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公开(公告)号：US20100230581A1
公开(公告)日：2010-09-16
申请号：US12293700
申请日：2007-03-26
IPC分类号： H01L27/144
CPC分类号： H01L27/14618 , B64G1/363 , H01L27/14623 , H01L31/02024 , H01L31/0203 , H01L31/02164 , H01L2924/0002 , H01L2924/00
摘要： Light sensor, comprising a non-translucent layer (1) having a translucent aperture (2), and a sensor array layer (3), comprising an array of op to-electrical sensor elements (3a-d), as well as a translucent solid first carrier layer (4) to which said non-translucent layer is applied at one side and said sensor array layer at the other side. A multitude of such light sensors can be manufactured by taking a first substrate (4) which is suitable as a translucent solid first carrier layer for said multitude of light sensors, applying the non-translucent layers (1) including an aperture (2) in each of them for said multitude of light sensors at one side of the first substrate and applying the sensor array layers (3) for said multitude of light sensors at the other side of the first substrate and, finally, separating the individual light sensors (7a-b). The light sensor may comprise an integrated opto-electric power supply (8, 9).
摘要翻译： 光传感器，包括具有半透明孔（2）的非半透明层（1）和传感器阵列层（3），所述传感器阵列层（3）包括一组运算电传感器元件（3a-d），以及半透明 固体第一载体层（4），一侧涂有所述非半透明层，另一侧涂敷所述传感器阵列层。 可以通过采用适合作为所述多个光传感器的半透明固体第一载体层的第一基板（4）来制造多个这样的光传感器，将包括孔（2）的非半透明层（1） 它们中的每一个用于在第一基板的一侧处的所述多个光传感器，并且在第一基板的另一侧上施加用于所述多个光传感器的传感器阵列层（3），并且最后将各个光传感器（7a -b）。 光传感器可以包括集成的光电电源（8,9）。
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2.发明授权公开(公告)号：US08476167B2
公开(公告)日：2013-07-02
申请号：US13020399
申请日：2011-02-03
申请人： Hubert Adriaan Van Mierlo , Erik Leonardus Ham , Hendricus Johannes Maria Meijer , Hendrik Antony Johannes Neerhof , Joost Jeroen Ottens , Johannes Adrianus Petrus Leijtens , Marco Le Kluse , Jan Hopman , Johannes Hubertus Josephina Moors
发明人： Hubert Adriaan Van Mierlo , Erik Leonardus Ham , Hendricus Johannes Maria Meijer , Hendrik Antony Johannes Neerhof , Joost Jeroen Ottens , Johannes Adrianus Petrus Leijtens , Marco Le Kluse , Jan Hopman , Johannes Hubertus Josephina Moors
IPC分类号： H01L21/311
CPC分类号： H01L21/6831 , G03F7/70708 , Y10T29/49117
摘要： The invention relates to a method of manufacturing an electrostatic clamp configured to electrostatically clamp an article to an article support in a lithographic apparatus. The method includes providing a first layer of material, etching a recess in the first layer of material, and disposing an electrode in the recess of the first layer of material.
摘要翻译： 本发明涉及一种制造静电夹具的方法，所述静电夹具被配置为将制品静电地夹持在光刻设备中的制品支撑件上。 该方法包括提供第一层材料，蚀刻第一层材料中的凹槽，以及将电极设置在第一层材料的凹槽中。
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公开(公告)号：US08249809B2
公开(公告)日：2012-08-21
申请号：US12445040
申请日：2007-10-11
CPC分类号： B64G1/361 , G01C21/025 , G01S3/7867
摘要： A star tracker is used to measure the direction of stars. Preferably a wide imaging range is provided so that a reliable orientation of the star tracker can be computed from measurements of the directions of star at substantially different directions. The star tracker comprises a light baffle and located between the light baffle and an image sensing arrangement. The light baffle comprises an array of walls, including sidewalls and at least one internal wall between the sidewalls. Preferably, the side walls and the at least one internal wall are oriented at mutually different orientations emanating from a virtual line of intersection of the planes of the walls. Thus a range of star directions can be imaged with constant sensitivity.
摘要翻译： 星际跟踪器用于测量星星的方向。 优选地，提供宽的成像范围，使得可以通过在基本上不同的方向上的星形方向的测量来计算星形跟踪器的可靠取向。 星形跟踪器包括光挡板并且位于光挡板和图像感测装置之间。 光挡板包括壁阵列，包括侧壁和在侧壁之间的至少一个内壁。 优选地，所述侧壁和所述至少一个内壁以彼此不同的方向定向，所述方向从所述壁的平面的虚拟交叉点发出。 因此，可以以恒定的灵敏度对恒星方向的范围进行成像。
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4.发明申请Lithographic Apparatus and Method of Manufacturing an Electrostatic Clamp for a Lithographic Apparatus 有权平版印刷设备和制造用于平版印刷设备的静电夹具的方法公开(公告)号：US20110126406A1
公开(公告)日：2011-06-02
申请号：US13020399
申请日：2011-02-03
申请人： Hubert Adriaan VAN MIERLO , Erik Leonardus Ham , Hendricus Johannes Maria Meijer , Hendrik Antony Johannes Neerhof , Joost Jeroen Ottens , Johannes Adrianus Petrus Leijtens , Marco Le Kluse , Jan Hopman , Johannes Hubertus Josephina Moors
发明人： Hubert Adriaan VAN MIERLO , Erik Leonardus Ham , Hendricus Johannes Maria Meijer , Hendrik Antony Johannes Neerhof , Joost Jeroen Ottens , Johannes Adrianus Petrus Leijtens , Marco Le Kluse , Jan Hopman , Johannes Hubertus Josephina Moors
IPC分类号： H01B13/00
CPC分类号： H01L21/6831 , G03F7/70708 , Y10T29/49117
摘要： The invention relates to a method of manufacturing an electrostatic clamp configured to electrostatically clamp an article to an article support in a lithographic apparatus. The method includes providing a first layer of material, etching a recess in the first layer of material, and disposing an electrode in the recess of the first layer of material.
摘要翻译： 本发明涉及一种制造静电夹具的方法，所述静电夹具被配置为将制品静电地夹持在光刻设备中的制品支撑件上。 该方法包括提供第一层材料，蚀刻第一层材料中的凹槽，以及将电极设置在第一层材料的凹槽中。
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公开(公告)号：US20100100322A1
公开(公告)日：2010-04-22
申请号：US12445040
申请日：2007-10-11
IPC分类号： B64G1/36
CPC分类号： B64G1/361 , G01C21/025 , G01S3/7867
摘要： A star tracker is used to measure the direction of stars. Preferably a wide imaging range is provided so that a reliable orientation of the star tracker can be computed from measurements of the directions of star at substantially different directions. The star tracker comprises a light baffle and located between the light baffle and an image sensing arrangement. The light baffle comprises an array of walls, including sidewalls and at least one internal wall between the sidewalls. Preferably, the side walls and the at least one internal wall are oriented at mutually different orientations emanating from a virtual line of intersection of the planes of the walls. Thus a range of star directions can be imaged with constant sensitivity.
摘要翻译： 星际跟踪器用于测量星星的方向。 优选地，提供宽的成像范围，使得可以通过在基本上不同的方向上的星形方向的测量来计算星形跟踪器的可靠取向。 星形跟踪器包括光挡板并且位于光挡板和图像感测装置之间。 光挡板包括壁阵列，包括侧壁和在侧壁之间的至少一个内壁。 优选地，所述侧壁和所述至少一个内壁以彼此不同的方向定向，所述方向从所述壁的平面的虚拟交叉点发出。 因此，可以以恒定的灵敏度对恒星方向的范围进行成像。
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