jeffrey P. Gambino ,  Mark D. Jaffe ,  Anthony K. Stamper ,  Randy L. Wolf

IPC分类号： H03H3/08 ,  H03H9/05 ,  H03H9/10 ,  H01L41/09 ,  H03H9/64

CPC分类号： H03H3/04 ,  B81B7/008 ,  B81B7/02 ,  G06F17/5045 ,  H01L41/094 ,  H01L41/0973 ,  H03H3/08 ,  H03H9/0542 ,  H03H9/0547 ,  H03H9/1064 ,  H03H9/1092 ,  H03H9/48 ,  H03H9/542 ,  H03H9/6403 ,  H03H9/6423 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49126 ,  Y10T29/49147 ,  Y10T29/49156

摘要： Switchable and/or tunable filters and methods of manufacture. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed on a piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEMS beam formed above the piezoelectric substrate and at a location in which, upon actuation, the MEMS beam shorts the piezoelectric filter structure by contacting at least one of the plurality of electrodes.

摘要翻译： 可切换和/或可调滤波器和制造方法。 形成滤波器的方法包括形成至少一个包括形成在压电基片上的多个电极的压电滤波器结构。 该方法还包括形成微电子机械结构（MEMS），该微机电结构（MEMS）包括形成在压电基板上方的MEMS光束，并且在致动时，MEMS光束通过使多个或多个之中的至少一个接触而使压电滤波器结构短路的位置 的电极。

公开(公告)号：US09099982B2

公开(公告)日：2015-08-04

申请号：US13358172

申请日：2012-01-25

申请人： James W. Adkisson ,  Panglijen Candra ,  Thomas J. Dunbar ,  Jeffrey P. Gambino ,  Mark D. Jaffe ,  Anthony K. Stamper ,  Randy L. Wolf

发明人： James W. Adkisson ,  Panglijen Candra ,  Thomas J. Dunbar ,  Jeffrey P. Gambino ,  Mark D. Jaffe ,  Anthony K. Stamper ,  Randy L. Wolf

IPC分类号： H03H3/08 ,  H01L41/08 ,  H03H9/64 ,  H03H3/007 ,  H03H9/02

CPC分类号： H03H9/13 ,  G06F17/5081 ,  H01L41/08 ,  H03H3/08 ,  H03H9/02543 ,  H03H9/64 ,  H03H9/6403 ,  H03H9/6413 ,  H03H2003/0071 ,  H03H2009/02299 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49126 ,  Y10T29/49147 ,  Y10T29/49155

摘要： Switchable and/or tunable filters, methods of manufacture and design structures are provided herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed on a piezoelectric substrate. The method further includes forming a fixed electrode with a plurality of fingers on the piezoelectric substrate. The method further includes forming a moveable electrode with a plurality of fingers over the piezoelectric substrate. The method further includes forming actuators aligned with one or more of the plurality of fingers of the moveable electrode.

摘要翻译： 本发明提供了可切换和/或可调滤波器，制造方法和设计结构。 形成滤波器的方法包括形成至少一个包括形成在压电基片上的多个电极的压电滤波器结构。 该方法还包括在压电基片上形成多个指状物的固定电极。 该方法还包括在压电衬底上形成具有多个指状物的可移动电极。 该方法还包括形成与可移动电极的多个指状物中的一个或多个对准的致动器。

公开(公告)号：US09225311B2

公开(公告)日：2015-12-29

申请号：US13401418

申请日：2012-02-21

申请人： James W. Adkisson ,  Panglijen Candra ,  Thomas J. Dunbar ,  Mark D. Jaffe ,  Anthony K. Stamper ,  Randy L. Wolf

发明人： James W. Adkisson ,  Panglijen Candra ,  Thomas J. Dunbar ,  Mark D. Jaffe ,  Anthony K. Stamper ,  Randy L. Wolf

IPC分类号： H03H3/02 ,  H03H3/007 ,  H03H9/56 ,  H03H9/10 ,  H03H9/24 ,  H03H3/08 ,  H03H9/02 ,  G06F17/50 ,  H03H9/15

CPC分类号： H03H3/007 ,  G06F17/5063 ,  H03H3/02 ,  H03H3/08 ,  H03H9/02007 ,  H03H9/02244 ,  H03H9/02992 ,  H03H9/1071 ,  H03H9/2447 ,  H03H9/2452 ,  H03H9/2457 ,  H03H9/2463 ,  H03H9/54 ,  H03H9/56 ,  H03H9/64 ,  H03H2003/022 ,  H03H2003/023 ,  H03H2003/027 ,  H03H2009/155 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49155

摘要： Switchable and/or tunable filters, methods of manufacture and design structures are provided. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed to be in contact with at least one piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEMS beam in which, upon actuation, the MEMS beam will turn on the at least one piezoelectric filter structure by interleaving electrodes in contact with the piezoelectric substrate or sandwiching the at least one piezoelectric substrate between the electrodes.

摘要翻译： 提供可切换和/或可调滤波器，制造方法和设计结构。 形成滤波器的方法包括形成至少一个压电滤波器结构，其包括形成为与至少一个压电基板接触的多个电极。 该方法还包括形成包括MEMS光束的微电子机械结构（MEMS），其中，在致动时，MEMS光束将通过交替与压电基板接触的电极或者将 电极之间的至少一个压电基板。

公开(公告)号：US08168474B1

公开(公告)日：2012-05-01

申请号：US12987402

申请日：2011-01-10

申请人： James W. Adkisson ,  Panglijen Candra ,  Thomas J. Dunbar ,  Jeffrey P. Gambino ,  Mark D. Jaffe ,  Robert K. Leidy ,  Yen L. Lim

发明人： James W. Adkisson ,  Panglijen Candra ,  Thomas J. Dunbar ,  Jeffrey P. Gambino ,  Mark D. Jaffe ,  Robert K. Leidy ,  Yen L. Lim

IPC分类号： H01L21/00

CPC分类号： H01L21/78 ,  H01L21/76898

摘要： Systems and methods simultaneously form first openings and second openings in a substrate. The first openings are formed smaller than the second openings. The method also simultaneously forms a first material in the first openings and the second openings. The first material fills the first openings, and the first material lines the second openings. The method forms a second material different than the first material in the second openings. The second material fills the second openings. The method forms a plurality of integrated circuit structures over the first material and the second material within the second openings. The method applies mechanical stress to the substrate to cause the substrate to split along the first openings.

摘要翻译： 系统和方法同时在衬底中形成第一开口和第二开口。 第一开口形成为小于第二开口。 该方法还同时在第一开口和第二开口中形成第一材料。 第一材料填充第一开口，第一材料将第二开口排列。 该方法形成与第二开口中的第一材料不同的第二材料。 第二材料填充第二开口。 该方法在第二开口内的第一材料和第二材料上形成多个集成电路结构。 该方法对基板施加机械应力以使基板沿着第一开口分开。

公开(公告)号：US20130113577A1

公开(公告)日：2013-05-09

申请号：US13292729

申请日：2011-11-09

申请人： James W. ADKISSON ,  Panglijen Candra ,  Thomas J. Dunbar ,  Mark D. Jaffe ,  Robert K. Leidy ,  Anthony K. Stamper

发明人： James W. ADKISSON ,  Panglijen Candra ,  Thomas J. Dunbar ,  Mark D. Jaffe ,  Robert K. Leidy ,  Anthony K. Stamper

IPC分类号： H03H9/54 ,  H01L41/22

CPC分类号： H03H9/545 ,  H03H9/0547 ,  H03H9/171 ,  H03H9/173 ,  H03H9/56 ,  H03H2009/02204 ,  Y10T29/42

摘要： Tunable filter structures, methods of manufacture and design structures are disclosed. The method of forming a filter structure includes forming a piezoelectric resonance filter over a cavity structure. The forming of the piezoelectric resonance filter includes: forming an upper electrode on one side of a piezoelectric material; and forming a lower electrode on an opposing side of the piezoelectric material. The method further includes forming a micro-electro-mechanical structure (MEMS) cantilever beam at a location in which, upon actuation, makes contact with the piezoelectric resonance filter.

公开(公告)号：US09054671B2

公开(公告)日：2015-06-09

申请号：US13292729

申请日：2011-11-09

申请人： James W. Adkisson ,  Panglijen Candra ,  Thomas J. Dunbar ,  Mark D. Jaffe ,  Robert K. Leidy ,  Anthony K. Stamper

发明人： James W. Adkisson ,  Panglijen Candra ,  Thomas J. Dunbar ,  Mark D. Jaffe ,  Robert K. Leidy ,  Anthony K. Stamper

IPC分类号： H03H9/00 ,  H03H9/17 ,  H03H9/56 ,  H03H9/05 ,  H01L41/00 ,  H03H9/02

CPC分类号： H03H9/545 ,  H03H9/0547 ,  H03H9/171 ,  H03H9/173 ,  H03H9/56 ,  H03H2009/02204 ,  Y10T29/42

摘要： Tunable filter structures, methods of manufacture and design structures are disclosed. The method of forming a filter structure includes forming a piezoelectric resonance filter over a cavity structure. The forming of the piezoelectric resonance filter includes: forming an upper electrode on one side of a piezoelectric material; and forming a lower electrode on an opposing side of the piezoelectric material. The method further includes forming a micro-electro-mechanical structure (MEMS) cantilever beam at a location in which, upon actuation, makes contact with the piezoelectric resonance filter.

摘要翻译： 公开了可调谐滤波器结构，制造方法和设计结构。 形成滤波器结构的方法包括在空腔结构上形成压电谐振滤波器。 压电谐振滤波器的形成包括：在压电材料的一侧上形成上电极; 以及在所述压电材料的相对侧上形成下电极。 该方法还包括在致动时与压电谐振滤波器接触的位置处形成微机电结构（MEMS）悬臂梁。