Spectroscopic ellipsometer and polarimeter systems
    5.
    发明授权
    Spectroscopic ellipsometer and polarimeter systems 有权
    光谱椭偏仪和偏光计系统

    公开(公告)号:US07616319B1

    公开(公告)日:2009-11-10

    申请号:US11890354

    申请日:2007-08-05

    IPC分类号: G01B9/02 G01J3/45 G01J4/00

    摘要: A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, the system being functionally present in an environmental control chamber and therefore suitable for application in wide spectral range, (for example, 130-1700 nm). Preferred compensator design involves a substantially achromatic multiple element compensator systems wherein multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements thereof are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.

    摘要翻译: 具有电磁辐射的多色光束源的旋转补偿器光谱椭偏仪或偏振计系统,偏振器,用于支撑材料系统的分级器,分析器,分散光学器件和检测器系统,其包括多个检测器元件,该系统 功能上存在于环境控制室中,因此适用于宽光谱范围(例如,130-1700nm)。 优选的补偿器设计包括基本上消色差的多元件补偿器系统,其中多个全内反射进入到输入的电磁辐射束的延迟,并且其元件被定向为使净延迟相对于由于 元素系统的位置和/或旋转。