FORMING METHOD OF MAGNETIC PATTERN AND MANUFACTURING METHOD OF PATTERNED MEDIA USING THE SAME
    4.
    发明申请
    FORMING METHOD OF MAGNETIC PATTERN AND MANUFACTURING METHOD OF PATTERNED MEDIA USING THE SAME 审中-公开
    磁性图案的形成方法和使用该图案的图形化介质的制造方法

    公开(公告)号:US20100270710A1

    公开(公告)日:2010-10-28

    申请号:US12809681

    申请日:2008-12-22

    IPC分类号: B29C59/16

    CPC分类号: G11B5/855

    摘要: The present invention relates to a method for fabricating a magnetic pattern and a method for manufacturing a patterned media through fabrication of the magnetic pattern. The method for fabricating the magnetic pattern according to an embodiment of the present invention comprises the steps of (a) coating a pattern forming layer for fabricating a magnetic pattern on a substrate; (b) forming a mask layer that has a designed opening pattern with a nano imprinting process using a stamp that has a nanostructure pattern on the pattern forming layer; and (c) converting an area of the pattern forming layer that corresponds to the predetermined opening pattern into a magnetic area by irradiating a predetermined hydrogen ion beam onto the mask layer.

    摘要翻译: 本发明涉及一种用于制造磁性图案的方法和通过制造磁图案来制造图案化介质的方法。 根据本发明的实施例的制造磁图案的方法包括以下步骤:(a)在基板上涂布用于制造磁图案的图案形成层; (b)使用在图案形成层上具有纳米结构图案的印模,以纳米压印工艺形成具有设计的开口图案的掩模层; 和(c)通过将预定的氢离子束照射到掩模层上将与预定开口图案相对应的图案形成层的区域转换成磁区。