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    Apparatus and method of shaping profiles of large-area PECVD electrodes
    1.
    发明申请
    Apparatus and method of shaping profiles of large-area PECVD electrodes 审中-公开
    大面积PECVD电极成形轮廓的装置和方法

    公开(公告)号：US20060005771A1

    公开(公告)日：2006-01-12

    申请号：US11143506

    申请日：2005-06-02

    申请人： John White ,  Emanuel Beer ,  Wei Chang ,  Robin Tiner ,  Soo Choi

    发明人： John White ,  Emanuel Beer ,  Wei Chang ,  Robin Tiner ,  Soo Choi

    IPC分类号： C23C16/00 ,  C23F1/00

    CPC分类号： C23C16/4583 ,  H01J37/3244 ,  H01J2237/3325

    摘要： An apparatus and method for shaping profiles of a large-area PECVD electrode is provided. A plasma-enhanced CVD chamber for processing a large-area substrate is first provided. The chamber includes a lower electrode that supports a large area substrate. The lower electrode is shaped to selectively conform the supported substrate in a selected orientation under operating conditions. The orientation may be either planar or nonplanar. The substrate complies with the shape of the electrode so the substrate is substantially parallel to an upper electrode in the chamber, and/or to a gas diffusion plate in the chamber. The lower electrode comprises a substrate support fabricated from a material of insufficient strength to support itself at operating temperatures and pressure in the chamber. The shape of the substrate support is adjusted by modifying the dimensions and/or planarity of a supporting base structure, and/or by appropriately varying the thickness of the substrate support.

    摘要翻译： 提供了一种用于形成大面积PECVD电极的轮廓的装置和方法。 首先提供用于处理大面积基板的等离子体增强CVD室。 该室包括支撑大面积基板的下电极。 下电极被成形为在操作条件下以选定的方向选择性地使受支撑的衬底符合。 取向可以是平面或非平面的。 基板符合电极的形状，因此基板基本上平行于腔室中的上部电极，和/或腔室中的气体扩散板。 下电极包括由强度不足的材料制成的衬底支撑件，以在腔室中的操作温度和压力下自身支撑。 通过改变支撑基底结构的尺寸和/或平面度和/或通过适当地改变基底支撑件的厚度来调节基底支撑件的形状。

    Methods and systems for calibration of inkjet drop positioning
    4.
    发明申请
    Methods and systems for calibration of inkjet drop positioning 审中-公开
    用于校准喷墨滴定位的方法和系统

    公开(公告)号：US20070070109A1

    公开(公告)日：2007-03-29

    申请号：US11238832

    申请日：2005-09-29

    申请人： John White ,  Emanuel Beer ,  Hongbin Ji ,  Chang Lin ,  Shinichi Kurita

    发明人： John White ,  Emanuel Beer ,  Hongbin Ji ,  Chang Lin ,  Shinichi Kurita

    IPC分类号： B41J29/393

    CPC分类号： B41J29/393

    摘要： Methods and apparatus for inkjet inkjet drop positioning are provided. A first method includes determining an intended deposition location of an ink drop on a substrate, depositing the ink drop on the substrate using an inkjet printing system, detecting a deposited location of the deposited ink drop on the substrate, comparing the deposited location to the intended location, determining a difference between the deposited location and the intended location, and compensating for the difference between the deposited location and the intended location by adjusting a parameter of an inkjet printing system. Numerous other aspects are provided.

    摘要翻译： 提供喷墨喷墨滴定位的方法和装置。 第一种方法包括确定墨滴在基底上的预期沉积位置，使用喷墨印刷系统将墨滴沉积在基底上，检测沉积的墨滴在基底上的沉积位置，将沉积位置与预期的位置进行比较 确定存放位置与预期位置之间的差异，以及通过调整喷墨打印系统的参数来补偿存放位置与预期位置之间的差异。 提供了许多其他方面。

    METHODS AND SYSTEMS FOR CALIBRATION OF INKJET DROP POSITIONING
    7.
    发明申请
    METHODS AND SYSTEMS FOR CALIBRATION OF INKJET DROP POSITIONING 审中-公开
    用于校准喷墨定位的方法和系统

    公开(公告)号：US20090122099A1

    公开(公告)日：2009-05-14

    申请号：US12354759

    申请日：2009-01-15

    申请人： John M. White ,  Emanuel Beer ,  Hongbin Ji ,  Chang-Tsung Lin ,  Shinichi Kurita

    发明人： John M. White ,  Emanuel Beer ,  Hongbin Ji ,  Chang-Tsung Lin ,  Shinichi Kurita

    IPC分类号： B41J29/393

    CPC分类号： B41J29/393

    摘要： Methods and apparatus for inkjet drop positioning are provided. A first method includes determining an intended deposition location of an ink drop on a substrate, depositing the ink drop on the substrate using an inkjet printing system, detecting a deposited location of the deposited ink drop on the substrate, comparing the deposited location to the intended location, determining a difference between the deposited location and the intended location, and compensating for the difference between the deposited location and the intended location by adjusting a parameter of an inkjet printing system. Numerous other aspects are provided.

    摘要翻译： 提供了用于喷墨滴定位的方法和装置。 第一种方法包括确定墨滴在基底上的预期沉积位置，使用喷墨印刷系统将墨滴沉积在基底上，检测沉积的墨滴在基底上的沉积位置，将沉积位置与预期的位置进行比较 确定存放位置与预期位置之间的差异，以及通过调整喷墨打印系统的参数来补偿存放位置与预期位置之间的差异。 提供了许多其他方面。

    CHAMBER ISOLATION VALVE RF GROUNDING
    8.
    发明申请
    CHAMBER ISOLATION VALVE RF GROUNDING 有权
    室隔离阀射频接地

    公开(公告)号：US20090090883A1

    公开(公告)日：2009-04-09

    申请号：US12333043

    申请日：2008-12-11

    申请人： Ke Ling Lee ,  Shinichi Kurita ,  Emanuel Beer

    发明人： Ke Ling Lee ,  Shinichi Kurita ,  Emanuel Beer

    IPC分类号： F16K25/00

    CPC分类号： F16K3/0227 ,  F16K51/02 ,  H01J37/32844 ,  H01J2237/166 ,  H01L21/67126 ,  Y02C20/30 ,  Y02P70/605 ,  Y10S277/919 ,  Y10S277/92 ,  Y10T137/8242

    摘要： Embodiments described herein provide a method and apparatus for grounding a chamber isolation valve. In one embodiment, a grounded chamber isolation valve for a plasma processing system is described. The chamber isolation valve includes a door and a bracing member movably attached to and opposing the door, and at least one electrically conductive member in electrical communication with the door, the at least one electrically conductive member comprising one or more reaction bumpers disposed on the bracing member that are adapted to contact at least one grounded component of the plasma processing system when the door is in the closed position.

    摘要翻译： 本文描述的实施例提供了用于使腔室隔离阀接地的方法和装置。 在一个实施例中，描述了用于等离子体处理系统的接地室隔离阀。 室隔离阀包括门和可移动地附接到门并与其相对的支撑构件，以及至少一个与门电连通的导电构件，所述至少一个导电构件包括设置在支撑上的一个或多个反应缓冲器 当门处于关闭位置时，适于接触等离子体处理系统的至少一个接地部件的构件。

    Integrated substrate transfer module
    9.
    发明授权
    Integrated substrate transfer module 有权
    集成基板传输模块

    公开(公告)号：US07330021B2

    公开(公告)日：2008-02-12

    申请号：US11018236

    申请日：2004-12-21

    申请人： Shinichi Kurita ,  Emanuel Beer ,  Hung T. Nguyen ,  Benjamin Johnston ,  Fayez E. Abboud

    发明人： Shinichi Kurita ,  Emanuel Beer ,  Hung T. Nguyen ,  Benjamin Johnston ,  Fayez E. Abboud

    IPC分类号： G01R13/04

    CPC分类号： G09G3/006 ,  G01R31/2893 ,  G01R31/305

    摘要： A substrate table and method for supporting and transferring a substrate are provided. The substrate table includes a segmented stage having an upper surface for supporting a substrate, and an end effector. The end effector includes two or more spaced apart fingers and an upper surface for supporting a substrate. The end effector is at least partially disposed and moveable within the segmented stage such that the fingers of the end effector and the segmented stage interdigitate to occupy the same horizontal plane. The segmented stage is adapted to raise and lower about the end effector.

    摘要翻译： 提供了用于支撑和转移衬底的衬底台和方法。 衬底台包括具有用于支撑衬底的上表面的分段段和端部执行器。 末端执行器包括两个或更多间隔开的指状物和用于支撑基底的上表面。 末端执行器至少部分地设置并在分段台内移动，使得末端执行器和分段台阶的指状物相互指向以占据相同的水平面。 分段段适于围绕末端执行器升高和降低。

    Configurable prober for TFT LCD array testing
    10.
    发明申请
    Configurable prober for TFT LCD array testing 有权
    用于TFT LCD阵列测试的可配置探头

    公开(公告)号：US20050179451A1

    公开(公告)日：2005-08-18

    申请号：US10889695

    申请日：2004-07-12

    申请人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez Frank Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

    发明人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez Frank Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

    IPC分类号： G01R31/302 ,  G01R31/26 ,  G01R31/305 ,  G02F1/13 ,  G09G3/00 ,  H01L21/687

    CPC分类号： G09G3/006 ,  G01R31/2893 ,  G01R31/305

    摘要： An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame.

    摘要翻译： 提供了一种用于电子设备测试系统的改进的探测器。 探测器是“可配置的”，这意味着它可以适用于不同的设备布局和基板尺寸。 探测器通常包括框架，至少一个具有第一端和第二端的探测杆，框架连接机构，其允许在沿着框架的选定点准备将探测杆重新定位到框架，以及多个电触点 沿着探测杆的引脚，用于在测试期间将选定的电子设备与系统控制器电连通。 在一个实施例中，探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。 通常，玻璃基板是正方形的，框架也是正方形的。 以这种方式，“x”和“y”轴由框架定义。