Integrated acoustic bandgap devices for energy confinement and methods of fabricating same
    7.
    发明申请
    Integrated acoustic bandgap devices for energy confinement and methods of fabricating same 有权
    用于能量限制的集成声带隙装置及其制造方法

    公开(公告)号:US20090152983A1

    公开(公告)日:2009-06-18

    申请号:US12002524

    申请日:2007-12-17

    IPC分类号: H03H9/15 H03H3/02

    摘要: The present invention is directed to monolithic integrated circuits incorporating an oscillator element that is particularly suited for use in timing applications. The oscillator element includes a resonator element having a piezoelectric material disposed between a pair of electrodes. The oscillator element also includes an acoustic confinement structure that may be disposed on either side of the resonator element. The acoustic confinement element includes alternating sets of low and high acoustic impedance materials. A temperature compensation layer may be disposed between the piezoelectric material and at least one of the electrodes. The oscillator element is monolithically integrated with an integrated circuit element through an interconnection. The oscillator element and the integrated circuit element may be fabricated sequentially or concurrently.

    摘要翻译: 本发明涉及包含特别适用于定时应用的振荡器元件的单片集成电路。 振荡器元件包括具有设置在一对电极之间的压电材料的谐振元件。 振荡器元件还包括可以设置在谐振器元件的任一侧的声学限制结构。 声学限制元件包括交替的低和高声阻抗材料组。 温度补偿层可以设置在压电材料和至少一个电极之间。 振荡器元件通过互连与集成电路元件单片集成。 振荡器元件和集成电路元件可以顺序地或同时地制造。

    Integrated acoustic bandgap devices for energy confinement and methods of fabricating same
    10.
    发明授权
    Integrated acoustic bandgap devices for energy confinement and methods of fabricating same 有权
    用于能量限制的集成声带隙装置及其制造方法

    公开(公告)号:US08089195B2

    公开(公告)日:2012-01-03

    申请号:US12002524

    申请日:2007-12-17

    IPC分类号: H03H9/17

    摘要: The present invention is directed to monolithic integrated circuits incorporating an oscillator element that is particularly suited for use in timing applications. The oscillator element includes a resonator element having a piezoelectric material disposed between a pair of electrodes. The oscillator element also includes an acoustic confinement structure that may be disposed on either side of the resonator element. The acoustic confinement element includes alternating sets of low and high acoustic impedance materials. A temperature compensation layer may be disposed between the piezoelectric material and at least one of the electrodes. The oscillator element is monolithically integrated with an integrated circuit element through an interconnection. The oscillator element and the integrated circuit element may be fabricated sequentially or concurrently.

    摘要翻译: 本发明涉及包含特别适用于定时应用的振荡器元件的单片集成电路。 振荡器元件包括具有设置在一对电极之间的压电材料的谐振元件。 振荡器元件还包括可以设置在谐振器元件的任一侧的声学限制结构。 声学限制元件包括交替的低和高声阻抗材料组。 温度补偿层可以设置在压电材料和至少一个电极之间。 振荡器元件通过互连与集成电路元件单片集成。 振荡器元件和集成电路元件可以顺序地或同时地制造。