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公开(公告)号:US20130323879A1
公开(公告)日:2013-12-05
申请号:US13961111
申请日:2013-08-07
申请人: Jin-Han PARK , Myeng-Woo NAM , Eui-Shin SHIN , Sung-Gon KIM
发明人: Jin-Han PARK , Myeng-Woo NAM , Eui-Shin SHIN , Sung-Gon KIM
IPC分类号: H01L51/00
CPC分类号: H01L51/0026 , H01L21/67115 , H01L21/6715 , H01L51/0008 , H01L51/56
摘要: A coating apparatus includes a stage supporting a coating target, a coating part on the stage, the coating part being configured to apply a coating material onto the coating target, and a heating source opposite to and spaced apart from the stage, the heating source being configured to supply heat to the coating target after application of the coating material onto the coating target.
摘要翻译: 一种涂布装置,包括:支撑涂布目标的载物台;载物台上的涂布部;涂布部,被配置为在涂布目标上涂布涂料;以及加热源,与所述载物台相对且间隔开,所述加热源为 被配置为在将涂覆材料施加到涂覆靶上之后向涂覆目标提供热量。