公开(公告)号：US07298954B2

公开(公告)日：2007-11-20

申请号：US11154019

申请日：2005-06-16

申请人： Xueyuan Liu ,  Peter M. Gulvin ,  Kristine A. German ,  Yao Rong Wang ,  Jun Ma ,  Pinyen Lin ,  Joel A. Kubby ,  Kathleen A. Feinberg

发明人： Xueyuan Liu ,  Peter M. Gulvin ,  Kristine A. German ,  Yao Rong Wang ,  Jun Ma ,  Pinyen Lin ,  Joel A. Kubby ,  Kathleen A. Feinberg

IPC分类号： G02B6/26

CPC分类号： G02B6/358 ,  G02B6/266 ,  G02B6/3508 ,  G02B6/3544 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/3594 ,  G02B6/3596

摘要： An improved waveguide shuttle optical switch design which provides the function of a variable optical attenuator (VOA). A small degree of intentional misalignment of the waveguide will create different levels of optical attenuation. By finely controlling the misalignment of a selected switched position, a single device may be realized that will provide the functions of both switching and attenuating or just attenuation alone. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning a waveguide shuttle platform. The integration of the switching function and the VOA function reduce the optical loss which is otherwise unavoidable when the inevitable alternative of a separate switch and a separate VOA must necessarily be employed. The resultant improved device can also be applied for correcting the difference in optical intensity created by the manufacturing tolerances inherent in the fabrication of array waveguide gratings.

摘要翻译： 提供了可变光衰减器（VOA）的功能的改进的波导穿梭光开关设计。 波导的有意的不对准会导致不同程度的光衰减。 通过精细地控制所选择的切换位置的未对准，可以实现单个设备，其将提供单独切换和衰减或仅仅衰减的功能。 光学MEMS器件利用与用于对准波导穿梭平台的热驱动致动器相关联的闭锁机构。 开关功能和VOA功能的集成减少光损耗，否则当必须采用单独的开关和单独的VOA的不可避免的替代方案时，光损失是不可避免的。 所得到的改进的器件还可以用于校正由阵列波导光栅的制造中固有的制造公差产生的光强差。

公开(公告)号：US06968100B2

公开(公告)日：2005-11-22

申请号：US10712200

申请日：2003-11-12

申请人： Joel A. Kubby ,  Kathleen A. Feinberg ,  Kristine A. German ,  Peter M. Gulvin ,  Jun Ma ,  Pinyen Lin

发明人： Joel A. Kubby ,  Kathleen A. Feinberg ,  Kristine A. German ,  Peter M. Gulvin ,  Jun Ma ,  Pinyen Lin

IPC分类号： G02B26/02 ,  B81B3/00 ,  G02B6/12 ,  G02B6/35 ,  G02B6/26 ,  G02B6/42

CPC分类号： G02B6/3508 ,  G02B6/356 ,  G02B6/358 ,  G02B2006/12145

摘要： An optical micro-electro-mechanical system (MEMS) switch is disclosed. In a preferred embodiment the optical MEMS switch is used as an M×N optical signal switching system. The optical MEMS switch comprises a plurality of optical waveguides formed on a shuttle for switching optical states wherein the state of the optical switch is changed by a system of drive and latch actuators. The optical MEMS switch utilizes a latching mechanism in association with a thermal drive actuator for aligning the waveguide shuttle. In use the optical MEMS switch may be integrated with other optical components to form planar light circuits (PLCs). When switches and PLCs are integrated together on a silicon chip, compact higher functionality devices, such as Reconfigurable Optical Add-Drop Multiplexers (ROADMs), may be fabricated.

摘要翻译： 公开了一种光学微机电系统（MEMS）开关。 在优选实施例中，光学MEMS开关用作MxN光信号交换系统。 光学MEMS开关包括形成在梭子上的多个光波导，用于切换光学状态，其中光学开关的状态由驱动和闩锁致动器的系统改变。 光学MEMS开关利用与用于对准波导穿梭机的热驱动致动器相关联的闭锁机构。 在使用中，光学MEMS开关可以与其他光学部件集成以形成平面光电路（PLC）。 当开关和PLC集成在硅芯片上时，可以制造紧凑的更高功能的器件，例如可重配置光插座多路复用器（ROADM）。

公开(公告)号：US06947624B2

公开(公告)日：2005-09-20

申请号：US10712203

申请日：2003-11-12

申请人： Joel A. Kubby ,  Kathleen A. Feinberg ,  Kristine A. German ,  Peter M. Gulvin ,  Jun Ma ,  Pinyen Lin

发明人： Joel A. Kubby ,  Kathleen A. Feinberg ,  Kristine A. German ,  Peter M. Gulvin ,  Jun Ma ,  Pinyen Lin

IPC分类号： G02B6/12 ,  G02B6/35 ,  G02B6/26 ,  G02B6/42

CPC分类号： G02B6/358 ,  G02B6/3508 ,  G02B6/3566 ,  G02B6/3576 ,  G02B6/3584 ,  G02B6/3594 ,  G02B2006/12145

摘要： An optical micro-electro-mechanical system (MEMS) switch is disclosed. In a preferred embodiment the optical MEMS switch is used as an M×N optical signal switching system. The optical MEMS switch comprises a plurality of optical waveguides formed on a cantilever beam platform for switching optical states wherein the state of the optical switch is changed by a system of drive and latch actuators. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning the cantilever beam platform. In use the optical MEMS device may be integrated with other optical components to form planar light circuits (PLCs). When switches and PLCs are integrated together on a silicon chip, compact higher functionality devices, such as Reconfigurable Optical Add-Drop Multiplexers (ROADMs), may be fabricated.

摘要翻译： 公开了一种光学微机电系统（MEMS）开关。 在优选实施例中，光学MEMS开关用作MxN光信号交换系统。 光学MEMS开关包括形成在悬臂梁平台上的多个光波导，用于切换光学状态，其中光开关的状态由驱动和闩锁致动器的系统改变。 光学MEMS器件利用与用于对准悬臂梁平台的热驱动致动器相关联的闩锁机构。 在使用中，光学MEMS器件可以与其他光学部件集成以形成平面光电路（PLC）。 当开关和PLC集成在硅芯片上时，可以制造紧凑的更高功能的器件，例如可重配置光插座多路复用器（ROADM）。

公开(公告)号：US06985651B2

公开(公告)日：2006-01-10

申请号：US10772693

申请日：2004-02-05

申请人： Jun Ma ,  Joel A. Kubby ,  Kristine A. German ,  Peter M. Gulvin ,  Pinyen Lin

发明人： Jun Ma ,  Joel A. Kubby ,  Kristine A. German ,  Peter M. Gulvin ,  Pinyen Lin

IPC分类号： G02B6/26 ,  G02B6/42 ,  H01H37/00

CPC分类号： B81B3/0018 ,  G02B6/3566 ,  G02B6/3576 ,  G02B6/3584

摘要： A thermal actuator comprises a substantially straight beam. The beam has a beam length and a beam mid-point. The beam comprises a plurality of beam segments with beam segment lengths. Each beam segment has a beam segment neutral axis, thus forming a corresponding plurality of beam segment neutral axes. The beam segment neutral axes are offset along the beam length based on a predetermined pattern. As the beam is heated by an included heating means, the beam buckles. The buckling of the beam, in turn, causes the beam mid-point to translate or move in the predetermined direction. The beam mid-point movement, in turn, operates an included optical waveguide switch. The heating means comprises any of Joule heating, eddy current heating, conduction heating, convection heating and radiation heating.

摘要翻译： 热致动器包括基本上直的梁。 光束具有光束长度和光束中点。 梁包括具有梁段长度的多个梁段。 每个光束段具有光束段中性轴线，从而形成相应的多个光束段中性轴线。 光束段中性轴基于预定图案沿光束长度偏移。 当束被加热装置加热时，光束弯曲。 光束的弯曲又使光束中点在预定方向上平移或移动。 光束中点运动依次运行附带的光波导开关。 加热装置包括焦耳加热，涡流加热，传导加热，对流加热和辐射加热中的任何一种。

公开(公告)号：US06983088B2

公开(公告)日：2006-01-03

申请号：US10634941

申请日：2003-08-05

申请人： Joel A. Kubby ,  Jun Ma ,  Kristine A. German ,  Peter M. Gulvin ,  Pinyen Lin

发明人： Joel A. Kubby ,  Jun Ma ,  Kristine A. German ,  Peter M. Gulvin ,  Pinyen Lin

IPC分类号： G02B6/26 ,  G02B6/42 ,  H01H37/00

CPC分类号： G02B6/3576 ,  B81B3/0018 ,  G02B6/3566 ,  G02B6/3584

摘要： A thermal actuator comprises a plurality of substantially straight and parallel beams arranged to form a beam array. The midpoint of each beam is attached or coupled to an orthogonal coupling beam. Each array beam has a beam heating parameter with a corresponding beam heating parameter value. The beam heating parameter values vary across the beam array based on a predetermined pattern. As the beams are heated by an included heating means, the distribution of beam temperatures in the beam array becomes asymmetric, thus causing the beam array to buckle. The buckling of the beams in the beam array, in turn, causes the attached coupling beam to move in a predetermined direction. The coupling beam motion, in turn, operates an included optical waveguide switch. The beams in the beam array are heated by any of Joule heating, eddy current heating, conduction heating, convection heating and radiation heating.

摘要翻译： 热致动器包括布置成形成束阵列的多个基本上直的和平行的光束。 每个光束的中点附加或耦合到正交耦合光束。 每个阵列光束具有具有对应的光束加热参数值的光束加热参数。 光束加热参数值基于预定图案在波束阵列上变化。 当束被加热装置加热时，光束阵列中光束温度的分布变得不对称，从而使光束阵列发生弯曲。 光束阵列中的光束的弯曲又使连接的光束沿预定的方向移动。 耦合光束运动反过来操作包括的光波导开关。 光束阵列中的光束通过焦耳加热，涡流加热，传导加热，对流加热和辐射加热中的任何一种加热。

公开(公告)号：US07242825B2

公开(公告)日：2007-07-10

申请号：US11010769

申请日：2004-12-13

申请人： Pinyen Lin ,  Yao Rong Wang ,  Jun Ma ,  Xueyuan Liu ,  Peter M. Gulvin ,  Kristine A. German ,  Joel A. Kubby

发明人： Pinyen Lin ,  Yao Rong Wang ,  Jun Ma ,  Xueyuan Liu ,  Peter M. Gulvin ,  Kristine A. German ,  Joel A. Kubby

IPC分类号： G02B6/35

CPC分类号： G02B6/3508 ,  G02B6/266 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3594 ,  G02B6/3596

摘要： An improved cantilever beam optical switch design which provides the function of a variable optical attenuator (VOA). A small degree of intentional misalignment of the waveguide will create different levels of optical attenuation. By finely controlling the misalignment of a selected switched position, a single device may be realized that will provide the functions of both switching and attenuating or just attenuation alone. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning a cantilever beam platform. The integration of the switching function and the VOA function reduce the optical loss which is otherwise unavoidable when the inevitable alterative of a separate switch and a separate VOA must necessarily be employed. The resultant improved device can also be applied for correcting the difference in optical intensity created by the manufacturing tolerances inherent in the fabrication of array waveguide gratings.

摘要翻译： 改进的悬臂光束开关设计，提供可变光衰减器（VOA）的功能。 波导的有意的不对准会导致不同程度的光衰减。 通过精细地控制所选择的切换位置的未对准，可以实现单个设备，其将提供单独切换和衰减或仅仅衰减的功能。 光学MEMS器件利用与用于对准悬臂梁平台的热驱动致动器相关联的闩锁机构。 开关功能和VOA功能的集成减少了当必须采用单独的开关和单独的VOA的不可避免的替代时否则不可避免的光损耗。 所得到的改进的器件还可以用于校正由阵列波导光栅的制造中固有的制造公差产生的光强差。

公开(公告)号：US06985650B2

公开(公告)日：2006-01-10

申请号：US10772564

申请日：2004-02-05

申请人： Jun Ma ,  Joel A. Kubby ,  Kristine A. German ,  Peter M. Gulvin ,  Pinyen Lin

发明人： Jun Ma ,  Joel A. Kubby ,  Kristine A. German ,  Peter M. Gulvin ,  Pinyen Lin

IPC分类号： G02B6/26 ,  G02B6/42 ,  H01H37/00

CPC分类号： B81B3/0018 ,  G02B6/3566 ,  G02B6/3576 ,  G02B6/3584

摘要： A thermal actuator comprises a substantially straight beam. The beam has a beam length and a beam mid-point. The beam comprises a plurality of beam segments. Each beam segment has a beam segment width, the beam thus forming a corresponding plurality of beam segment widths. The beam segment widths vary along the beam length based on a predetermined pattern. As the beam is heated by an included heating means, the beam buckles. The buckling of the beam, in turn, causes the beam mid-point to translate or move in a predetermined direction. The beam mid-point movement, in turn, operates an included optical waveguide switch. The heating means comprises any of Joule heating, eddy current heating, conduction heating, convection heating and radiation heating.

摘要翻译： 热致动器包括基本上直的梁。 光束具有光束长度和光束中点。 梁包括多个梁段。 每个光束段具有光束段宽度，因此光束形成相应的多个光束段宽度。 光束段宽度基于预定图案沿着光束长度变化。 当束被加热装置加热时，光束弯曲。 光束的弯曲又使光束中点在预定方向上平移或移动。 光束中点运动依次运行附带的光波导开关。 加热装置包括焦耳加热，涡流加热，传导加热，对流加热和辐射加热中的任何一种。

公开(公告)号：US06828887B2

公开(公告)日：2004-12-07

申请号：US10063762

申请日：2002-05-10

申请人： Joel A. Kubby ,  Fuqian Yang ,  Jun Ma ,  Kristine A. German ,  Peter M. Gulvin

发明人： Joel A. Kubby ,  Fuqian Yang ,  Jun Ma ,  Kristine A. German ,  Peter M. Gulvin

IPC分类号： H01H5122

CPC分类号： G02B6/3508 ,  B81B3/0054 ,  B81B2201/032 ,  G02B6/3546 ,  G02B6/3568 ,  G02B6/3582 ,  G02B6/3596 ,  H01H2001/0042

摘要： A bistable microelectromechanical system (MEMS) based system comprises a micromachined beam having a first stable state, in which the beam is substantially stress-free and has a specified non-linear shape, and a second stable state. The curved shape may comprises a simple curve or a compound curve. In embodiments, the boundary conditions for the beam are fixed boundary conditions, bearing boundary conditions, spring boundary conditions, or a combination thereof. The system may further comprise an actuator arranged to move the beam between the first and second stable states and a movable element that is moved between a first position and a second position in accordance with the movement of the beam between the first and second stable states. The actuator may comprise one of a thermal actuator, an electrostatic actuator, a piezoelectric actuator and a magnetic actuator. The actuator may further comprise a thermal impact actuator or a zippering electrostatic actuator.

摘要翻译： 基于双稳态微机电系统（MEMS）的系统包括具有第一稳定状态的微加工梁，其中梁基本上无应力且具有特定的非线性形状和第二稳定状态。 弯曲形状可以包括简单曲线或复合曲线。 在实施例中，梁的边界条件是固定的边界条件，轴承边界条件，弹簧边界条件或其组合。 系统还可以包括致动器，其被布置成在第一和第二稳定状态之间移动梁，以及根据梁在第一和第二稳定状态之间的移动而在第一位置和第二位置之间移动的可动元件。 致动器可以包括热致动器，静电致动器，压电致动器和磁致动器中的一个。 致动器还可以包括热冲击致动器或拉链静电致动器。

公开(公告)号：US07070699B2

公开(公告)日：2006-07-04

申请号：US10727191

申请日：2003-12-03

申请人： Joel A. Kubby ,  Fuqian Yang ,  Jun Ma ,  Kristine A. German ,  Peter M. Gulvin

发明人： Joel A. Kubby ,  Fuqian Yang ,  Jun Ma ,  Kristine A. German ,  Peter M. Gulvin

IPC分类号： B29D11/00 ,  C23F1/00

CPC分类号： G02B6/3508 ,  B81B3/0054 ,  B81B2201/032 ,  G02B6/3546 ,  G02B6/3568 ,  G02B6/3582 ,  G02B6/3596 ,  H01H2001/0042

摘要： A bistable microelectromechanical system (MEMS) based system comprises a micromachined beam having a first stable state, in which the beam is substantially stress-free and has a specified non-linear shape, and a second stable state. The curved shape may comprises a simple curve or a compound curve. In embodiments, the boundary conditions for the beam are fixed boundary conditions, bearing boundary conditions, spring boundary conditions, or a combination thereof. The system may further comprise an actuator arranged to move the beam between the first and second stable states and a movable element that is moved between a first position and a second position in accordance with the movement of the beam between the first and second stable states. The actuator may comprise one of a thermal actuator, an electrostatic actuator, a piezoelectric actuator and a magnetic actuator. The actuator may further comprise a thermal impact actuator or a zippering electrostatic actuator.

公开(公告)号：US07224883B2

公开(公告)日：2007-05-29

申请号：US11094408

申请日：2005-03-31

申请人： Peter M. Gulvin ,  Yao Rong Wang ,  Jun Ma ,  Kathleen A. Feinberg ,  Pinyen Lin

发明人： Peter M. Gulvin ,  Yao Rong Wang ,  Jun Ma ,  Kathleen A. Feinberg ,  Pinyen Lin

IPC分类号： G02B6/00

CPC分类号： G02B6/3508 ,  G02B6/357 ,  G02B6/358

摘要： An optical switch for routing signals includes a latch receiver connected to a waveguide that routes the signals and an actuator that includes an upper plate, a lower plate and a latch connected to the lower plate, the lower plate of the actuator moving vertically when power is applied to the lower plate, causing the latch to move vertically and engage the latch receiver. A latching system includes a switch that includes a latch formed to include an extension on one end of the latch, the latch being driven by power, a latch receiver that is formed to receive the latch and a controller that controls the extension of the latch to engage the latch receiver when the power is applied to the latch, and controls the extension of the latch to lock in place against the latch receiver when the power is removed from the latch.

摘要翻译： 用于路由信号的光学开关包括连接到路由信号的波导的闩锁接收器和包括连接到下板的上板，下板和闩锁的致动器，致动器的下板在功率为 施加到下板，使得闩锁垂直移动并接合闩锁接收器。 闭锁系统包括开关，其包括形成为在闩锁的一端包括延伸部的闩锁，闩锁由电力驱动，形成为接收闩锁的闩锁接收器和控制闩锁延伸到 当电源被施加到闩锁时，将闩锁接收器接合，并且当电源从闩锁移除时，控制闩锁的延伸以锁定到锁定接收器上。