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公开(公告)号：US20130155487A1
公开(公告)日：2013-06-20
申请号：US13816031
申请日：2011-01-26
申请人： Jianhong Mao , Deming Tang , Fengqin Han
发明人： Jianhong Mao , Deming Tang , Fengqin Han
IPC分类号： G02B26/00
CPC分类号： G02B26/001 , G02B26/02 , G02B26/0808
摘要： A light modulator pixel unit and the manufacturing method thereof are provided. The pixel unit includes a top electrode formed on a substrate, a movable electrode and a bottom electrode. Under the control of a control circuit, the position of the movable electrode would deflect. When the movable electrode is positioned in a first position, a first light is diffracted on the top electrode; when the movable electrode is positioned in a second position, a second light is diffracted on the top electrode; when the movable electrode is positioned in a third position, a third light is diffracted on the top electrode. The said first light, second light and third light are lights of three primary colors. The light modulator pixel unit of the present invention can modulate lights of three colors and is applicable in the field of micro-display system.
摘要翻译： 提供了光调制器像素单元及其制造方法。 像素单元包括形成在基板上的顶部电极，可动电极和底部电极。 在控制电路的控制下，可动电极的位置将会偏转。 当可动电极位于第一位置时，第一光在顶部电极上衍射; 当可动电极位于第二位置时，第二光在顶部电极上衍射; 当可动电极位于第三位置时，第三光在顶部电极上衍射。 所述第一光，第二光和第三光是三原色的光。 本发明的光调制器像素单元可以调制三种颜色的光，并且可应用于微显示系统领域。
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公开(公告)号：US20130107349A1
公开(公告)日：2013-05-02
申请号：US13810107
申请日：2011-01-26
申请人： Jianhong Mao , Deming Tang , Fengqin Han
发明人： Jianhong Mao , Deming Tang , Fengqin Han
IPC分类号： G02B26/00
CPC分类号： G02B26/001 , G02B26/02 , G02B26/0808 , Y10T29/49117
摘要： A light modulator pixel unit and a method for manufacturing the same are provided. The light modulator pixel unit includes top, movable and bottom electrodes. Under control of a control circuit, the movable electrode may shift to first, second and third positions corresponding to modulations of first, second and third monochromatic lights, respectively. When the movable electrode is at a certain position, the incident light corresponding to the position may be divided into two parts, one is reflected by the top electrode, and the other one may bypass the top electrode and be reflected by the movable electrode. The two parts may interfere destructively. The light modulator pixel unit of the present invention can control monochromatic lights of three special wavelengths by time division, and enable color control and gray control. The unit is applicable in the field of projection display and panel system.
摘要翻译： 提供了一种光调制器像素单元及其制造方法。 光调制器像素单元包括顶部，可移动和底部电极。 在控制电路的控制下，可移动电极可分别转换到对应于第一，第二和第三单色光的调制的第一，第二和第三位置。 当可动电极处于一定位置时，对应于该位置的入射光可分为两部分，一部分被顶部电极反射，另一部分可能旁路顶部电极并被可动电极反射。 这两个部分可能会破坏性地干扰。 本发明的光调制器像素单元可以通过时分控制三种特殊波长的单色光，并且能够进行颜色控制和灰度控制。 该单元适用于投影显示和面板系统领域。
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3.发明授权公开(公告)号：US08854712B2
公开(公告)日：2014-10-07
申请号：US14112165
申请日：2011-12-29
申请人： Jianhong Mao , Deming Tang
发明人： Jianhong Mao , Deming Tang
CPC分类号： G02B26/02 , G02B26/04 , G02B26/0841 , G09G3/34 , G09G3/3433 , H01L29/66742 , H04M1/00
摘要： A display device provided with an MEMS light valve, comprising: a substrate, a fixed optical grating located on the substrate, an MEMS light valve for controlling the opening and closing of the fixed optical grating, the MEMS light valve comprises a first light valve and a second light valve; the opening and closing of the fixed optical grating is controlled via controlling the movement of the first light valve and the second light valve, and the moving directions of the first light valve and the second light valve are opposite. Also disclosed is a method for forming a display device provided with an MEMS light valve. Thus the sensitivity of the MEMS light valve is improved.
摘要翻译： 一种设置有MEMS光阀的显示装置，包括：基板，位于基板上的固定光栅，用于控制固定光栅的打开和关闭的MEMS光阀，MEMS光阀包括第一光阀和 第二个光阀; 通过控制第一光阀和第二光阀的移动来控制固定光栅的打开和关闭，并且第一光阀和第二光阀的移动方向相反。 还公开了一种形成具有MEMS光阀的显示装置的方法。 因此，提高了MEMS光阀的灵敏度。
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4.发明申请公开(公告)号：US20140111842A1
公开(公告)日：2014-04-24
申请号：US14112211
申请日：2011-12-28
申请人： Jianhong Mao , Deming Tang
发明人： Jianhong Mao , Deming Tang
CPC分类号： G02B26/02 , B81B3/0021 , B81C1/00246 , G02B26/0841 , G09G3/3466 , G09G2300/0426
摘要： A display device provided with an MEMS light valve, comprising: a substrate, a fixed grating located on the substrate, an MEMS light valve for controlling the opening and closing of the fixed grating; a guide is disposed on the substrate. The MEMS light valve comprises: a movable grating, a movable electrode and fixed electrodes; the moveable grating is located in the guide and is electrically connected to the guide when contacting the guide; one end of the movable electrode is fixedly connected with the movable grating, and the other end is suspended; and the fixed electrodes and the movable electrode form a capacitor. When a potential difference forms between the fixed electrodes and the movable electrode, the movable electrode drives the movable grating to move in the guide, thereby opening and closing the fixed grating. Therefore, the MEMS light valve sensitivity can be enhanced and reliability is improved.
摘要翻译： 一种设置有MEMS光阀的显示装置，包括：基板，位于基板上的固定光栅，用于控制固定光栅的打开和关闭的MEMS光阀; 引导件设置在基板上。 MEMS光阀包括：可移动光栅，可动电极和固定电极; 可移动光栅位于引导件中，并在与引导件接触时电连接到引导件; 可动电极的一端与可动光栅固定连接，另一端悬挂; 并且固定电极和可动电极形成电容器。 当在固定电极和可动电极之间形成电位差时，可动电极驱动可动光栅在引导件中移动，从而打开和关闭固定光栅。 因此，可以提高MEMS光阀的灵敏度，提高可靠性。
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5.发明申请公开(公告)号：US20140029077A1
公开(公告)日：2014-01-30
申请号：US14112165
申请日：2011-12-29
申请人： Jianhong Mao , Deming Tang
发明人： Jianhong Mao , Deming Tang
CPC分类号： G02B26/02 , G02B26/04 , G02B26/0841 , G09G3/34 , G09G3/3433 , H01L29/66742 , H04M1/00
摘要： A display device provided with an MEMS light valve, comprising: a substrate, a fixed optical grating located on the substrate, an MEMS light valve for controlling the opening and closing of the fixed optical grating, the MEMS light valve comprises a first light valve and a second light valve; the opening and closing of the fixed optical grating is controlled via controlling the movement of the first light valve and the second light valve, and the moving directions of the first light valve and the second light valve are opposite. Also disclosed is a method for forming a display device provided with an MEMS light valve. Thus the sensitivity of the MEMS light valve is improved.
摘要翻译： 一种设置有MEMS光阀的显示装置，包括：基板，位于基板上的固定光栅，用于控制固定光栅的打开和关闭的MEMS光阀，MEMS光阀包括第一光阀和 第二个光阀; 通过控制第一光阀和第二光阀的移动来控制固定光栅的打开和关闭，并且第一光阀和第二光阀的移动方向相反。 还公开了一种形成具有MEMS光阀的显示装置的方法。 因此，提高了MEMS光阀的灵敏度。
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公开(公告)号：US20130309797A1
公开(公告)日：2013-11-21
申请号：US13882337
申请日：2011-05-19
申请人： Jianhong Mao , Deming Tang
发明人： Jianhong Mao , Deming Tang
IPC分类号： B81C1/00
CPC分类号： B81C1/0015 , B81B2203/0118 , B81B2207/07 , B81C1/00293 , B81C2201/0109 , B81C2201/0125 , B81C2203/0145 , G01P15/0802 , G01P2015/0828 , H03H3/0072
摘要： A method for manufacturing a micro-electro-mechanical system (MEMS) device is provided. The method comprises: providing a semiconductor substrate, the semiconductor substrate having a metal interconnection structure (100) formed therein; forming a first sacrificial layer (201) on the surface of the semiconductor substrate, the material of the first sacrificial layer is amorphous carbon; etching the first sacrificial layer to form a first recess (301); covering and forming a first dielectric layer (401) on the surface of the first sacrificial layer; thinning the first dielectric layer by a chemical mechanical polishing (CMP) process, until exposing the first sacrificial layer; forming a micromechanical structure layer (500) on the surface of the first sacrificial layer and exposing the first sacrificial layer, wherein a part of the micromechanical structure layer is connected to the first dielectric layer. The method avoids polishing the amorphous carbon, shortens the period of production, and improves the production efficiency
摘要翻译： 提供了一种用于制造微机电系统（MEMS）装置的方法。 该方法包括：提供半导体衬底，其中形成有金属互连结构（100）的半导体衬底; 在所述半导体衬底的表面上形成第一牺牲层（201），所述第一牺牲层的材料是无定形碳; 蚀刻第一牺牲层以形成第一凹部（301）; 在第一牺牲层的表面上覆盖并形成第一介电层（401）; 通过化学机械抛光（CMP）工艺使第一介电层变薄，直到暴露出第一牺牲层; 在所述第一牺牲层的表面上形成微机械结构层（500）并暴露所述第一牺牲层，其中所述微机械结构层的一部分连接到所述第一介电层。 该方法避免抛光无定形碳，缩短生产周期，提高生产效率
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公开(公告)号：US20130139594A1
公开(公告)日：2013-06-06
申请号：US13703568
申请日：2011-01-26
申请人： Jianhong Mao , Fengqin Han , Deming Tang
发明人： Jianhong Mao , Fengqin Han , Deming Tang
CPC分类号： G01P15/08 , B81B3/0078 , B81B2201/0235 , B81B2201/0242 , G01C19/5733 , G01C25/00 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/0854 , H01L29/84
摘要： An inertia MEMS sensor and a manufacturing method are provided. The inertia MEMS sensor includes a main body and a weight block relatively removable. The main body includes a first main body with a first surface and a second main body vertically connecting with the first surface. A first electrode parallel to the first surface is in the first main body. A second electrode perpendicular to the first surface is in the second main body. The weight block is suspended in a space defined by the first and second main bodies. The weight block includes a third electrode parallel to the first surface, a forth electrode is perpendicular to the first surface, and a weight layer. The third electrode connects with the forth electrode to form a U-shaped groove for accommodating the weight layer, thereby increasing the weight block weight, improving precision and reducing the cost.
摘要翻译： 提供惯性MEMS传感器和制造方法。 惯性MEMS传感器包括主体和相对可拆卸的重量块。 主体包括具有第一表面的第一主体和与第一表面垂直连接的第二主体。 平行于第一表面的第一电极在第一主体中。 垂直于第一表面的第二电极在第二主体中。 重物块悬挂在由第一和第二主体限定的空间中。 重量块包括平行于第一表面的第三电极，第四电极垂直于第一表面和重量层。 第三电极与第四电极连接以形成用于容纳重量层的U形槽，从而增加重量块重量，提高精度并降低成本。
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公开(公告)号：US08841155B2
公开(公告)日：2014-09-23
申请号：US13882337
申请日：2011-05-19
申请人： Jianhong Mao , Deming Tang
发明人： Jianhong Mao , Deming Tang
摘要： A method for manufacturing a micro-electro-mechanical system (MEMS) device is provided. The method comprises: providing a semiconductor substrate, the semiconductor substrate having a metal interconnection structure (100) formed therein; forming a first sacrificial layer (201) on the surface of the semiconductor substrate, the material of the first sacrificial layer is amorphous carbon; etching the first sacrificial layer to form a first recess (301); covering and forming a first dielectric layer (401) on the surface of the first sacrificial layer; thinning the first dielectric layer by a chemical mechanical polishing (CMP) process, until exposing the first sacrificial layer; forming a micromechanical structure layer (500) on the surface of the first sacrificial layer and exposing the first sacrificial layer, wherein a part of the micromechanical structure layer is connected to the first dielectric layer. The method avoids polishing the amorphous carbon, shortens the period of production, and improves the production efficiency.
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9.发明授权公开(公告)号：US09019587B2
公开(公告)日：2015-04-28
申请号：US14112211
申请日：2011-12-28
申请人： Jianhong Mao , Deming Tang
发明人： Jianhong Mao , Deming Tang
CPC分类号： G02B26/02 , B81B3/0021 , B81C1/00246 , G02B26/0841 , G09G3/3466 , G09G2300/0426
摘要： A display device provided with an MEMS light valve, comprising: a substrate, a fixed grating located on the substrate, an MEMS light valve for controlling the opening and closing of the fixed grating; a guide is disposed on the substrate. The MEMS light valve comprises: a movable grating, a movable electrode and fixed electrodes; the moveable grating is located in the guide and is electrically connected to the guide when contacting the guide; one end of the movable electrode is fixedly connected with the movable grating, and the other end is suspended; and the fixed electrodes and the movable electrode form a capacitor. When a potential difference forms between the fixed electrodes and the movable electrode, the movable electrode drives the movable grating to move in the guide, thereby opening and closing the fixed grating. Therefore, the MEMS light valve sensitivity can be enhanced and reliability is improved.
摘要翻译： 一种设置有MEMS光阀的显示装置，包括：基板，位于基板上的固定光栅，用于控制固定光栅的打开和关闭的MEMS光阀; 引导件设置在基板上。 MEMS光阀包括：可移动光栅，可动电极和固定电极; 可移动光栅位于引导件中，并在与引导件接触时电连接到引导件; 可动电极的一端与可动光栅固定连接，另一端悬挂; 并且固定电极和可动电极形成电容器。 当在固定电极和可动电极之间形成电位差时，可动电极驱动可动光栅在引导件中移动，从而打开和关闭固定光栅。 因此，可以提高MEMS光阀的灵敏度，提高可靠性。
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10.发明申请公开(公告)号：US20130129118A1
公开(公告)日：2013-05-23
申请号：US13810698
申请日：2011-01-26
申请人： Jianhong Mao , Deming Tang
发明人： Jianhong Mao , Deming Tang
CPC分类号： H04R9/08 , H04R19/005 , H04R19/04 , H04R31/00 , Y10T29/49002 , Y10T29/49005 , Y10T29/49007 , Y10T29/4908
摘要： A micro-electro-mechanical microphone and manufacturing method thereof are provided in the invention. The micro-electro-mechanical microphone comprises: a diaphragm, which is formed on a surface of one side of a semiconductor substrate, exposed to the outside surroundings, and can vibrate freely by sensing the pressure generated by sound waves; an electrode plate with air holes, which is under the diaphragm; an isolation structure for fixing the diaphragm and the electrode plate; an air gap cavity between the diaphragm and the electrode plate, and a back cavity under the electrode plate and in the semiconductor substrate; a second cavity formed on the surface of the same side of the semiconductor substrate and in an open manner; the air gap cavity is connected with the back cavity through the air holes of the electrode plate; the back cavity is connected with the second cavity through an air groove formed in the semiconductor substrate. The micro-electro-mechanical microphone in the invention is formed on the surface of one side of the semiconductor substrate, and the manufacturing method thereof is compatible with CMOS technics, therefore the device is easy to be miniaturized and integrated into a semiconductor chip.
摘要翻译： 本发明提供一种微机电麦克风及其制造方法。 微机电麦克风包括：隔膜，其形成在半导体衬底的一侧的表面上，暴露于外部环境，并且可以通过感测由声波产生的压力而自由地振动; 在隔膜下方具有气孔的电极板; 用于固定隔膜和电极板的隔离结构; 隔膜和电极板之间的气隙腔，以及电极板下方和半导体衬底中的后腔; 第二腔，形成在半导体衬底的同一侧的表面上并以开放的方式形成; 气隙腔通过电极板的气孔与后腔相连; 后腔通过形成在半导体衬底中的空气槽与第二腔连接。 本发明的微机电麦克风形成在半导体基板的一侧的表面上，其制造方法与CMOS技术相兼容，因此该器件易于小型化并集成到半导体芯片中。
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