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公开(公告)号：US07509866B2
公开(公告)日：2009-03-31
申请号：US11575829
申请日：2005-08-06
IPC分类号： G01L1/02
CPC分类号： G01L9/0054
摘要： The invention relates to a pressure sensor with a carrier (2), which in an inner region comprises a membrane (4) on which at least one first measurement element (R1−) for detecting a pressure impingement of the membrane (4) is arranged, wherein additionally at least one second measurement element (R3−) for detecting a pressure impingement of the membrane (4) is arranged on the membrane, wherein the first measurement element (R1−) and the second measurement element (R3−) are arranged distanced differently far from the edge of the membrane, and the output signals of the first and the second measurement element (R1−, R3−) are evaluated together in a manner such that the two measurement elements (R1−, R3−) detect a differential pressure acting on the membrane (4), and thereby compensate the influence of the system pressure acting on both sides of the membrane (4).
摘要翻译： 本发明涉及一种具有载体（2）的压力传感器，其在内部区域包括膜（4），其上布置有用于检测膜（4）的压力冲击的至少一个第一测量元件（R1-） ，其中另外用于检测膜（4）的压力冲击的至少一个第二测量元件（R3-）布置在膜上，其中第一测量元件（R1）和第二测量元件（R3-）被布置 远离膜的边缘不同，并且第一和第二测量元件（R1，R3-）的输出信号以这样的方式被一起评估，使得两个测量元件（R1，R3-）检测到 作用在膜（4）上的压差，从而补偿作用在膜（4）两侧的系统压力的影响。
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公开(公告)号：US20080022779A1
公开(公告)日：2008-01-31
申请号：US11575829
申请日：2005-08-06
CPC分类号： G01L9/0054
摘要： The invention relates to a pressure sensor with a carrier (2), which in an inner region comprises a membrane (4) on which at least one first measurement element (R1−) for detecting a pressure impingement of the membrane (4) is arranged, wherein additionally at least one second measurement element (R3−) for detecting a pressure impingement of the membrane (4) is arranged on the membrane, wherein the first measurement element (R1−) and the second measurement element (R3−) are arranged distanced differently far from the edge of the membrane, and the output signals of the first and the second measurement element (R1−, R3−) are evaluated together in a manner such that the two measurement elements (R1−, R3−) detect a differential pressure acting on the membrane (4), and thereby compensate the influence of the system pressure acting on both sides of the membrane (4).
摘要翻译： 本发明涉及一种具有载体（2）的压力传感器，其在内部区域包括膜（4），至少一个用于检测压力冲击的第一测量元件（R 1 - 1） 布置膜（4），其中附加地，用于检测膜（4）的压力冲击的至少一个第二测量元件（R 3→N-3）布置在膜上，其中第一测量 元件（R 1 - 1 - ）和第二测量元件（R 3 - 3 - ）被布置在与膜边缘不同的距离上，并且第一和第 第二测量元件（R 1 - R 3，R 3 - ）被一起评估，使得两个测量元件（R 1 - R 3）检测作用在膜（4）上的压差，从而补偿作用在膜（4）两侧的系统压力的影响。
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公开(公告)号：US07823456B2
公开(公告)日：2010-11-02
申请号：US12405423
申请日：2009-03-17
IPC分类号： G01L1/02
CPC分类号： G01L9/0054
摘要： A pressure sensor is provided with a carrier (2), which in an inner region includes a membrane (4) on which at least one first measurement element (R1−) for detecting a pressure impingement of the membrane (4) is arranged. Additionally, at least one second measurement element (R3−) for detecting a pressure impingement of the membrane (4) is arranged on the membrane. The first measurement element (R1−) and the second measurement element (R3−) are arranged distanced differently far from the edge of the membrane. The output signals of the first and the second measurement element (R1−, R3−) are evaluated together in a manner such that the two measurement elements (R1−, R3−) detect a differential pressure acting on the membrane (4), and thereby compensate the influence of the system pressure acting on both sides of the membrane (4).
摘要翻译： 压力传感器设置有载体（2），其在内部区域包括膜（4），其上布置有用于检测膜（4）的压力冲击的至少一个第一测量元件（R1-）。 另外，用于检测膜（4）的压力冲击的至少一个第二测量元件（R3-）布置在膜上。 第一测量元件（R1-）和第二测量元件（R3-）布置在与膜边缘不同的距离上。 第一和第二测量元件（R1，R3-）的输出信号以两个测量元件（R1，R3-）检测作用在膜（4）上的压差的方式被一起评估，以及 从而补偿作用在膜（4）两侧的系统压力的影响。
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公开(公告)号：US07010984B2
公开(公告)日：2006-03-14
申请号：US10883941
申请日：2004-07-02
IPC分类号： G01L13/02
CPC分类号： G01L13/025 , G01L9/065
摘要： The differential pressure sensor is formed of a semiconductor substrate (1) which is thinned out in an inner region into a membrane (2) which may be impinged by pressure on both sides. Measurement resistances (3a to 3d) for detecting the differential pressure (P1 minus P2) are formed within the membrane (2), and compensation resistances (4) are formed on the carrier, which are connected to measurement resistances (3). The measurement resistances (3) are connected into a first measurement bridge (6) and the compensation resistances (4a to 4d) into a second measurement bridge (7).
摘要翻译： 压差传感器由半导体衬底（1）形成，半导体衬底（1）在内部区域被薄化成可以被压在两侧上的膜（2）。 在膜（2）内形成用于检测压差（P <1> 1减去P＆lt; 2＆gt; 2）的测量电阻（3a〜3d），补偿电阻（4） 形成在与测量电阻（3）连接的载体上。 测量电阻（3）连接到第一测量桥（6）和补偿电阻（4a至4d）中，并入第二测量桥（7）。
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公开(公告)号：US20050011270A1
公开(公告)日：2005-01-20
申请号：US10883941
申请日：2004-07-02
申请人： Jens Krog , Casper Pedersen , Carsten Christensen
发明人： Jens Krog , Casper Pedersen , Carsten Christensen
CPC分类号： G01L13/025 , G01L9/065
摘要： The differential pressure sensor is formed of a semiconductor substrate (1) which is thinned out in an inner region into a membrane (2) which may be impinged by pressure on both sides. Measurement resistances (3a to 3d) for detecting the differential pressure (P1 minus P2) are formed within the membrane (2), and compensation resistances (4) are formed on the carrier, which are connected to measurement resistances (3). The measurement resistances (3) are connected into a first measurement bridge (6) and the compensation resistances (4a to 4d) into a second measurement bridge (7).
摘要翻译： 压差传感器由半导体衬底（1）形成，半导体衬底（1）在内部区域被薄化成可以被压在两侧上的膜（2）。 在膜（2）内形成用于检测压差（P1-P2）的测量电阻（3a〜3d），并且在与测量电阻（3）连接的载体上形成补偿电阻（4）。 测量电阻（3）连接到第一测量桥（6）和补偿电阻（4a至4d）中，并入第二测量桥（7）。
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