公开(公告)号：US5942040A

公开(公告)日：1999-08-24

申请号：US919006

申请日：1997-08-27

申请人： Je-Ha Kim ,  Seok-Kil Han ,  Kwang-Yong Kang

发明人： Je-Ha Kim ,  Seok-Kil Han ,  Kwang-Yong Kang

IPC分类号： H01L21/205 ,  C23C14/28 ,  C23C14/00

CPC分类号： C23C14/28

摘要： Disclosed is a multi-target manipulator for a pulsed laser deposition apparatus. The multi-target manipulator for a pulsed laser deposition apparatus grows a thin film having both a high quality and a repeatability, automatizes a deposition apparatus, and economically performs a pulsed laser deposition, when a thin film is grown by using a pulsed laser deposition apparatus. The multi-target manipulator for a pulsed laser deposition apparatus includes: a driving power providing member which includes a stepping motor and a motion feedthrough thereby providing a rotation driving power to the target disk driving shaft and the target driving motor shaft; a driving power transmission and head supporting member, thereby transmitting a rotation driving power necessary for rotating both the target disk provided from the driving power providing member and the target and supporting the head of the target manipulator; and a head portion, thereby performing rotations of the target disk and the target so as to locate a target material on the focal point of the laser beam.

摘要翻译： 公开了一种用于脉冲激光沉积设备的多目标操纵器。 用于脉冲激光沉积设备的多目标操纵器生长具有高质量和重复性的薄膜，使沉积设备自动化，并且在通过使用脉冲激光沉积设备生长薄膜时经济地执行脉冲激光沉积 。 用于脉冲激光沉积设备的多目标操纵器包括：驱动力提供构件，其包括步进电机和运动馈通，从而向目标盘驱动轴和目标驱动电机轴提供旋转驱动力; 驱动动力传递和头部支撑构件，从而传递旋转驱动力，所述旋转驱动力用于使从驱动力提供构件和目标设置的目标盘两者旋转并支撑目标操纵器的头部; 和头部，从而进行目标盘和目标物的旋转，以便将目标材料定位在激光束的焦点上。

公开(公告)号：US6034348A

公开(公告)日：2000-03-07

申请号：US932546

申请日：1997-09-17

申请人： Je-Ha Kim ,  Seok-Kil Han ,  Kwang-Yong Kang

发明人： Je-Ha Kim ,  Seok-Kil Han ,  Kwang-Yong Kang

IPC分类号： H01L21/3065 ,  B23K26/06 ,  B23K26/00

CPC分类号： B23K26/0665 ,  B23K26/06 ,  B23K26/064 ,  B23K26/0648

摘要： A micro etching system using laser ablation includes a laser generator, an optical fiber waveguide, a laser beam focusing device and a sample platform. The laser generator generates an ultraviolet beam, and the optical fiber waveguide carries the laser beam radiated from the laser generator to the material to be etched. The focusing device is provided between the laser generator and optical fiber waveguide and serves to concentrate the laser beam into the optical fiber. The sample platform controls the position of the material to be etched so that the material is etched at a predetermined angle by the beam emitted from the outlet of the optical fiber waveguide.

摘要翻译： 使用激光烧蚀的微蚀刻系统包括激光发生器，光纤波导，激光束聚焦装置和样品平台。 激光发生器产生紫外光束，并且光纤波导将从激光发生器辐射的激光束传送到待蚀刻的材料。 聚焦装置设置在激光发生器和光纤波导之间，用于将激光束集中到光纤中。 样品平台控制要蚀刻的材料的位置，以便通过从光纤波导的出口发射的光束以预定的角度蚀刻材料。

公开(公告)号：US5824953A

公开(公告)日：1998-10-20

申请号：US708682

申请日：1996-09-05

申请人： Seok-Kil Han ,  Kwang-Yong Kang ,  Je-Ha Kim

发明人： Seok-Kil Han ,  Kwang-Yong Kang ,  Je-Ha Kim

IPC分类号： H01R9/05 ,  G01R1/20 ,  H01R43/00 ,  H05K9/00

CPC分类号： G01R1/20

摘要： A coaxial connector for microwave and millimeter wave measurement can be used by attachment to a vacuum chamber for instrumentation when measuring a high frequency characteristic for various electronic devices at low temperature. The coaxial connector connects microwave instrumenting equipment to a device to be tested within vacuum chamber (e.g., so as to measure a low temperature and high frequency characteristic for a high frequency device). It includes a support plate for attachment to the vacuum chamber and a support screw to prevent the coaxial connector from rotating. The support screw is of hexagonal shape in the exemplary embodiment and is arranged to one side on the center of the support plate. A coaxial cable transmits the measured signal and is extended to pass through the center of the support plate and support screw, and a V-shape connector on each end of the cable for respectively coupling between a fixed sample stand in the vacuum chamber and the microwave instrument equipment.

摘要翻译： 用于微波和毫米波测量的同轴连接器可以在测量低温各种电子设备的高频特性时通过连接到用于仪器的真空室来使用。 同轴连接器将微波仪器设备连接到真空室内要测试的设备（例如，测量高频设备的低温和高频特性）。 它包括用于附接到真空室的支撑板和用于防止同轴连接器旋转的支撑螺钉。 在示例性实施例中，支撑螺钉为六角形，并且布置在支撑板的中心的一侧。 同轴电缆传输测量信号并延伸穿过支撑板和支撑螺钉的中心，以及电缆每端的V形连接器，用于分别耦合在真空室中的固定样品台和微波 仪器设备。